Search

Xilin Guo

Examiner (ID: 8680, Phone: (571)272-5786 , Office: P/2616 )

Most Active Art Unit
2616
Art Unit(s)
2616
Total Applications
554
Issued Applications
442
Pending Applications
56
Abandoned Applications
82

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 16218375 [patent_doc_number] => 10734195 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-08-04 [patent_title] => Systems and methods for transformer coupled plasma pulsing with transformer coupled capacitive tuning switching [patent_app_type] => utility [patent_app_number] => 15/617366 [patent_app_country] => US [patent_app_date] => 2017-06-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 19 [patent_no_of_words] => 6703 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 146 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15617366 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/617366
Systems and methods for transformer coupled plasma pulsing with transformer coupled capacitive tuning switching Jun 7, 2017 Issued
Array ( [id] => 12223255 [patent_doc_number] => 20180061615 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-03-01 [patent_title] => 'PLASMA TREATMENT APPARATUS HAVING DUAL GAS DISTRIBUTION BAFFLE FOR UNIFORM GAS DISTRIBUTION' [patent_app_type] => utility [patent_app_number] => 15/594003 [patent_app_country] => US [patent_app_date] => 2017-05-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 16 [patent_no_of_words] => 10099 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15594003 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/594003
PLASMA TREATMENT APPARATUS HAVING DUAL GAS DISTRIBUTION BAFFLE FOR UNIFORM GAS DISTRIBUTION May 11, 2017 Abandoned
Array ( [id] => 11939571 [patent_doc_number] => 20170243721 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-08-24 [patent_title] => 'Inductively Coupled Plasma Source for Plasma Processing' [patent_app_type] => utility [patent_app_number] => 15/589127 [patent_app_country] => US [patent_app_date] => 2017-05-08 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 5477 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15589127 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/589127
Inductively Coupled Plasma Source for Plasma Processing May 7, 2017 Abandoned
Array ( [id] => 12026822 [patent_doc_number] => 20170316921 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-11-02 [patent_title] => 'VHF Z-COIL PLASMA SOURCE' [patent_app_type] => utility [patent_app_number] => 15/485830 [patent_app_country] => US [patent_app_date] => 2017-04-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 3008 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15485830 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/485830
VHF Z-COIL PLASMA SOURCE Apr 11, 2017 Abandoned
Array ( [id] => 11974526 [patent_doc_number] => 20170278680 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-09-28 [patent_title] => 'SUBSTRATE PROCESSING SYSTEM INCLUDING COIL WITH RF POWERED FARADAY SHIELD' [patent_app_type] => utility [patent_app_number] => 15/467588 [patent_app_country] => US [patent_app_date] => 2017-03-23 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 3655 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15467588 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/467588
SUBSTRATE PROCESSING SYSTEM INCLUDING COIL WITH RF POWERED FARADAY SHIELD Mar 22, 2017 Abandoned
Array ( [id] => 11939575 [patent_doc_number] => 20170243725 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-08-24 [patent_title] => 'PLASMA PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 15/435202 [patent_app_country] => US [patent_app_date] => 2017-02-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5217 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15435202 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/435202
PLASMA PROCESSING APPARATUS Feb 15, 2017 Abandoned
Array ( [id] => 11869446 [patent_doc_number] => 20170236731 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-08-17 [patent_title] => 'SYSTEMS AND METHODS FOR SELECTIVELY ETCHING FILM' [patent_app_type] => utility [patent_app_number] => 15/426241 [patent_app_country] => US [patent_app_date] => 2017-02-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 5853 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15426241 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/426241
Systems and methods for selectively etching film Feb 6, 2017 Issued
Array ( [id] => 12800452 [patent_doc_number] => 20180158653 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-06-07 [patent_title] => COMPOSITE PLASMA MODULATOR FOR PLASMA CHAMBER [patent_app_type] => utility [patent_app_number] => 15/419257 [patent_app_country] => US [patent_app_date] => 2017-01-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 0 [patent_figures_cnt] => 0 [patent_no_of_words] => 5980 [patent_no_of_claims] => 0 [patent_no_of_ind_claims] => -17 [patent_words_short_claim] => 48 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15419257 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/419257
Composite plasma modulator for plasma chamber Jan 29, 2017 Issued
Array ( [id] => 16637895 [patent_doc_number] => 10916410 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-02-09 [patent_title] => Plasma processing apparatus [patent_app_type] => utility [patent_app_number] => 16/068696 [patent_app_country] => US [patent_app_date] => 2017-01-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 15 [patent_no_of_words] => 5748 [patent_no_of_claims] => 7 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 108 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 16068696 [rel_patent_id] =>[rel_patent_doc_number] =>)
16/068696
Plasma processing apparatus Jan 9, 2017 Issued
Array ( [id] => 15672761 [patent_doc_number] => 10600620 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-03-24 [patent_title] => Temperature control in RF chamber with heater and air amplifier [patent_app_type] => utility [patent_app_number] => 15/384209 [patent_app_country] => US [patent_app_date] => 2016-12-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 16 [patent_no_of_words] => 8362 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 151 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15384209 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/384209
