Search

Xilin Guo

Examiner (ID: 8680, Phone: (571)272-5786 , Office: P/2616 )

Most Active Art Unit
2616
Art Unit(s)
2616
Total Applications
554
Issued Applications
442
Pending Applications
56
Abandoned Applications
82

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 16544873 [patent_doc_number] => 20200411288 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-12-31 [patent_title] => METHOD AND APPARATUS FOR ACTIVELY TUNING A PLASMA POWER SOURCE [patent_app_type] => utility [patent_app_number] => 16/452266 [patent_app_country] => US [patent_app_date] => 2019-06-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7262 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 109 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16452266 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/452266
Method and apparatus for actively tuning a plasma power source Jun 24, 2019 Issued
Array ( [id] => 14930739 [patent_doc_number] => 20190301007 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-10-03 [patent_title] => THERMALLY OPTIMIZED RINGS [patent_app_type] => utility [patent_app_number] => 16/446188 [patent_app_country] => US [patent_app_date] => 2019-06-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3866 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 60 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16446188 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/446188
THERMALLY OPTIMIZED RINGS Jun 18, 2019 Abandoned
Array ( [id] => 16226195 [patent_doc_number] => 20200251312 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-08-06 [patent_title] => TEMPERATURE-CONTROLLED PLASMA GENERATION SYSTEM [patent_app_type] => utility [patent_app_number] => 16/437591 [patent_app_country] => US [patent_app_date] => 2019-06-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 8712 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 70 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16437591 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/437591
Temperature-controlled plasma generation system Jun 10, 2019 Issued
Array ( [id] => 15259925 [patent_doc_number] => 20190378696 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-12-12 [patent_title] => APPARATUS FOR SUPPRESSING PARASITIC PLASMA IN PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION CHAMBER [patent_app_type] => utility [patent_app_number] => 16/429368 [patent_app_country] => US [patent_app_date] => 2019-06-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3833 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 105 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16429368 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/429368
APPARATUS FOR SUPPRESSING PARASITIC PLASMA IN PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION CHAMBER Jun 2, 2019 Pending
Array ( [id] => 15597519 [patent_doc_number] => 20200075294 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-03-05 [patent_title] => BAFFLE PLATE FOR CONTROLLING WAFER UNIFORMITY AND METHODS FOR MAKING THE SAME [patent_app_type] => utility [patent_app_number] => 16/422071 [patent_app_country] => US [patent_app_date] => 2019-05-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7497 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 82 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16422071 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/422071
Baffle plate for controlling wafer uniformity and methods for making the same May 23, 2019 Issued
Array ( [id] => 14691419 [patent_doc_number] => 20190244825 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-08-08 [patent_title] => Controlling Azimuthal Uniformity of Etch Process in Plasma Processing Chamber [patent_app_type] => utility [patent_app_number] => 16/386557 [patent_app_country] => US [patent_app_date] => 2019-04-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7539 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -12 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16386557 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/386557
Controlling Azimuthal Uniformity of Etch Process in Plasma Processing Chamber Apr 16, 2019 Pending
Array ( [id] => 18016251 [patent_doc_number] => 11508557 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2022-11-22 [patent_title] => Semiconductor manufacturing apparatus having an insulating plate [patent_app_type] => utility [patent_app_number] => 16/371327 [patent_app_country] => US [patent_app_date] => 2019-04-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 21 [patent_no_of_words] => 9307 [patent_no_of_claims] => 18 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 237 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16371327 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/371327
Semiconductor manufacturing apparatus having an insulating plate Mar 31, 2019 Issued
Array ( [id] => 16300989 [patent_doc_number] => 20200286712 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-09-10 [patent_title] => SINGLE-TURN AND LAMINATED-WALL INDUCTIVELY COUPLED PLASMA SOURCES [patent_app_type] => utility [patent_app_number] => 16/292448 [patent_app_country] => US [patent_app_date] => 2019-03-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 9323 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 114 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16292448 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/292448
SINGLE-TURN AND LAMINATED-WALL INDUCTIVELY COUPLED PLASMA SOURCES Mar 4, 2019 Abandoned
Array ( [id] => 16272195 [patent_doc_number] => 20200273683 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-08-27 [patent_title] => PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS [patent_app_type] => utility [patent_app_number] => 16/642187 [patent_app_country] => US [patent_app_date] => 2019-02-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2983 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -4 [patent_words_short_claim] => 71 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16642187 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/642187
PLASMA PROCESSING METHOD AND PLASMA PROCESSING APPARATUS Feb 26, 2019 Pending
Array ( [id] => 14509281 [patent_doc_number] => 20190198295 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-06-27 [patent_title] => COOLING MECHANISM UTLIZED IN A PLASMA REACTOR WITH ENHANCED TEMPERATURE REGULATION [patent_app_type] => utility [patent_app_number] => 16/286152 [patent_app_country] => US [patent_app_date] => 2019-02-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3841 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => 0 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16286152 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/286152
