
Xilin Guo
Examiner (ID: 8680, Phone: (571)272-5786 , Office: P/2616 )
| Most Active Art Unit | 2616 |
| Art Unit(s) | 2616 |
| Total Applications | 554 |
| Issued Applications | 442 |
| Pending Applications | 56 |
| Abandoned Applications | 82 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 16218375
[patent_doc_number] => 10734195
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2020-08-04
[patent_title] => Systems and methods for transformer coupled plasma pulsing with transformer coupled capacitive tuning switching
[patent_app_type] => utility
[patent_app_number] => 15/617366
[patent_app_country] => US
[patent_app_date] => 2017-06-08
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[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15617366
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/617366 | Systems and methods for transformer coupled plasma pulsing with transformer coupled capacitive tuning switching | Jun 7, 2017 | Issued |
Array
(
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[patent_doc_number] => 20180061615
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2018-03-01
[patent_title] => 'PLASMA TREATMENT APPARATUS HAVING DUAL GAS DISTRIBUTION BAFFLE FOR UNIFORM GAS DISTRIBUTION'
[patent_app_type] => utility
[patent_app_number] => 15/594003
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[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15594003
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/594003 | PLASMA TREATMENT APPARATUS HAVING DUAL GAS DISTRIBUTION BAFFLE FOR UNIFORM GAS DISTRIBUTION | May 11, 2017 | Abandoned |
Array
(
[id] => 11939571
[patent_doc_number] => 20170243721
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2017-08-24
[patent_title] => 'Inductively Coupled Plasma Source for Plasma Processing'
[patent_app_type] => utility
[patent_app_number] => 15/589127
[patent_app_country] => US
[patent_app_date] => 2017-05-08
[patent_effective_date] => 0000-00-00
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Array
(
[id] => 12026822
[patent_doc_number] => 20170316921
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2017-11-02
[patent_title] => 'VHF Z-COIL PLASMA SOURCE'
[patent_app_type] => utility
[patent_app_number] => 15/485830
[patent_app_country] => US
[patent_app_date] => 2017-04-12
[patent_effective_date] => 0000-00-00
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[rel_patent_id] =>[rel_patent_doc_number] =>) 15/485830 | VHF Z-COIL PLASMA SOURCE | Apr 11, 2017 | Abandoned |
Array
(
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[patent_doc_number] => 20170278680
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[patent_kind] => A1
[patent_issue_date] => 2017-09-28
[patent_title] => 'SUBSTRATE PROCESSING SYSTEM INCLUDING COIL WITH RF POWERED FARADAY SHIELD'
[patent_app_type] => utility
[patent_app_number] => 15/467588
[patent_app_country] => US
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Array
(
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[patent_doc_number] => 20170243725
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2017-08-24
[patent_title] => 'PLASMA PROCESSING APPARATUS'
[patent_app_type] => utility
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[rel_patent_id] =>[rel_patent_doc_number] =>) 15/435202 | PLASMA PROCESSING APPARATUS | Feb 15, 2017 | Abandoned |
Array
(
[id] => 11869446
[patent_doc_number] => 20170236731
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2017-08-17
[patent_title] => 'SYSTEMS AND METHODS FOR SELECTIVELY ETCHING FILM'
[patent_app_type] => utility
[patent_app_number] => 15/426241
[patent_app_country] => US
[patent_app_date] => 2017-02-07
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[rel_patent_id] =>[rel_patent_doc_number] =>) 15/426241 | Systems and methods for selectively etching film | Feb 6, 2017 | Issued |
Array
(
[id] => 12800452
[patent_doc_number] => 20180158653
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[patent_kind] => A1
[patent_issue_date] => 2018-06-07
[patent_title] => COMPOSITE PLASMA MODULATOR FOR PLASMA CHAMBER
[patent_app_type] => utility
[patent_app_number] => 15/419257
[patent_app_country] => US
[patent_app_date] => 2017-01-30
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[rel_patent_id] =>[rel_patent_doc_number] =>) 15/419257 | Composite plasma modulator for plasma chamber | Jan 29, 2017 | Issued |
Array
(
[id] => 16637895
[patent_doc_number] => 10916410
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[patent_kind] => B2
[patent_issue_date] => 2021-02-09
[patent_title] => Plasma processing apparatus
[patent_app_type] => utility
[patent_app_number] => 16/068696
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[rel_patent_id] =>[rel_patent_doc_number] =>) 16/068696 | Plasma processing apparatus | Jan 9, 2017 | Issued |
Array
(
[id] => 15672761
[patent_doc_number] => 10600620
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[patent_kind] => B2
[patent_issue_date] => 2020-03-24
[patent_title] => Temperature control in RF chamber with heater and air amplifier
[patent_app_type] => utility
[patent_app_number] => 15/384209
[patent_app_country] => US
[patent_app_date] => 2016-12-19
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[rel_patent_id] =>[rel_patent_doc_number] =>) 15/384209 | Temperature control in RF chamber with heater and air amplifier | Dec 18, 2016 | Issued |
Array
(
[id] => 13270999
[patent_doc_number] => 10147586
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[patent_kind] => B2
[patent_issue_date] => 2018-12-04
[patent_title] => Inductively coupled coil and inductively coupled plasma device using the same
[patent_app_type] => utility
[patent_app_number] => 15/378914
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[rel_patent_id] =>[rel_patent_doc_number] =>) 15/378914 | Inductively coupled coil and inductively coupled plasma device using the same | Dec 13, 2016 | Issued |
Array
(
[id] => 11691304
[patent_doc_number] => 20170167019
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[patent_title] => 'PLASMA PROCESSING APPARATUS AND FILM DEPOSITION METHOD'
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[rel_patent_id] =>[rel_patent_doc_number] =>) 15/364418 | PLASMA PROCESSING APPARATUS AND FILM DEPOSITION METHOD | Nov 29, 2016 | Abandoned |
Array
(
[id] => 16218380
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[patent_title] => Mono-energetic neutral beam activated chemical processing system and method of using
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Array
(
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[patent_title] => Extreme edge uniformity control
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[rel_patent_id] =>[rel_patent_doc_number] =>) 15/269026 | Extreme edge uniformity control | Sep 18, 2016 | Issued |
Array
(
[id] => 11325334
[patent_doc_number] => 20160355946
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[patent_title] => 'RADICAL GENERATOR AND MOLECULAR BEAM EPITAXY APPARATUS'
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Array
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Array
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Array
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Array
(
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[rel_patent_id] =>[rel_patent_doc_number] =>) 15/200405 | System and method for substrate support feed-forward temperature control based on RF power | Jun 30, 2016 | Issued |