
Xilin Guo
Examiner (ID: 8680, Phone: (571)272-5786 , Office: P/2616 )
| Most Active Art Unit | 2616 |
| Art Unit(s) | 2616 |
| Total Applications | 554 |
| Issued Applications | 442 |
| Pending Applications | 56 |
| Abandoned Applications | 82 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 16347974
[patent_doc_number] => 20200312625
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2020-10-01
[patent_title] => SUBSTRATE PROCESSING APPARATUS
[patent_app_type] => utility
[patent_app_number] => 16/817038
[patent_app_country] => US
[patent_app_date] => 2020-03-12
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 9320
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -16
[patent_words_short_claim] => 158
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16817038
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/817038 | SUBSTRATE PROCESSING APPARATUS | Mar 11, 2020 | Pending |
Array
(
[id] => 17917420
[patent_doc_number] => 20220319816
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-10-06
[patent_title] => PLASMA ETCHING SYSTEM
[patent_app_type] => utility
[patent_app_number] => 17/626501
[patent_app_country] => US
[patent_app_date] => 2020-02-26
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 1582
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -5
[patent_words_short_claim] => 96
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17626501
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/626501 | PLASMA ETCHING SYSTEM | Feb 25, 2020 | Pending |
Array
(
[id] => 16020789
[patent_doc_number] => 20200185238
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2020-06-11
[patent_title] => APPARATUS FOR SELECTIVELY ETCHING FIRST REGION MADE OF SILICON NITRIDE AGAINST SECOND REGION MADE OF SILICON OXIDE
[patent_app_type] => utility
[patent_app_number] => 16/794391
[patent_app_country] => US
[patent_app_date] => 2020-02-19
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 14834
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -15
[patent_words_short_claim] => 122
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16794391
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/794391 | Apparatus for selectively etching first region made of silicon nitride against second region made of silicon oxide | Feb 18, 2020 | Issued |
Array
(
[id] => 16256661
[patent_doc_number] => 20200266036
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2020-08-20
[patent_title] => APPARATUS AND METHOD FOR PLASMA PROCESSING
[patent_app_type] => utility
[patent_app_number] => 16/790028
[patent_app_country] => US
[patent_app_date] => 2020-02-13
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 6743
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -10
[patent_words_short_claim] => 305
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16790028
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/790028 | Apparatus and method for plasma processing | Feb 12, 2020 | Issued |
Array
(
[id] => 17993123
[patent_doc_number] => 20220359160
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-11-10
[patent_title] => PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
[patent_app_type] => utility
[patent_app_number] => 17/278433
[patent_app_country] => US
[patent_app_date] => 2020-01-30
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 6317
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -4
[patent_words_short_claim] => 83
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17278433
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/278433 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | Jan 29, 2020 | Pending |
Array
(
[id] => 16180267
[patent_doc_number] => 20200227236
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2020-07-16
[patent_title] => Inductively-Coupled Plasma Processing Apparatus
[patent_app_type] => utility
[patent_app_number] => 16/737068
[patent_app_country] => US
[patent_app_date] => 2020-01-08
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 14949
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -18
[patent_words_short_claim] => 223
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16737068
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/737068 | Inductively-coupled plasma processing apparatus | Jan 7, 2020 | Issued |
Array
(
[id] => 18294028
[patent_doc_number] => 20230103714
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2023-04-06
[patent_title] => PLASMA PROCESSING APPARATUS AND OPERATING METHOD OF PLASMA PROCESSING APPARATUS
[patent_app_type] => utility
[patent_app_number] => 16/977596
[patent_app_country] => US
[patent_app_date] => 2019-12-17
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 11485
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -9
[patent_words_short_claim] => 146
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16977596
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/977596 | PLASMA PROCESSING APPARATUS AND OPERATING METHOD OF PLASMA PROCESSING APPARATUS | Dec 16, 2019 | Abandoned |
Array
(
[id] => 17477283
[patent_doc_number] => 20220084787
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-03-17
[patent_title] => PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
[patent_app_type] => utility
[patent_app_number] => 17/421001
[patent_app_country] => US
[patent_app_date] => 2019-12-17
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 7382
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -12
[patent_words_short_claim] => 178
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17421001
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/421001 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | Dec 16, 2019 | Pending |
Array
(
[id] => 16904704
[patent_doc_number] => 20210183620
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-06-17
[patent_title] => CHAMBER WITH INDUCTIVE POWER SOURCE
[patent_app_type] => utility
[patent_app_number] => 16/713615
[patent_app_country] => US
[patent_app_date] => 2019-12-13
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 9138
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 116
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16713615
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/713615 | CHAMBER WITH INDUCTIVE POWER SOURCE | Dec 12, 2019 | Pending |
Array
(
[id] => 16850554
[patent_doc_number] => 20210151299
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-05-20
[patent_title] => BAFFLE UNIT AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME
[patent_app_type] => utility
[patent_app_number] => 16/701235
[patent_app_country] => US
[patent_app_date] => 2019-12-03
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 7326
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -21
[patent_words_short_claim] => 70
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16701235
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/701235 | BAFFLE UNIT AND SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME | Dec 2, 2019 | Abandoned |
