Search

Xilin Guo

Examiner (ID: 8680, Phone: (571)272-5786 , Office: P/2616 )

Most Active Art Unit
2616
Art Unit(s)
2616
Total Applications
554
Issued Applications
442
Pending Applications
56
Abandoned Applications
82

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 10394616 [patent_doc_number] => 20150279623 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-10-01 [patent_title] => 'COMBINED INDUCTIVE AND CAPACITIVE SOURCES FOR SEMICONDUCTOR PROCESS EQUIPMENT' [patent_app_type] => utility [patent_app_number] => 14/224951 [patent_app_country] => US [patent_app_date] => 2014-03-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3460 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14224951 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/224951
COMBINED INDUCTIVE AND CAPACITIVE SOURCES FOR SEMICONDUCTOR PROCESS EQUIPMENT Mar 24, 2014 Abandoned
Array ( [id] => 9737766 [patent_doc_number] => 20140273484 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-09-18 [patent_title] => 'INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD USING THE SAME' [patent_app_type] => utility [patent_app_number] => 14/200978 [patent_app_country] => US [patent_app_date] => 2014-03-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 4779 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14200978 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/200978
INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD USING THE SAME Mar 6, 2014 Abandoned
Array ( [id] => 12047254 [patent_doc_number] => 09824863 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-11-21 [patent_title] => 'Plasma stabilization method and plasma apparatus' [patent_app_type] => utility [patent_app_number] => 14/192230 [patent_app_country] => US [patent_app_date] => 2014-02-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 13 [patent_no_of_words] => 4961 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 150 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14192230 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/192230
Plasma stabilization method and plasma apparatus Feb 26, 2014 Issued
Array ( [id] => 9593958 [patent_doc_number] => 20140190635 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-07-10 [patent_title] => 'PLASMA CHAMBER AND APPARATUS FOR TREATING SUBSTRATE' [patent_app_type] => utility [patent_app_number] => 14/141740 [patent_app_country] => US [patent_app_date] => 2013-12-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 5948 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14141740 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/141740
PLASMA CHAMBER AND APPARATUS FOR TREATING SUBSTRATE Dec 26, 2013 Abandoned
Array ( [id] => 10212487 [patent_doc_number] => 20150097479 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-04-09 [patent_title] => 'MULTIPLE ZONE COIL ANTENNA WITH PLURAL RADIAL LOBES' [patent_app_type] => utility [patent_app_number] => 14/107184 [patent_app_country] => US [patent_app_date] => 2013-12-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 4108 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14107184 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/107184
Multiple zone coil antenna with plural radial lobes Dec 15, 2013 Issued
Array ( [id] => 9546211 [patent_doc_number] => 20140170859 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-06-19 [patent_title] => 'FILM FORMATION DEVICE, SUBSTRATE PROCESSING DEVICE, AND FILM FORMATION METHOD' [patent_app_type] => utility [patent_app_number] => 14/100224 [patent_app_country] => US [patent_app_date] => 2013-12-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 24 [patent_figures_cnt] => 24 [patent_no_of_words] => 13955 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14100224 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/100224
Film formation device, substrate processing device, and film formation method Dec 8, 2013 Issued
Array ( [id] => 9508093 [patent_doc_number] => 20140144584 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-05-29 [patent_title] => 'PLASMA ANTENNA AND APPARATUS FOR GENERATING PLASMA HAVING THE SAME' [patent_app_type] => utility [patent_app_number] => 14/091605 [patent_app_country] => US [patent_app_date] => 2013-11-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 7253 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14091605 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/091605
PLASMA ANTENNA AND APPARATUS FOR GENERATING PLASMA HAVING THE SAME Nov 26, 2013 Abandoned
Array ( [id] => 11200997 [patent_doc_number] => 09431216 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2016-08-30 [patent_title] => 'ICP source design for plasma uniformity and efficiency enhancement' [patent_app_type] => utility [patent_app_number] => 14/066631 [patent_app_country] => US [patent_app_date] => 2013-10-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 8 [patent_no_of_words] => 3984 [patent_no_of_claims] => 8 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 127 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14066631 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/066631
ICP source design for plasma uniformity and efficiency enhancement Oct 28, 2013 Issued
Array ( [id] => 9315873 [patent_doc_number] => 20140048211 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-02-20 [patent_title] => 'PLASMA PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 14/064649 [patent_app_country] => US [patent_app_date] => 2013-10-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 13201 [patent_no_of_claims] => 3 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14064649 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/064649
PLASMA PROCESSING APPARATUS Oct 27, 2013 Abandoned
Array ( [id] => 9459470 [patent_doc_number] => 20140123895 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-05-08 [patent_title] => 'PLASMA PROCESS APPARATUS AND PLASMA GENERATING DEVICE' [patent_app_type] => utility [patent_app_number] => 14/063039 [patent_app_country] => US [patent_app_date] => 2013-10-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 27 [patent_figures_cnt] => 27 [patent_no_of_words] => 14361 [patent_no_of_claims] => 11 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14063039 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/063039
