
Xilin Guo
Examiner (ID: 8680, Phone: (571)272-5786 , Office: P/2616 )
| Most Active Art Unit | 2616 |
| Art Unit(s) | 2616 |
| Total Applications | 554 |
| Issued Applications | 442 |
| Pending Applications | 56 |
| Abandoned Applications | 82 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 10394616
[patent_doc_number] => 20150279623
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2015-10-01
[patent_title] => 'COMBINED INDUCTIVE AND CAPACITIVE SOURCES FOR SEMICONDUCTOR PROCESS EQUIPMENT'
[patent_app_type] => utility
[patent_app_number] => 14/224951
[patent_app_country] => US
[patent_app_date] => 2014-03-25
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
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[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14224951
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/224951 | COMBINED INDUCTIVE AND CAPACITIVE SOURCES FOR SEMICONDUCTOR PROCESS EQUIPMENT | Mar 24, 2014 | Abandoned |
Array
(
[id] => 9737766
[patent_doc_number] => 20140273484
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2014-09-18
[patent_title] => 'INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD USING THE SAME'
[patent_app_type] => utility
[patent_app_number] => 14/200978
[patent_app_country] => US
[patent_app_date] => 2014-03-07
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[rel_patent_id] =>[rel_patent_doc_number] =>) 14/200978 | INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD USING THE SAME | Mar 6, 2014 | Abandoned |
Array
(
[id] => 12047254
[patent_doc_number] => 09824863
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2017-11-21
[patent_title] => 'Plasma stabilization method and plasma apparatus'
[patent_app_type] => utility
[patent_app_number] => 14/192230
[patent_app_country] => US
[patent_app_date] => 2014-02-27
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
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[patent_no_of_words] => 4961
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[rel_patent_id] =>[rel_patent_doc_number] =>) 14/192230 | Plasma stabilization method and plasma apparatus | Feb 26, 2014 | Issued |
Array
(
[id] => 9593958
[patent_doc_number] => 20140190635
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2014-07-10
[patent_title] => 'PLASMA CHAMBER AND APPARATUS FOR TREATING SUBSTRATE'
[patent_app_type] => utility
[patent_app_number] => 14/141740
[patent_app_country] => US
[patent_app_date] => 2013-12-27
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 14
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[patent_no_of_words] => 5948
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[rel_patent_id] =>[rel_patent_doc_number] =>) 14/141740 | PLASMA CHAMBER AND APPARATUS FOR TREATING SUBSTRATE | Dec 26, 2013 | Abandoned |
Array
(
[id] => 10212487
[patent_doc_number] => 20150097479
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2015-04-09
[patent_title] => 'MULTIPLE ZONE COIL ANTENNA WITH PLURAL RADIAL LOBES'
[patent_app_type] => utility
[patent_app_number] => 14/107184
[patent_app_country] => US
[patent_app_date] => 2013-12-16
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 13
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[rel_patent_id] =>[rel_patent_doc_number] =>) 14/107184 | Multiple zone coil antenna with plural radial lobes | Dec 15, 2013 | Issued |
Array
(
[id] => 9546211
[patent_doc_number] => 20140170859
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2014-06-19
[patent_title] => 'FILM FORMATION DEVICE, SUBSTRATE PROCESSING DEVICE, AND FILM FORMATION METHOD'
[patent_app_type] => utility
[patent_app_number] => 14/100224
[patent_app_country] => US
[patent_app_date] => 2013-12-09
[patent_effective_date] => 0000-00-00
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[rel_patent_id] =>[rel_patent_doc_number] =>) 14/100224 | Film formation device, substrate processing device, and film formation method | Dec 8, 2013 | Issued |
Array
(
[id] => 9508093
[patent_doc_number] => 20140144584
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2014-05-29
[patent_title] => 'PLASMA ANTENNA AND APPARATUS FOR GENERATING PLASMA HAVING THE SAME'
[patent_app_type] => utility
[patent_app_number] => 14/091605
[patent_app_country] => US
[patent_app_date] => 2013-11-27
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 12
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[patent_no_of_words] => 7253
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[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14091605
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/091605 | PLASMA ANTENNA AND APPARATUS FOR GENERATING PLASMA HAVING THE SAME | Nov 26, 2013 | Abandoned |
Array
(
[id] => 11200997
[patent_doc_number] => 09431216
