
Xilin Guo
Examiner (ID: 8680, Phone: (571)272-5786 , Office: P/2616 )
| Most Active Art Unit | 2616 |
| Art Unit(s) | 2616 |
| Total Applications | 554 |
| Issued Applications | 442 |
| Pending Applications | 56 |
| Abandoned Applications | 82 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 12026823
[patent_doc_number] => 20170316922
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2017-11-02
[patent_title] => 'GAS SUPPLY STRUCTURE FOR INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS'
[patent_app_type] => utility
[patent_app_number] => 15/152129
[patent_app_country] => US
[patent_app_date] => 2016-05-11
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 9
[patent_no_of_words] => 3973
[patent_no_of_claims] => 9
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15152129
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/152129 | GAS SUPPLY STRUCTURE FOR INDUCTIVELY COUPLED PLASMA PROCESSING APPARATUS | May 10, 2016 | Abandoned |
Array
(
[id] => 11057209
[patent_doc_number] => 20160254171
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2016-09-01
[patent_title] => 'IMAGE REVERSAL WITH AHM GAP FILL FOR MULTIPLE PATTERNING'
[patent_app_type] => utility
[patent_app_number] => 15/150239
[patent_app_country] => US
[patent_app_date] => 2016-05-09
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 13
[patent_figures_cnt] => 13
[patent_no_of_words] => 12816
[patent_no_of_claims] => 16
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15150239
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/150239 | Image reversal with AHM gap fill for multiple patterning | May 8, 2016 | Issued |
Array
(
[id] => 12566844
[patent_doc_number] => 10017857
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2018-07-10
[patent_title] => Method and apparatus for controlling plasma near the edge of a substrate
[patent_app_type] => utility
[patent_app_number] => 15/144736
[patent_app_country] => US
[patent_app_date] => 2016-05-02
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 4
[patent_figures_cnt] => 5
[patent_no_of_words] => 3012
[patent_no_of_claims] => 19
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 114
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15144736
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/144736 | Method and apparatus for controlling plasma near the edge of a substrate | May 1, 2016 | Issued |
Array
(
[id] => 14675739
[patent_doc_number] => 10375812
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2019-08-06
[patent_title] => Low electron temperature, edge-density enhanced, surface-wave plasma (SWP) processing method and apparatus
[patent_app_type] => utility
[patent_app_number] => 15/082465
[patent_app_country] => US
[patent_app_date] => 2016-03-28
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 12
[patent_no_of_words] => 7847
[patent_no_of_claims] => 9
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 182
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15082465
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/082465 | Low electron temperature, edge-density enhanced, surface-wave plasma (SWP) processing method and apparatus | Mar 27, 2016 | Issued |
Array
(
[id] => 16372310
[patent_doc_number] => 10804076
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2020-10-13
[patent_title] => Plasma processing apparatus and plasma processing method
[patent_app_type] => utility
[patent_app_number] => 15/079381
[patent_app_country] => US
[patent_app_date] => 2016-03-24
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 36
[patent_figures_cnt] => 68
[patent_no_of_words] => 21926
[patent_no_of_claims] => 6
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 433
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15079381
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/079381 | Plasma processing apparatus and plasma processing method | Mar 23, 2016 | Issued |
Array
(
[id] => 11861850
[patent_doc_number] => 09741538
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2017-08-22
[patent_title] => 'Plasma processing apparatus, plasma processing method, and method for manufacturing electronic device'
[patent_app_type] => utility
[patent_app_number] => 15/075044
[patent_app_country] => US
[patent_app_date] => 2016-03-18
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 21
[patent_no_of_words] => 9708
[patent_no_of_claims] => 6
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 145
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15075044
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/075044 | Plasma processing apparatus, plasma processing method, and method for manufacturing electronic device | Mar 17, 2016 | Issued |
Array
(
[id] => 14332861
[patent_doc_number] => 10297457
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2019-05-21
[patent_title] => Controlling azimuthal uniformity of etch process in plasma processing chamber