Array
(
[id] => 16162931
[patent_doc_number] => 20200219698
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2020-07-09
[patent_title] => RECURSIVE COILS FOR INDUCTIVELY COUPLED PLASMAS
[patent_app_type] => utility
[patent_app_number] => 16/678081
[patent_app_country] => US
[patent_app_date] => 2019-11-08
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 4745
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 45
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16678081
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/678081 | RECURSIVE COILS FOR INDUCTIVELY COUPLED PLASMAS | Nov 7, 2019 | Abandoned |
Array
(
[id] => 16194079
[patent_doc_number] => 20200234928
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2020-07-23
[patent_title] => SEMICONDUCTOR PLASMA PROCESSING EQUIPMENT WITH WAFER EDGE PLASMA SHEATH TUNING ABILITY
[patent_app_type] => utility
[patent_app_number] => 16/672294
[patent_app_country] => US
[patent_app_date] => 2019-11-01
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 12548
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -18
[patent_words_short_claim] => 142
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16672294
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/672294 | SEMICONDUCTOR PLASMA PROCESSING EQUIPMENT WITH WAFER EDGE PLASMA SHEATH TUNING ABILITY | Oct 31, 2019 | Abandoned |
Array
(
[id] => 18983475
[patent_doc_number] => 11908662
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2024-02-20
[patent_title] => Device and method for tuning plasma distribution using phase control
[patent_app_type] => utility
[patent_app_number] => 16/663215
[patent_app_country] => US
[patent_app_date] => 2019-10-24
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 7
[patent_figures_cnt] => 9
[patent_no_of_words] => 6753
[patent_no_of_claims] => 14
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 136
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16663215
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/663215 | Device and method for tuning plasma distribution using phase control | Oct 23, 2019 | Issued |
Array
(
[id] => 17292659
[patent_doc_number] => 20210388498
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-12-16
[patent_title] => ATOMIC LAYER DEPOSITION AND VAPOR DEPOSITION REACTOR WITH IN-CHAMBER MICROPLASMA SOURCE
[patent_app_type] => utility
[patent_app_number] => 17/285182
[patent_app_country] => US
[patent_app_date] => 2019-10-15
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 7870
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -14
[patent_words_short_claim] => 40
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17285182
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/285182 | ATOMIC LAYER DEPOSITION AND VAPOR DEPOSITION REACTOR WITH IN-CHAMBER MICROPLASMA SOURCE | Oct 14, 2019 | Pending |
Array
(
[id] => 16731082
[patent_doc_number] => 20210098230
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-04-01
[patent_title] => MONOLITHIC MODULAR HIGH-FREQUENCY PLASMA SOURCE
[patent_app_type] => utility
[patent_app_number] => 16/586462
[patent_app_country] => US
[patent_app_date] => 2019-09-27
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 6409
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 51
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16586462
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/586462 | MONOLITHIC MODULAR HIGH-FREQUENCY PLASMA SOURCE | Sep 26, 2019 | Abandoned |
Array
(
[id] => 17195963
[patent_doc_number] => 11164728
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2021-11-02
[patent_title] => Plasma treatment apparatus and driving method thereof
[patent_app_type] => utility
[patent_app_number] => 16/579874
[patent_app_country] => US
[patent_app_date] => 2019-09-24
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 5
[patent_no_of_words] => 3835
[patent_no_of_claims] => 6
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 353
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16579874
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/579874 | Plasma treatment apparatus and driving method thereof | Sep 23, 2019 | Issued |
Array
(
[id] => 15656749
[patent_doc_number] => 20200090905
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2020-03-19
[patent_title] => ION ENERGY BIAS CONTROL WITH PLASMA-SOURCE PULSING
[patent_app_type] => utility
[patent_app_number] => 16/557209
[patent_app_country] => US
[patent_app_date] => 2019-08-30
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 17949
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -17
[patent_words_short_claim] => 66
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16557209
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/557209 | ION ENERGY BIAS CONTROL WITH PLASMA-SOURCE PULSING | Aug 29, 2019 | Abandoned |
Array
(
[id] => 17302935
[patent_doc_number] => 20210398774
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2021-12-23
[patent_title] => ETCHING DEVICE AND METHOD OF INDUCTIVELY COUPLED PLASMA
[patent_app_type] => utility
[patent_app_number] => 17/287791
[patent_app_country] => US
[patent_app_date] => 2019-08-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 3231
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -9
[patent_words_short_claim] => 57
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 17287791
[rel_patent_id] =>[rel_patent_doc_number] =>) 17/287791 | ETCHING DEVICE AND METHOD OF INDUCTIVELY COUPLED PLASMA | Aug 20, 2019 | Abandoned |
Array
(
[id] => 17615296
[patent_doc_number] => 20220157576
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2022-05-19
[patent_title] => PLASMA PROCESSING APPARATUS
[patent_app_type] => utility
[patent_app_number] => 16/957033
[patent_app_country] => US
[patent_app_date] => 2019-07-29
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 9663
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -7
[patent_words_short_claim] => 154
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16957033
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/957033 | Plasma processing apparatus | Jul 28, 2019 | Issued |
Array
(
[id] => 15039487
[patent_doc_number] => 20190330748
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2019-10-31
[patent_title] => Gas distribution hub for plasma processing chamber
[patent_app_type] => utility
[patent_app_number] => 16/505530
[patent_app_country] => US
[patent_app_date] => 2019-07-08
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 0
[patent_figures_cnt] => 0
[patent_no_of_words] => 6259
[patent_no_of_claims] => 0
[patent_no_of_ind_claims] => -11
[patent_words_short_claim] => 2
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16505530
[rel_patent_id] =>[rel_patent_doc_number] =>) 16/505530 | Gas distribution hub for plasma processing chamber | Jul 7, 2019 | Abandoned |