Xilin Guo

Array ( [id] => 17840623 [patent_doc_number] => 20220277929 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-01 [patent_title] => SINGLE-TURN AND LAMINATED-WALL INDUCTIVELY COUPLED PLASMA SOURCES [patent_app_type] => utility [patent_app_number] => 17/749394 [patent_app_country] => US [patent_app_date] => 2022-05-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9367 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 148 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17749394 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17840623 [patent_doc_number] => 20220277929 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-01 [patent_title] => SINGLE-TURN AND LAMINATED-WALL INDUCTIVELY COUPLED PLASMA SOURCES [patent_app_type] => utility [patent_app_number] => 17/749394 [patent_app_country] => US [patent_app_date] => 2022-05-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9367 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 148 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17749394 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17833558 [patent_doc_number] => 20220270862 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-08-25 [patent_title] => SUBSTRATE SUPPORT, PLASMA PROCESSING SYSTEM, AND PLASMA ETCHING METHOD [patent_app_type] => utility [patent_app_number] => 17/668429 [patent_app_country] => US [patent_app_date] => 2022-02-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4684 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 140 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17668429 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17737941 [patent_doc_number] => 20220223403 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-07-14 [patent_title] => DEPOSITION METHOD AND PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/456680 [patent_app_country] => US [patent_app_date] => 2021-11-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6794 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -4 [patent_words_short_claim] => 81 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17456680 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17645208 [patent_doc_number] => 20220172947 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-02 [patent_title] => INSULATION PLATE AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME [patent_app_type] => utility [patent_app_number] => 17/532079 [patent_app_country] => US [patent_app_date] => 2021-11-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6729 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 68 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17532079 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17615284 [patent_doc_number] => 20220157564 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-19 [patent_title] => PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/522939 [patent_app_country] => US [patent_app_date] => 2021-11-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9476 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -6 [patent_words_short_claim] => 229 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17522939 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17416971 [patent_doc_number] => 20220051875 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-02-17 [patent_title] => Ion Stratification Using Bias Pulses of Short Duration [patent_app_type] => utility [patent_app_number] => 17/452540 [patent_app_country] => US [patent_app_date] => 2021-10-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9001 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 102 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17452540 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17339345 [patent_doc_number] => 20220005676 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-01-06 [patent_title] => CHAMBER APPLIED IN SEMICONDUCTOR PROCESS [patent_app_type] => utility [patent_app_number] => 17/475697 [patent_app_country] => US [patent_app_date] => 2021-09-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3337 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 95 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17475697 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19741144 [patent_doc_number] => 12217989 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-02-04 [patent_title] => Semiconductor apparatus and method of collecting residues [patent_app_type] => utility [patent_app_number] => 17/395435 [patent_app_country] => US [patent_app_date] => 2021-08-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 13 [patent_no_of_words] => 6514 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17395435 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17645187 [patent_doc_number] => 20220172926 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-06-02 [patent_title] => PLASMA PROCESSING APPARATUS AND METHOD FOR FABRICATING SEMICONDUCTOR DEVICE USING THE SAME [patent_app_type] => utility [patent_app_number] => 17/443535 [patent_app_country] => US [patent_app_date] => 2021-07-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8177 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 46 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17443535 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17174018 [patent_doc_number] => 20210327689 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-10-21 [patent_title] => METAL CONTAMINATION REDUCTION IN SUBSTRATE PROCESSING SYSTEMS WITH TRANSFORMER COUPLED PLASMA [patent_app_type] => utility [patent_app_number] => 17/363870 [patent_app_country] => US [patent_app_date] => 2021-06-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4840 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 86 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17363870 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17174048 [patent_doc_number] => 20210327719 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-10-21 [patent_title] => METHOD FOR PROCESSING WORKPIECE [patent_app_type] => utility [patent_app_number] => 17/362285 [patent_app_country] => US [patent_app_date] => 2021-06-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8708 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 146 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17362285 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18068095 [patent_doc_number] => 20220399183 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-12-15 [patent_title] => METHOD AND APPARATUS TO REDUCE FEATURE CHARGING IN PLASMA PROCESSING CHAMBER [patent_app_type] => utility [patent_app_number] => 17/352176 [patent_app_country] => US [patent_app_date] => 2021-06-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12350 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 178 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17352176 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17232160 [patent_doc_number] => 20210358717 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-18 [patent_title] => PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/314871 [patent_app_country] => US [patent_app_date] => 2021-05-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13543 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 161 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17314871 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17232160 [patent_doc_number] => 20210358717 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-18 [patent_title] => PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/314871 [patent_app_country] => US [patent_app_date] => 2021-05-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 13543 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 161 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17314871 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19943562 [patent_doc_number] => 12315698 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-05-27 [patent_title] => Plasma processing method and plasma processing apparatus [patent_app_type] => utility [patent_app_number] => 17/313180 [patent_app_country] => US [patent_app_date] => 2021-05-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 37 [patent_no_of_words] => 6577 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 364 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17313180 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17174008 [patent_doc_number] => 20210327679 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-10-21 [patent_title] => SYSTEM, METHOD, AND APPARATUS FOR ION CURRENT COMPENSATION [patent_app_type] => utility [patent_app_number] => 17/245825 [patent_app_country] => US [patent_app_date] => 2021-04-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 21376 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 107 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17245825 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17203411 [patent_doc_number] => 20210343506 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-11-04 [patent_title] => Methods And Apparatus For Pulsed Inductively Coupled Plasma For Surface Treatment Processing [patent_app_type] => utility [patent_app_number] => 17/245803 [patent_app_country] => US [patent_app_date] => 2021-04-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7520 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 148 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17245803 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17040560 [patent_doc_number] => 20210257196 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-08-19 [patent_title] => Plasma Processing Apparatus and Methods [patent_app_type] => utility [patent_app_number] => 17/225547 [patent_app_country] => US [patent_app_date] => 2021-04-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7907 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17225547 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18334110 [patent_doc_number] => 20230126058 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-04-27 [patent_title] => DIELECTRIC WINDOW FOR SUBSTRATE PROCESSING CHAMBER [patent_app_type] => utility [patent_app_number] => 17/913119 [patent_app_country] => US [patent_app_date] => 2021-03-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4157 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -19 [patent_words_short_claim] => 101 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17913119 [rel_patent_id] =>[rel_patent_doc_number] =>)