Search

Xilin Guo

Examiner (ID: 8680, Phone: (571)272-5786 , Office: P/2616 )

Most Active Art Unit
2616
Art Unit(s)
2616
Total Applications
554
Issued Applications
442
Pending Applications
56
Abandoned Applications
82

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 16347974 [patent_doc_number] => 20200312625 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-10-01 [patent_title] => SUBSTRATE PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/817038 [patent_app_country] => US [patent_app_date] => 2020-03-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9320 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 158 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16817038 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/817038
SUBSTRATE PROCESSING APPARATUS Mar 11, 2020 Pending
Array ( [id] => 17917420 [patent_doc_number] => 20220319816 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-10-06 [patent_title] => PLASMA ETCHING SYSTEM [patent_app_type] => utility [patent_app_number] => 17/626501 [patent_app_country] => US [patent_app_date] => 2020-02-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 1582 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -5 [patent_words_short_claim] => 96 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17626501 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/626501
PLASMA ETCHING SYSTEM Feb 25, 2020 Pending
Array ( [id] => 16020789 [patent_doc_number] => 20200185238 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-06-11 [patent_title] => APPARATUS FOR SELECTIVELY ETCHING FIRST REGION MADE OF SILICON NITRIDE AGAINST SECOND REGION MADE OF SILICON OXIDE [patent_app_type] => utility [patent_app_number] => 16/794391 [patent_app_country] => US [patent_app_date] => 2020-02-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14834 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 122 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16794391 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/794391
Apparatus for selectively etching first region made of silicon nitride against second region made of silicon oxide Feb 18, 2020 Issued
Array ( [id] => 16256661 [patent_doc_number] => 20200266036 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-08-20 [patent_title] => APPARATUS AND METHOD FOR PLASMA PROCESSING [patent_app_type] => utility [patent_app_number] => 16/790028 [patent_app_country] => US [patent_app_date] => 2020-02-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6743 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 305 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16790028 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/790028
Apparatus and method for plasma processing Feb 12, 2020 Issued
Array ( [id] => 17993123 [patent_doc_number] => 20220359160 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-11-10 [patent_title] => PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/278433 [patent_app_country] => US [patent_app_date] => 2020-01-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6317 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -4 [patent_words_short_claim] => 83 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17278433 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/278433
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD Jan 29, 2020 Pending
Array ( [id] => 16180267 [patent_doc_number] => 20200227236 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-07-16 [patent_title] => Inductively-Coupled Plasma Processing Apparatus [patent_app_type] => utility [patent_app_number] => 16/737068 [patent_app_country] => US [patent_app_date] => 2020-01-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 14949 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 223 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16737068 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/737068
Inductively-coupled plasma processing apparatus Jan 7, 2020 Issued
Array ( [id] => 18294028 [patent_doc_number] => 20230103714 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2023-04-06 [patent_title] => PLASMA PROCESSING APPARATUS AND OPERATING METHOD OF PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/977596 [patent_app_country] => US [patent_app_date] => 2019-12-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 11485 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 146 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16977596 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/977596
PLASMA PROCESSING APPARATUS AND OPERATING METHOD OF PLASMA PROCESSING APPARATUS Dec 16, 2019 Abandoned
Array ( [id] => 17477283 [patent_doc_number] => 20220084787 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-03-17 [patent_title] => PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 17/421001 [patent_app_country] => US [patent_app_date] => 2019-12-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7382 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 178 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17421001 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/421001
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD Dec 16, 2019 Pending
Array ( [id] => 16904704 [patent_doc_number] => 20210183620 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-06-17 [patent_title] => CHAMBER WITH INDUCTIVE POWER SOURCE [patent_app_type] => utility [patent_app_number] => 16/713615 [patent_app_country] => US [patent_app_date] => 2019-12-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9138 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 116 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16713615 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/713615
CHAMBER WITH INDUCTIVE POWER SOURCE Dec 12, 2019 Pending
Array ( [id] => 16850554 [patent_doc_number] => 20210151299 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-05-20 [patent_title] => BAFFLE UNIT AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME [patent_app_type] => utility [patent_app_number] => 16/701235 [patent_app_country] => US [patent_app_date] => 2019-12-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7326 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -21 [patent_words_short_claim] => 70 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16701235 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/701235
BAFFLE UNIT AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME Dec 2, 2019 Abandoned