[patent_app_type] => utility
[patent_app_number] => 15/073048
[patent_app_country] => US
[patent_app_date] => 2016-03-17
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 9
[patent_no_of_words] => 7539
[patent_no_of_claims] => 13
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 231
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15073048
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/073048 | Controlling azimuthal uniformity of etch process in plasma processing chamber | Mar 16, 2016 | Issued |
Array
(
[id] => 15547407
[patent_doc_number] => 10573493
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2020-02-25
[patent_title] => Inductively coupled plasma apparatus
[patent_app_type] => utility
[patent_app_number] => 15/070847
[patent_app_country] => US
[patent_app_date] => 2016-03-15
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 5
[patent_figures_cnt] => 9
[patent_no_of_words] => 7334
[patent_no_of_claims] => 12
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 195
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15070847
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/070847 | Inductively coupled plasma apparatus | Mar 14, 2016 | Issued |
Array
(
[id] => 10984122
[patent_doc_number] => 20160181067
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2016-06-23
[patent_title] => 'DYNAMIC ION RADICAL SIEVE AND ION RADICAL APERTURE FOR AN INDUCTIVELY COUPLED PLASMA (ICP) REACTOR'
[patent_app_type] => utility
[patent_app_number] => 15/055032
[patent_app_country] => US
[patent_app_date] => 2016-02-26
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 6
[patent_no_of_words] => 4794
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15055032
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/055032 | DYNAMIC ION RADICAL SIEVE AND ION RADICAL APERTURE FOR AN INDUCTIVELY COUPLED PLASMA (ICP) REACTOR | Feb 25, 2016 | Abandoned |
Array
(
[id] => 10984186
[patent_doc_number] => 20160181130
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2016-06-23
[patent_title] => 'INTERNAL PLASMA GRID FOR SEMICONDUCTOR FABRICATION'
[patent_app_type] => utility
[patent_app_number] => 15/055380
[patent_app_country] => US
[patent_app_date] => 2016-02-26
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 11
[patent_figures_cnt] => 11
[patent_no_of_words] => 12655
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15055380
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/055380 | INTERNAL PLASMA GRID FOR SEMICONDUCTOR FABRICATION | Feb 25, 2016 | Abandoned |
Array
(
[id] => 10817407
[patent_doc_number] => 20160163569
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2016-06-09
[patent_title] => 'Faraday Shield Having Plasma Density Decoupling Structure Between TCP Coil Zones'
[patent_app_type] => utility
[patent_app_number] => 15/041947
[patent_app_country] => US
[patent_app_date] => 2016-02-11
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 10
[patent_figures_cnt] => 10
[patent_no_of_words] => 7292
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15041947
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/041947 | Faraday Shield Having Plasma Density Decoupling Structure Between TCP Coil Zones | Feb 10, 2016 | Abandoned |
Array
(
[id] => 12573726
[patent_doc_number] => 10020167
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2018-07-10
[patent_title] => Plasma processing apparatus
[patent_app_type] => utility
[patent_app_number] => 15/015215
[patent_app_country] => US
[patent_app_date] => 2016-02-04
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 32
[patent_figures_cnt] => 50
[patent_no_of_words] => 19818
[patent_no_of_claims] => 14
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 251
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15015215
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/015215 | Plasma processing apparatus | Feb 3, 2016 | Issued |
Array
(
[id] => 10825993
[patent_doc_number] => 20160172160
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2016-06-16
[patent_title] => 'PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD'
[patent_app_type] => utility
[patent_app_number] => 15/008064
[patent_app_country] => US
[patent_app_date] => 2016-01-27
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 19
[patent_figures_cnt] => 19
[patent_no_of_words] => 10109
[patent_no_of_claims] => 6
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 15008064
[rel_patent_id] =>[rel_patent_doc_number] =>) 15/008064 | Plasma processing apparatus and plasma processing method | Jan 26, 2016 | Issued |
Array
(
[id] => 17210645
[patent_doc_number] => 11171021
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2021-11-09
[patent_title] => Internal plasma grid for semiconductor fabrication
[patent_app_type] => utility
[patent_app_number] => 14/943483
[patent_app_country] => US
[patent_app_date] => 2015-11-17
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 10