Temperature control in RF chamber with heater and air amplifier Dec 18, 2016 Issued
Array ( [id] => 13270999 [patent_doc_number] => 10147586 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-12-04 [patent_title] => Inductively coupled coil and inductively coupled plasma device using the same [patent_app_type] => utility [patent_app_number] => 15/378914 [patent_app_country] => US [patent_app_date] => 2016-12-14 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 9 [patent_no_of_words] => 3768 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 278 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15378914 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/378914
Inductively coupled coil and inductively coupled plasma device using the same Dec 13, 2016 Issued
Array ( [id] => 11691304 [patent_doc_number] => 20170167019 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-06-15 [patent_title] => 'PLASMA PROCESSING APPARATUS AND FILM DEPOSITION METHOD' [patent_app_type] => utility [patent_app_number] => 15/364418 [patent_app_country] => US [patent_app_date] => 2016-11-30 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 21 [patent_figures_cnt] => 21 [patent_no_of_words] => 15100 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15364418 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/364418
PLASMA PROCESSING APPARATUS AND FILM DEPOSITION METHOD Nov 29, 2016 Abandoned
Array ( [id] => 16218380 [patent_doc_number] => 10734200 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-08-04 [patent_title] => Mono-energetic neutral beam activated chemical processing system and method of using [patent_app_type] => utility [patent_app_number] => 15/352339 [patent_app_country] => US [patent_app_date] => 2016-11-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 6709 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 397 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15352339 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/352339
Mono-energetic neutral beam activated chemical processing system and method of using Nov 14, 2016 Issued
Array ( [id] => 15955039 [patent_doc_number] => 10665433 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-05-26 [patent_title] => Extreme edge uniformity control [patent_app_type] => utility [patent_app_number] => 15/269026 [patent_app_country] => US [patent_app_date] => 2016-09-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 13 [patent_no_of_words] => 7551 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 147 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15269026 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/269026
Extreme edge uniformity control Sep 18, 2016 Issued
Array ( [id] => 11325334 [patent_doc_number] => 20160355946 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-12-08 [patent_title] => 'RADICAL GENERATOR AND MOLECULAR BEAM EPITAXY APPARATUS' [patent_app_type] => utility [patent_app_number] => 15/242263 [patent_app_country] => US [patent_app_date] => 2016-08-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 5994 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15242263 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/242263
Radical generator and molecular beam epitaxy apparatus Aug 18, 2016 Issued
Array ( [id] => 12185847 [patent_doc_number] => 20180044783 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-02-15 [patent_title] => 'THERMALLY OPTIMIZED RINGS' [patent_app_type] => utility [patent_app_number] => 15/233613 [patent_app_country] => US [patent_app_date] => 2016-08-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 3869 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15233613 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/233613
Thermally optimized rings Aug 9, 2016 Issued
Array ( [id] => 11997359 [patent_doc_number] => 20170301514 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-10-19 [patent_title] => 'PLASMA SOURCE AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME' [patent_app_type] => utility [patent_app_number] => 15/218281 [patent_app_country] => US [patent_app_date] => 2016-07-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4705 [patent_no_of_claims] => 29 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15218281 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/218281
PLASMA SOURCE AND SUBSTRATE TREATING APPARATUS INCLUDING THE SAME Jul 24, 2016 Abandoned
Array ( [id] => 11129655 [patent_doc_number] => 20160326630 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-11-10 [patent_title] => 'DEPOSITION APPARATUS' [patent_app_type] => utility [patent_app_number] => 15/211233 [patent_app_country] => US [patent_app_date] => 2016-07-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 6134 [patent_no_of_claims] => 10 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15211233 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/211233
Deposition apparatus Jul 14, 2016 Issued
Array ( [id] => 11125230 [patent_doc_number] => 20160322205 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-11-03 [patent_title] => 'ICP SOURCE DESIGN FOR PLASMA UNIFORMITY AND EFFICIENCY ENHANCEMENT' [patent_app_type] => utility [patent_app_number] => 15/207495 [patent_app_country] => US [patent_app_date] => 2016-07-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4008 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15207495 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/207495
ICP SOURCE DESIGN FOR PLASMA UNIFORMITY AND EFFICIENCY ENHANCEMENT Jul 10, 2016 Abandoned
Array ( [id] => 12122271 [patent_doc_number] => 20180005857 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2018-01-04 [patent_title] => 'SYSTEM AND METHOD FOR SUBSTRATE SUPPORT FEED-FORWARD TEMPERATURE CONTROL BASED ON RF POWER' [patent_app_type] => utility [patent_app_number] => 15/200405 [patent_app_country] => US [patent_app_date] => 2016-07-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 9854 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15200405 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/200405
System and method for substrate support feed-forward temperature control based on RF power Jun 30, 2016 Issued
Menu