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2016-08-30
[patent_title] => 'ICP source design for plasma uniformity and efficiency enhancement'
[patent_app_type] => utility
[patent_app_number] => 14/066631
[patent_app_country] => US
[patent_app_date] => 2013-10-29
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 7
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[rel_patent_id] =>[rel_patent_doc_number] =>) 14/066631 | ICP source design for plasma uniformity and efficiency enhancement | Oct 28, 2013 | Issued |
Array
(
[id] => 9315873
[patent_doc_number] => 20140048211
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2014-02-20
[patent_title] => 'PLASMA PROCESSING APPARATUS'
[patent_app_type] => utility
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[rel_patent_id] =>[rel_patent_doc_number] =>) 14/064649 | PLASMA PROCESSING APPARATUS | Oct 27, 2013 | Abandoned |
Array
(
[id] => 9459470
[patent_doc_number] => 20140123895
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2014-05-08
[patent_title] => 'PLASMA PROCESS APPARATUS AND PLASMA GENERATING DEVICE'
[patent_app_type] => utility
[patent_app_number] => 14/063039
[patent_app_country] => US
[patent_app_date] => 2013-10-25
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[rel_patent_id] =>[rel_patent_doc_number] =>) 14/063039 | PLASMA PROCESS APPARATUS AND PLASMA GENERATING DEVICE | Oct 24, 2013 | Abandoned |
Array
(
[id] => 11180568
[patent_doc_number] => 09412563
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2016-08-09
[patent_title] => 'Spatially discrete multi-loop RF-driven plasma source having plural independent zones'
[patent_app_type] => utility
[patent_app_number] => 14/026227
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[rel_patent_id] =>[rel_patent_doc_number] =>) 14/026227 | Spatially discrete multi-loop RF-driven plasma source having plural independent zones | Sep 12, 2013 | Issued |
Array
(
[id] => 9927525
[patent_doc_number] => 20150075717
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2015-03-19
[patent_title] => 'INDUCTIVELY COUPLED SPATIALLY DISCRETE MULTI-LOOP RF-DRIVEN PLASMA SOURCE'
[patent_app_type] => utility
[patent_app_number] => 14/026205
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[rel_patent_id] =>[rel_patent_doc_number] =>) 14/026205 | INDUCTIVELY COUPLED SPATIALLY DISCRETE MULTI-LOOP RF-DRIVEN PLASMA SOURCE | Sep 12, 2013 | Abandoned |
Array
(
[id] => 9792845
[patent_doc_number] => 20150004789
[patent_country] => US
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[patent_issue_date] => 2015-01-01
[patent_title] => 'SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD'
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[rel_patent_id] =>[rel_patent_doc_number] =>) 14/017513 | SEMICONDUCTOR MANUFACTURING APPARATUS AND METHOD | Sep 3, 2013 | Abandoned |
Array
(
[id] => 9333790
[patent_doc_number] => 20140060572
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[patent_kind] => A1
[patent_issue_date] => 2014-03-06
[patent_title] => 'PLASMA PROCESSING APPARATUS AND CLEANING METHOD FOR REMOVING METAL OXIDE FILM'
[patent_app_type] => utility
[patent_app_number] => 13/975528
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[rel_patent_id] =>[rel_patent_doc_number] =>) 13/975528 | PLASMA PROCESSING APPARATUS AND CLEANING METHOD FOR REMOVING METAL OXIDE FILM | Aug 25, 2013 | Abandoned |
Array
(
[id] => 12166727
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[patent_issue_date] => 2018-02-06
[patent_title] => 'Air cooled faraday shield and methods for using the same'
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[rel_patent_id] =>[rel_patent_doc_number] =>) 13/974324 | Air cooled faraday shield and methods for using the same | Aug 22, 2013 | Issued |
Array
(
[id] => 11775998
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[patent_title] => 'Hammerhead TCP coil support for high RF power conductor etch systems'
[patent_app_type] => utility
[patent_app_number] => 13/924477
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Array
(
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[rel_patent_id] =>[rel_patent_doc_number] =>) 13/916318 | Internal plasma grid for semiconductor fabrication | Jun 11, 2013 | Issued |
Array
(
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Array
(
[id] => 9265922
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[rel_patent_id] =>[rel_patent_doc_number] =>) 13/897585 | Symmetrical inductively coupled plasma source with coaxial RF feed and coaxial shielding | May 19, 2013 | Issued |
Array
(
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[rel_patent_id] =>[rel_patent_doc_number] =>) 13/897592 | Inductively coupled plasma source with symmetrical RF feed | May 19, 2013 | Issued |