PLASMA PROCESS APPARATUS AND PLASMA GENERATING DEVICE Oct 24, 2013 Abandoned
Array ( [id] => 11180568 [patent_doc_number] => 09412563 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2016-08-09 [patent_title] => 'Spatially discrete multi-loop RF-driven plasma source having plural independent zones' [patent_app_type] => utility [patent_app_number] => 14/026227 [patent_app_country] => US [patent_app_date] => 2013-09-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 16 [patent_no_of_words] => 4525 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 100 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14026227 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/026227
Spatially discrete multi-loop RF-driven plasma source having plural independent zones Sep 12, 2013 Issued
Array ( [id] => 9927525 [patent_doc_number] => 20150075717 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-03-19 [patent_title] => 'INDUCTIVELY COUPLED SPATIALLY DISCRETE MULTI-LOOP RF-DRIVEN PLASMA SOURCE' [patent_app_type] => utility [patent_app_number] => 14/026205 [patent_app_country] => US [patent_app_date] => 2013-09-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 4467 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14026205 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/026205
INDUCTIVELY COUPLED SPATIALLY DISCRETE MULTI-LOOP RF-DRIVEN PLASMA SOURCE Sep 12, 2013 Abandoned
Array ( [id] => 9792845 [patent_doc_number] => 20150004789 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-01-01 [patent_title] => 'SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD' [patent_app_type] => utility [patent_app_number] => 14/017513 [patent_app_country] => US [patent_app_date] => 2013-09-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 3727 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14017513 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/017513
SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD Sep 3, 2013 Abandoned
Array ( [id] => 9333790 [patent_doc_number] => 20140060572 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-03-06 [patent_title] => 'PLASMA PROCESSING APPARATUS AND CLEANING METHOD FOR REMOVING METAL OXIDE FILM' [patent_app_type] => utility [patent_app_number] => 13/975528 [patent_app_country] => US [patent_app_date] => 2013-08-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 7271 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13975528 [rel_patent_id] =>[rel_patent_doc_number] =>)
13/975528
PLASMA PROCESSING APPARATUS AND CLEANING METHOD FOR REMOVING METAL OXIDE FILM Aug 25, 2013 Abandoned
Array ( [id] => 12166727 [patent_doc_number] => 09885493 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-02-06 [patent_title] => 'Air cooled faraday shield and methods for using the same' [patent_app_type] => utility [patent_app_number] => 13/974324 [patent_app_country] => US [patent_app_date] => 2013-08-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 19 [patent_no_of_words] => 8875 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 293 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13974324 [rel_patent_id] =>[rel_patent_doc_number] =>)
13/974324
Air cooled faraday shield and methods for using the same Aug 22, 2013 Issued
Array ( [id] => 11775998 [patent_doc_number] => 09384948 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2016-07-05 [patent_title] => 'Hammerhead TCP coil support for high RF power conductor etch systems' [patent_app_type] => utility [patent_app_number] => 13/924477 [patent_app_country] => US [patent_app_date] => 2013-06-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 13 [patent_no_of_words] => 6195 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 127 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13924477 [rel_patent_id] =>[rel_patent_doc_number] =>)
13/924477
Hammerhead TCP coil support for high RF power conductor etch systems Jun 20, 2013 Issued
Array ( [id] => 9785860 [patent_doc_number] => 20140302680 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-10-09 [patent_title] => 'INTERNAL PLASMA GRID FOR SEMICONDUCTOR FABRICATION' [patent_app_type] => utility [patent_app_number] => 13/916318 [patent_app_country] => US [patent_app_date] => 2013-06-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 12600 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13916318 [rel_patent_id] =>[rel_patent_doc_number] =>)
13/916318
Internal plasma grid for semiconductor fabrication Jun 11, 2013 Issued
Array ( [id] => 9259011 [patent_doc_number] => 20130340940 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2013-12-26 [patent_title] => 'RF FEED LINE' [patent_app_type] => utility [patent_app_number] => 13/914217 [patent_app_country] => US [patent_app_date] => 2013-06-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 3879 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13914217 [rel_patent_id] =>[rel_patent_doc_number] =>)
13/914217
RF FEED LINE Jun 9, 2013 Abandoned
Array ( [id] => 9265922 [patent_doc_number] => 20140020838 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-01-23 [patent_title] => 'SYMMETRICAL INDUCTIVELY COUPLED PLASMA SOURCE WITH COAXIAL RF FEED AND COAXIAL SHIELDING' [patent_app_type] => utility [patent_app_number] => 13/897585 [patent_app_country] => US [patent_app_date] => 2013-05-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 34 [patent_figures_cnt] => 34 [patent_no_of_words] => 9402 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13897585 [rel_patent_id] =>[rel_patent_doc_number] =>)
13/897585
Symmetrical inductively coupled plasma source with coaxial RF feed and coaxial shielding May 19, 2013 Issued
Array ( [id] => 9265924 [patent_doc_number] => 20140020839 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2014-01-23 [patent_title] => 'INDUCTIVELY COUPLED PLASMA SOURCE WITH SYMMETRICAL RF FEED' [patent_app_type] => utility [patent_app_number] => 13/897592 [patent_app_country] => US [patent_app_date] => 2013-05-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 34 [patent_figures_cnt] => 34 [patent_no_of_words] => 9469 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 13897592 [rel_patent_id] =>[rel_patent_doc_number] =>)
13/897592
Inductively coupled plasma source with symmetrical RF feed May 19, 2013 Issued
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