Search

Xilin Guo

Examiner (ID: 8680, Phone: (571)272-5786 , Office: P/2616 )

Most Active Art Unit
2616
Art Unit(s)
2616
Total Applications
554
Issued Applications
442
Pending Applications
56
Abandoned Applications
82

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 12026823 [patent_doc_number] => 20170316922 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-11-02 [patent_title] => 'GAS SUPPLY STRUCTURE FOR INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS' [patent_app_type] => utility [patent_app_number] => 15/152129 [patent_app_country] => US [patent_app_date] => 2016-05-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 3973 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15152129 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/152129
GAS SUPPLY STRUCTURE FOR INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS May 10, 2016 Abandoned
Array ( [id] => 11057209 [patent_doc_number] => 20160254171 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-09-01 [patent_title] => 'IMAGE REVERSAL WITH AHM GAP FILL FOR MULTIPLE PATTERNING' [patent_app_type] => utility [patent_app_number] => 15/150239 [patent_app_country] => US [patent_app_date] => 2016-05-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 13 [patent_figures_cnt] => 13 [patent_no_of_words] => 12816 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15150239 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/150239
Image reversal with AHM gap fill for multiple patterning May 8, 2016 Issued
Array ( [id] => 12566844 [patent_doc_number] => 10017857 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-07-10 [patent_title] => Method and apparatus for controlling plasma near the edge of a substrate [patent_app_type] => utility [patent_app_number] => 15/144736 [patent_app_country] => US [patent_app_date] => 2016-05-02 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 5 [patent_no_of_words] => 3012 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 114 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15144736 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/144736
Method and apparatus for controlling plasma near the edge of a substrate May 1, 2016 Issued
Array ( [id] => 14675739 [patent_doc_number] => 10375812 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-08-06 [patent_title] => Low electron temperature, edge-density enhanced, surface-wave plasma (SWP) processing method and apparatus [patent_app_type] => utility [patent_app_number] => 15/082465 [patent_app_country] => US [patent_app_date] => 2016-03-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 12 [patent_no_of_words] => 7847 [patent_no_of_claims] => 9 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 182 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15082465 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/082465
Low electron temperature, edge-density enhanced, surface-wave plasma (SWP) processing method and apparatus Mar 27, 2016 Issued
Array ( [id] => 16372310 [patent_doc_number] => 10804076 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-10-13 [patent_title] => Plasma processing apparatus and plasma processing method [patent_app_type] => utility [patent_app_number] => 15/079381 [patent_app_country] => US [patent_app_date] => 2016-03-24 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 36 [patent_figures_cnt] => 68 [patent_no_of_words] => 21926 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 433 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15079381 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/079381
Plasma processing apparatus and plasma processing method Mar 23, 2016 Issued
Array ( [id] => 11861850 [patent_doc_number] => 09741538 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2017-08-22 [patent_title] => 'Plasma processing apparatus, plasma processing method, and method for manufacturing electronic device' [patent_app_type] => utility [patent_app_number] => 15/075044 [patent_app_country] => US [patent_app_date] => 2016-03-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 21 [patent_no_of_words] => 9708 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 145 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15075044 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/075044
Plasma processing apparatus, plasma processing method, and method for manufacturing electronic device Mar 17, 2016 Issued
Array ( [id] => 14332861 [patent_doc_number] => 10297457 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-05-21 [patent_title] => Controlling azimuthal uniformity of etch process in plasma processing chamber [patent_app_type] => utility [patent_app_number] => 15/073048 [patent_app_country] => US [patent_app_date] => 2016-03-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 7539 [patent_no_of_claims] => 13 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 231 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15073048 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/073048
Controlling azimuthal uniformity of etch process in plasma processing chamber Mar 16, 2016 Issued
Array ( [id] => 15547407 [patent_doc_number] => 10573493 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2020-02-25 [patent_title] => Inductively coupled plasma apparatus [patent_app_type] => utility [patent_app_number] => 15/070847 [patent_app_country] => US [patent_app_date] => 2016-03-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 9 [patent_no_of_words] => 7334 [patent_no_of_claims] => 12 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 195 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15070847 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/070847
Inductively coupled plasma apparatus Mar 14, 2016 Issued
Array ( [id] => 10984122 [patent_doc_number] => 20160181067 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-06-23 [patent_title] => 'DYNAMIC ION RADICAL SIEVE AND ION RADICAL APERTURE FOR AN INDUCTIVELY COUPLED PLASMA (ICP) REACTOR' [patent_app_type] => utility [patent_app_number] => 15/055032 [patent_app_country] => US [patent_app_date] => 2016-02-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 4794 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15055032 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/055032
DYNAMIC ION RADICAL SIEVE AND ION RADICAL APERTURE FOR AN INDUCTIVELY COUPLED PLASMA (ICP) REACTOR Feb 25, 2016 Abandoned
Array ( [id] => 10984186 [patent_doc_number] => 20160181130 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-06-23 [patent_title] => 'INTERNAL PLASMA GRID FOR SEMICONDUCTOR FABRICATION' [patent_app_type] => utility [patent_app_number] => 15/055380 [patent_app_country] => US [patent_app_date] => 2016-02-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 12655 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15055380 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/055380