Cooling mechanism utilized in a plasma reactor with enhanced temperature regulation Feb 25, 2019 Issued
Array ( [id] => 15351399 [patent_doc_number] => 20200013591 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-01-09 [patent_title] => Plasma Spreading Apparatus And System, And Method Of Spreading Plasma In Process Ovens [patent_app_type] => utility [patent_app_number] => 16/276040 [patent_app_country] => US [patent_app_date] => 2019-02-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2877 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -13 [patent_words_short_claim] => 187 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16276040 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/276040
Plasma Spreading Apparatus And System, And Method Of Spreading Plasma In Process Ovens Feb 13, 2019 Abandoned
Array ( [id] => 16194071 [patent_doc_number] => 20200234920 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-07-23 [patent_title] => COIL AND WINDOW FOR PLASMA PROCESSING SYSTEM [patent_app_type] => utility [patent_app_number] => 16/253948 [patent_app_country] => US [patent_app_date] => 2019-01-22 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 2846 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 133 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16253948 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/253948
COIL AND WINDOW FOR PLASMA PROCESSING SYSTEM Jan 21, 2019 Abandoned
Array ( [id] => 16180270 [patent_doc_number] => 20200227239 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2020-07-16 [patent_title] => Electrostatic Shield for Inductive Plasma Sources [patent_app_type] => utility [patent_app_number] => 16/245973 [patent_app_country] => US [patent_app_date] => 2019-01-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 10455 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -16 [patent_words_short_claim] => 107 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16245973 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/245973
Electrostatic Shield for Inductive Plasma Sources Jan 10, 2019 Abandoned
Array ( [id] => 16944071 [patent_doc_number] => 11056321 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-07-06 [patent_title] => Metal contamination reduction in substrate processing systems with transformer coupled plasma [patent_app_type] => utility [patent_app_number] => 16/238926 [patent_app_country] => US [patent_app_date] => 2019-01-03 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 11 [patent_no_of_words] => 4786 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 193 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16238926 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/238926
Metal contamination reduction in substrate processing systems with transformer coupled plasma Jan 2, 2019 Issued
Array ( [id] => 15274157 [patent_doc_number] => 20190385813 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-12-19 [patent_title] => TEMPERATURE CONTROLLER, TEMPERATURE MEASURER, AND PLASMA PROCESSING APPARATUS INCLUDING THE SAME [patent_app_type] => utility [patent_app_number] => 16/226786 [patent_app_country] => US [patent_app_date] => 2018-12-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 3125 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 56 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16226786 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/226786
Temperature controller, temperature measurer, and plasma processing apparatus including the same Dec 19, 2018 Issued
Array ( [id] => 14509293 [patent_doc_number] => 20190198301 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-06-27 [patent_title] => Plasma Processing Apparatus and Methods [patent_app_type] => utility [patent_app_number] => 16/218931 [patent_app_country] => US [patent_app_date] => 2018-12-13 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 7907 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 109 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16218931 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/218931
Plasma Processing Apparatus and Methods Dec 12, 2018 Abandoned
Array ( [id] => 14190965 [patent_doc_number] => 20190115188 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-04-18 [patent_title] => PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 16/214599 [patent_app_country] => US [patent_app_date] => 2018-12-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4930 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -15 [patent_words_short_claim] => 178 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16214599 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/214599
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD Dec 9, 2018 Abandoned
Array ( [id] => 14163745 [patent_doc_number] => 20190108975 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-04-11 [patent_title] => PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD [patent_app_type] => utility [patent_app_number] => 16/214567 [patent_app_country] => US [patent_app_date] => 2018-12-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4927 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -10 [patent_words_short_claim] => 216 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16214567 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/214567
Plasma processing apparatus and plasma processing method Dec 9, 2018 Issued
Array ( [id] => 14109917 [patent_doc_number] => 20190096634 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-03-28 [patent_title] => APPARATUS AND METHODS FOR DRY ETCH WITH EDGE, SIDE AND BACK PROTECTION [patent_app_type] => utility [patent_app_number] => 16/203342 [patent_app_country] => US [patent_app_date] => 2018-11-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 4524 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -2 [patent_words_short_claim] => 61 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16203342 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/203342
APPARATUS AND METHODS FOR DRY ETCH WITH EDGE, SIDE AND BACK PROTECTION Nov 27, 2018 Abandoned
Array ( [id] => 14073159 [patent_doc_number] => 20190085467 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2019-03-21 [patent_title] => Plasma Reactor Having Radial Struts for Substrate Support [patent_app_type] => utility [patent_app_number] => 16/195670 [patent_app_country] => US [patent_app_date] => 2018-11-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 6734 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -14 [patent_words_short_claim] => 2 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16195670 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/195670
Plasma Reactor Having Radial Struts for Substrate Support Nov 18, 2018 Abandoned
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