[patent_figures_cnt] => 19
[patent_no_of_words] => 12171
[patent_no_of_claims] => 21
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 444
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14943483
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/943483 | Internal plasma grid for semiconductor fabrication | Nov 16, 2015 | Issued |
Array
(
[id] => 10779908
[patent_doc_number] => 20160126064
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2016-05-05
[patent_title] => 'PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD'
[patent_app_type] => utility
[patent_app_number] => 14/934066
[patent_app_country] => US
[patent_app_date] => 2015-11-05
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 9
[patent_figures_cnt] => 9
[patent_no_of_words] => 4992
[patent_no_of_claims] => 6
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14934066
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/934066 | PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD | Nov 4, 2015 | Abandoned |
Array
(
[id] => 13808275
[patent_doc_number] => 10181406
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2019-01-15
[patent_title] => Plasma processing apparatus, plasma processing method, and method for manufacturing electronic device
[patent_app_type] => utility
[patent_app_number] => 14/841707
[patent_app_country] => US
[patent_app_date] => 2015-09-01
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 12
[patent_figures_cnt] => 22
[patent_no_of_words] => 6896
[patent_no_of_claims] => 6
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 185
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => patent
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14841707
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/841707 | Plasma processing apparatus, plasma processing method, and method for manufacturing electronic device | Aug 31, 2015 | Issued |
Array
(
[id] => 10486812
[patent_doc_number] => 20150371832
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2015-12-24
[patent_title] => 'PLASMA PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE'
[patent_app_type] => utility
[patent_app_number] => 14/838682
[patent_app_country] => US
[patent_app_date] => 2015-08-28
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 6
[patent_no_of_words] => 14223
[patent_no_of_claims] => 16
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14838682
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/838682 | Plasma processing apparatus and method of manufacturing semiconductor device | Aug 27, 2015 | Issued |
Array
(
[id] => 10479332
[patent_doc_number] => 20150364349
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2015-12-17
[patent_title] => 'DUAL CHAMBER PLASMA ETCHER WITH ION ACCELERATOR'
[patent_app_type] => utility
[patent_app_number] => 14/832538
[patent_app_country] => US
[patent_app_date] => 2015-08-21
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 6
[patent_figures_cnt] => 6
[patent_no_of_words] => 11540
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 2
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14832538
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/832538 | Dual chamber plasma etcher with ion accelerator | Aug 20, 2015 | Issued |
Array
(
[id] => 11439150
[patent_doc_number] => 20170040170
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2017-02-09
[patent_title] => 'Systems and Methods for Separately Applying Charged Plasma Constituents and Ultraviolet Light in a Mixed Mode Processing Operation'
[patent_app_type] => utility
[patent_app_number] => 14/820489
[patent_app_country] => US
[patent_app_date] => 2015-08-06
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 14
[patent_figures_cnt] => 14
[patent_no_of_words] => 9377
[patent_no_of_claims] => 20
[patent_no_of_ind_claims] => 3
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14820489
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/820489 | Systems and Methods for Separately Applying Charged Plasma Constituents and Ultraviolet Light in a Mixed Mode Processing Operation | Aug 5, 2015 | Abandoned |
Array
(
[id] => 10673928
[patent_doc_number] => 20160020072
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2016-01-21
[patent_title] => 'ION ENERGY BIAS CONTROL APPARATUS'
[patent_app_type] => utility
[patent_app_number] => 14/803815
[patent_app_country] => US
[patent_app_date] => 2015-07-20
[patent_effective_date] => 0000-00-00
[patent_drawing_sheets_cnt] => 54
[patent_figures_cnt] => 54
[patent_no_of_words] => 19209
[patent_no_of_claims] => 1
[patent_no_of_ind_claims] => 1
[patent_words_short_claim] => 0
[patent_maintenance] => 1
[patent_no_of_assignments] => 0
[patent_current_assignee] =>[type] => publication
[pdf_file] =>[firstpage_image] =>[orig_patent_app_number] => 14803815
[rel_patent_id] =>[rel_patent_doc_number] =>) 14/803815 | ION ENERGY BIAS CONTROL APPARATUS | Jul 19, 2015 | Abandoned |