Array ( [id] => 16162931 [patent_doc_number] => 20200219698 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-07-09 [patent_title] => RECURSIVE COILS FOR INDUCTIVELY COUPLED PLASMAS [patent_app_type] => utility [patent_app_number] => 16/678081 [patent_app_country] => US [patent_app_date] => 2019-11-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4745 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 45 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16678081 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/678081
RECURSIVE COILS FOR INDUCTIVELY COUPLED PLASMAS Nov 7, 2019 Abandoned
Array ( [id] => 16194079 [patent_doc_number] => 20200234928 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-07-23 [patent_title] => SEMICONDUCTOR PLASMA PROCESSING EQUIPMENT WITH WAFER EDGE PLASMA SHEATH TUNING ABILITY [patent_app_type] => utility [patent_app_number] => 16/672294 [patent_app_country] => US [patent_app_date] => 2019-11-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 12548 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -18 [patent_words_short_claim] => 142 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16672294 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/672294
SEMICONDUCTOR PLASMA PROCESSING EQUIPMENT WITH WAFER EDGE PLASMA SHEATH TUNING ABILITY Oct 31, 2019 Abandoned
Array ( [id] => 18983475 [patent_doc_number] => 11908662 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2024-02-20 [patent_title] => Device and method for tuning plasma distribution using phase control [patent_app_type] => utility [patent_app_number] => 16/663215 [patent_app_country] => US [patent_app_date] => 2019-10-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 9 [patent_no_of_words] => 6753 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 136 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16663215 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/663215
Device and method for tuning plasma distribution using phase control Oct 23, 2019 Issued
Array ( [id] => 17292659 [patent_doc_number] => 20210388498 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-16 [patent_title] => ATOMIC LAYER DEPOSITION AND VAPOR DEPOSITION REACTOR WITH IN-CHAMBER MICROPLASMA SOURCE [patent_app_type] => utility [patent_app_number] => 17/285182 [patent_app_country] => US [patent_app_date] => 2019-10-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7870 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 40 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17285182 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/285182
ATOMIC LAYER DEPOSITION AND VAPOR DEPOSITION REACTOR WITH IN-CHAMBER MICROPLASMA SOURCE Oct 14, 2019 Pending
Array ( [id] => 16731082 [patent_doc_number] => 20210098230 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-04-01 [patent_title] => MONOLITHIC MODULAR HIGH-FREQUENCY PLASMA SOURCE [patent_app_type] => utility [patent_app_number] => 16/586462 [patent_app_country] => US [patent_app_date] => 2019-09-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6409 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 51 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16586462 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/586462
MONOLITHIC MODULAR HIGH-FREQUENCY PLASMA SOURCE Sep 26, 2019 Abandoned
Array ( [id] => 17195963 [patent_doc_number] => 11164728 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-11-02 [patent_title] => Plasma treatment apparatus and driving method thereof [patent_app_type] => utility [patent_app_number] => 16/579874 [patent_app_country] => US [patent_app_date] => 2019-09-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 5 [patent_no_of_words] => 3835 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 353 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16579874 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/579874
Plasma treatment apparatus and driving method thereof Sep 23, 2019 Issued
Array ( [id] => 15656749 [patent_doc_number] => 20200090905 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-03-19 [patent_title] => ION ENERGY BIAS CONTROL WITH PLASMA-SOURCE PULSING [patent_app_type] => utility [patent_app_number] => 16/557209 [patent_app_country] => US [patent_app_date] => 2019-08-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 17949 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 66 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16557209 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/557209
ION ENERGY BIAS CONTROL WITH PLASMA-SOURCE PULSING Aug 29, 2019 Abandoned
Array ( [id] => 17302935 [patent_doc_number] => 20210398774 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2021-12-23 [patent_title] => ETCHING DEVICE AND METHOD OF INDUCTIVELY COUPLED PLASMA [patent_app_type] => utility [patent_app_number] => 17/287791 [patent_app_country] => US [patent_app_date] => 2019-08-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3231 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -9 [patent_words_short_claim] => 57 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17287791 [rel_patent_id] =>[rel_patent_doc_number] =>)
17/287791
ETCHING DEVICE AND METHOD OF INDUCTIVELY COUPLED PLASMA Aug 20, 2019 Abandoned
Array ( [id] => 17615296 [patent_doc_number] => 20220157576 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2022-05-19 [patent_title] => PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/957033 [patent_app_country] => US [patent_app_date] => 2019-07-29 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9663 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -7 [patent_words_short_claim] => 154 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16957033 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/957033
Plasma processing apparatus Jul 28, 2019 Issued
Array ( [id] => 15039487 [patent_doc_number] => 20190330748 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-10-31 [patent_title] => Gas distribution hub for plasma processing chamber [patent_app_type] => utility [patent_app_number] => 16/505530 [patent_app_country] => US [patent_app_date] => 2019-07-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6259 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -11 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16505530 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/505530
Gas distribution hub for plasma processing chamber Jul 7, 2019 Abandoned
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