INTERNAL PLASMA GRID FOR SEMICONDUCTOR FABRICATION Feb 25, 2016 Abandoned
Array ( [id] => 10817407 [patent_doc_number] => 20160163569 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-06-09 [patent_title] => 'Faraday Shield Having Plasma Density Decoupling Structure Between TCP Coil Zones' [patent_app_type] => utility [patent_app_number] => 15/041947 [patent_app_country] => US [patent_app_date] => 2016-02-11 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 7292 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15041947 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/041947
Faraday Shield Having Plasma Density Decoupling Structure Between TCP Coil Zones Feb 10, 2016 Abandoned
Array ( [id] => 12573726 [patent_doc_number] => 10020167 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2018-07-10 [patent_title] => Plasma processing apparatus [patent_app_type] => utility [patent_app_number] => 15/015215 [patent_app_country] => US [patent_app_date] => 2016-02-04 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 32 [patent_figures_cnt] => 50 [patent_no_of_words] => 19818 [patent_no_of_claims] => 14 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 251 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15015215 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/015215
Plasma processing apparatus Feb 3, 2016 Issued
Array ( [id] => 10825993 [patent_doc_number] => 20160172160 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-06-16 [patent_title] => 'PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD' [patent_app_type] => utility [patent_app_number] => 15/008064 [patent_app_country] => US [patent_app_date] => 2016-01-27 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 19 [patent_figures_cnt] => 19 [patent_no_of_words] => 10109 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15008064 [rel_patent_id] =>[rel_patent_doc_number] =>)
15/008064
Plasma processing apparatus and plasma processing method Jan 26, 2016 Issued
Array ( [id] => 17210645 [patent_doc_number] => 11171021 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2021-11-09 [patent_title] => Internal plasma grid for semiconductor fabrication [patent_app_type] => utility [patent_app_number] => 14/943483 [patent_app_country] => US [patent_app_date] => 2015-11-17 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 19 [patent_no_of_words] => 12171 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 444 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14943483 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/943483
Internal plasma grid for semiconductor fabrication Nov 16, 2015 Issued
Array ( [id] => 10779908 [patent_doc_number] => 20160126064 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-05-05 [patent_title] => 'PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD' [patent_app_type] => utility [patent_app_number] => 14/934066 [patent_app_country] => US [patent_app_date] => 2015-11-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 9 [patent_figures_cnt] => 9 [patent_no_of_words] => 4992 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14934066 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/934066
PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD Nov 4, 2015 Abandoned
Array ( [id] => 13808275 [patent_doc_number] => 10181406 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2019-01-15 [patent_title] => Plasma processing apparatus, plasma processing method, and method for manufacturing electronic device [patent_app_type] => utility [patent_app_number] => 14/841707 [patent_app_country] => US [patent_app_date] => 2015-09-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 12 [patent_figures_cnt] => 22 [patent_no_of_words] => 6896 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 185 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14841707 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/841707
Plasma processing apparatus, plasma processing method, and method for manufacturing electronic device Aug 31, 2015 Issued
Array ( [id] => 10486812 [patent_doc_number] => 20150371832 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-12-24 [patent_title] => 'PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE' [patent_app_type] => utility [patent_app_number] => 14/838682 [patent_app_country] => US [patent_app_date] => 2015-08-28 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 14223 [patent_no_of_claims] => 16 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14838682 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/838682
Plasma processing apparatus and method of manufacturing semiconductor device Aug 27, 2015 Issued
Array ( [id] => 10479332 [patent_doc_number] => 20150364349 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2015-12-17 [patent_title] => 'DUAL CHAMBER PLASMA ETCHER WITH ION ACCELERATOR' [patent_app_type] => utility [patent_app_number] => 14/832538 [patent_app_country] => US [patent_app_date] => 2015-08-21 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 11540 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14832538 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/832538
Dual chamber plasma etcher with ion accelerator Aug 20, 2015 Issued
Array ( [id] => 11439150 [patent_doc_number] => 20170040170 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2017-02-09 [patent_title] => 'Systems and Methods for Separately Applying Charged Plasma Constituents and Ultraviolet Light in a Mixed Mode Processing Operation' [patent_app_type] => utility [patent_app_number] => 14/820489 [patent_app_country] => US [patent_app_date] => 2015-08-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 14 [patent_no_of_words] => 9377 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14820489 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/820489
Systems and Methods for Separately Applying Charged Plasma Constituents and Ultraviolet Light in a Mixed Mode Processing Operation Aug 5, 2015 Abandoned
Array ( [id] => 10673928 [patent_doc_number] => 20160020072 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2016-01-21 [patent_title] => 'ION ENERGY BIAS CONTROL APPARATUS' [patent_app_type] => utility [patent_app_number] => 14/803815 [patent_app_country] => US [patent_app_date] => 2015-07-20 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 54 [patent_figures_cnt] => 54 [patent_no_of_words] => 19209 [patent_no_of_claims] => 1 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 0 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14803815 [rel_patent_id] =>[rel_patent_doc_number] =>)
14/803815
ION ENERGY BIAS CONTROL APPARATUS Jul 19, 2015 Abandoned
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