Xilin Guo

Array ( [id] => 19957292 [patent_doc_number] => 12327709 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-06-10 [patent_title] => Antennas, circuits for generating plasma, plasma processing apparatus, and methods of manufacturing semiconductor devices using the same [patent_app_type] => utility [patent_app_number] => 17/186965 [patent_app_country] => US [patent_app_date] => 2021-02-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 21 [patent_figures_cnt] => 30 [patent_no_of_words] => 6495 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 328 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17186965 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18239622 [patent_doc_number] => 20230071933 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-03-09 [patent_title] => PLANAR MULTI-LAYER RADIO FREQUENCY FILTERS INCLUDING STACKED COILS WITH STRUCTURAL CAPACITANCE [patent_app_type] => utility [patent_app_number] => 17/800168 [patent_app_country] => US [patent_app_date] => 2021-02-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10218 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -25 [patent_words_short_claim] => 146 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17800168 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 18004107 [patent_doc_number] => 20220362873 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-17 [patent_title] => METHOD FOR MANUFACTURING OXIDE-REMOVED OBJECT AND OXIDE REMOVING APPARATUS [patent_app_type] => utility [patent_app_number] => 17/790959 [patent_app_country] => US [patent_app_date] => 2021-01-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7778 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 119 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17790959 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 19356838 [patent_doc_number] => 12057294 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-08-06 [patent_title] => Plasma processing apparatus and plasma processing method [patent_app_type] => utility [patent_app_number] => 17/123130 [patent_app_country] => US [patent_app_date] => 2020-12-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 12 [patent_no_of_words] => 8925 [patent_no_of_claims] => 5 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 242 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17123130 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16660548 [patent_doc_number] => 20210057185 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-02-25 [patent_title] => PLASMA ANTENNA AND APPARATUS FOR GENERATING PLASMA HAVING THE SAME [patent_app_type] => utility [patent_app_number] => 17/092757 [patent_app_country] => US [patent_app_date] => 2020-11-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7254 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 191 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17092757 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17523025 [patent_doc_number] => 20220108874 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-04-07 [patent_title] => LOW CURRENT HIGH ION ENERGY PLASMA CONTROL SYSTEM [patent_app_type] => utility [patent_app_number] => 17/063824 [patent_app_country] => US [patent_app_date] => 2020-10-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4838 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 65 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17063824 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16544882 [patent_doc_number] => 20200411297 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-12-31 [patent_title] => SUBSTRATE PROCESSING SYSTEM INCLUDING COIL WITH RF POWERED FARADAY SHIELD [patent_app_type] => utility [patent_app_number] => 17/016888 [patent_app_country] => US [patent_app_date] => 2020-09-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3604 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 152 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17016888 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16528689 [patent_doc_number] => 20200402770 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-12-24 [patent_title] => HIGH ENERGY ATOMIC LAYER ETCHING [patent_app_type] => utility [patent_app_number] => 17/008244 [patent_app_country] => US [patent_app_date] => 2020-08-31 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 18167 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -25 [patent_words_short_claim] => 111 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17008244 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17852338 [patent_doc_number] => 20220282380 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-08 [patent_title] => PEDESTAL SETUP USING CAMERA WAFER [patent_app_type] => utility [patent_app_number] => 17/630218 [patent_app_country] => US [patent_app_date] => 2020-07-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9450 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 114 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17630218 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17852338 [patent_doc_number] => 20220282380 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-09-08 [patent_title] => PEDESTAL SETUP USING CAMERA WAFER [patent_app_type] => utility [patent_app_number] => 17/630218 [patent_app_country] => US [patent_app_date] => 2020-07-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9450 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 114 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17630218 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 20132212 [patent_doc_number] => 12374530 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2025-07-29 [patent_title] => Semiconductor processing apparatus for generating plasma [patent_app_type] => utility [patent_app_number] => 16/928008 [patent_app_country] => US [patent_app_date] => 2020-07-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 11 [patent_no_of_words] => 3421 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 157 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16928008 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16402229 [patent_doc_number] => 20200343087 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-10-29 [patent_title] => Pre-Clean for Contacts [patent_app_type] => utility [patent_app_number] => 16/927638 [patent_app_country] => US [patent_app_date] => 2020-07-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5701 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 63 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16927638 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16362101 [patent_doc_number] => 20200318852 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-10-08 [patent_title] => Air Cooled Faraday Shield and Methods for Using the Same [patent_app_type] => utility [patent_app_number] => 16/909949 [patent_app_country] => US [patent_app_date] => 2020-06-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9204 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 188 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16909949 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17295307 [patent_doc_number] => 20210391146 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-16 [patent_title] => RF FREQUENCY CONTROL AND GROUND PATH RETURN IN SEMICONDUCTOR PROCESS CHAMBERS [patent_app_type] => utility [patent_app_number] => 16/899326 [patent_app_country] => US [patent_app_date] => 2020-06-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5310 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 73 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16899326 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17295317 [patent_doc_number] => 20210391156 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-16 [patent_title] => CLEAN UNIT FOR CHAMBER EXHAUST CLEANING [patent_app_type] => utility [patent_app_number] => 16/898244 [patent_app_country] => US [patent_app_date] => 2020-06-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6825 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 61 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16898244 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 17295317 [patent_doc_number] => 20210391156 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-16 [patent_title] => CLEAN UNIT FOR CHAMBER EXHAUST CLEANING [patent_app_type] => utility [patent_app_number] => 16/898244 [patent_app_country] => US [patent_app_date] => 2020-06-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6825 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 61 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16898244 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16440279 [patent_doc_number] => 20200357606 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-11-12 [patent_title] => PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 16/864690 [patent_app_country] => US [patent_app_date] => 2020-05-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9874 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 136 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16864690 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16241546 [patent_doc_number] => 20200258780 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-08-13 [patent_title] => TRANSFER ARM FOR FILM FRAME SUBSTRATE HANDLING DURING PLASMA SINGULATION OF WAFERS [patent_app_type] => utility [patent_app_number] => 16/863950 [patent_app_country] => US [patent_app_date] => 2020-04-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12099 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -8 [patent_words_short_claim] => 92 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16863950 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16157457 [patent_doc_number] => 20200216961 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-07-09 [patent_title] => SUBSTRATE PROCESSING APPARATUS, A NON-TRANSITORY COMPUTER-READABLE RECORDING MEDIUM [patent_app_type] => utility [patent_app_number] => 16/824286 [patent_app_country] => US [patent_app_date] => 2020-03-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10188 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 186 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16824286 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 16347974 [patent_doc_number] => 20200312625 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-10-01 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/817038 [patent_app_country] => US [patent_app_date] => 2020-03-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9320 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 158 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16817038 [rel_patent_id] =>[rel_patent_doc_number] =>)