
Xilin Guo
Examiner (ID: 8680, Phone: (571)272-5786 , Office: P/2616 )
| Most Active Art Unit | 2616 |
| Art Unit(s) | 2616 |
| Total Applications | 554 |
| Issued Applications | 442 |
| Pending Applications | 56 |
| Abandoned Applications | 82 |
Applications
| Application number | Title of the application | Filing Date | Status |
|---|---|---|---|
Array
(
[id] => 10350806
[patent_doc_number] => 20150235811
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2015-08-20
[patent_title] => 'TUNABLE MULTI-ZONE GAS INJECTION SYSTEM'
[patent_app_type] => utility
[patent_app_number] => 14/703066
[patent_app_country] => US
[patent_app_date] => 2015-05-04
[patent_effective_date] => 0000-00-00
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[rel_patent_id] =>[rel_patent_doc_number] =>) 14/703066 | Tunable multi-zone gas injection system | May 3, 2015 | Issued |
Array
(
[id] => 13070895
[patent_doc_number] => 10056231
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2018-08-21
[patent_title] => TCCT match circuit for plasma etch chambers
[patent_app_type] => utility
[patent_app_number] => 14/698589
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[rel_patent_id] =>[rel_patent_doc_number] =>) 14/698589 | TCCT match circuit for plasma etch chambers | Apr 27, 2015 | Issued |
Array
(
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[patent_doc_number] => 10083819
[patent_country] => US
[patent_kind] => B2
[patent_issue_date] => 2018-09-25
[patent_title] => Antenna and plasma processing apparatus
[patent_app_type] => utility
[patent_app_number] => 14/675873
[patent_app_country] => US
[patent_app_date] => 2015-04-01
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[rel_patent_id] =>[rel_patent_doc_number] =>) 14/675873 | Antenna and plasma processing apparatus | Mar 31, 2015 | Issued |
Array
(
[id] => 10315075
[patent_doc_number] => 20150200078
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2015-07-16
[patent_title] => 'PLASMA ETCHING APPARATUS'
[patent_app_type] => utility
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[patent_app_country] => US
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Array
(
[id] => 10315071
[patent_doc_number] => 20150200075
[patent_country] => US
[patent_kind] => A1
[patent_issue_date] => 2015-07-16
[patent_title] => 'Plasma Reactor with Inductive Excitation of Plasma and Efficient Removal of Heat from the Excitation Coil'
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[rel_patent_id] =>[rel_patent_doc_number] =>) 14/665684 | Plasma reactor with inductive excitation of plasma and efficient removal of heat from the excitation coil | Mar 22, 2015 | Issued |
Array
(
[id] => 10306821
[patent_doc_number] => 20150191822
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[patent_issue_date] => 2015-07-09
[patent_title] => 'VAPOR DEPOSITION APPARATUS AND METHOD OF MANUFACTURING ORGANIC LIGHT-EMITTING DISPLAY APPARATUS'
[patent_app_type] => utility
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Array
(
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[patent_doc_number] => 10886097
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[patent_issue_date] => 2021-01-05
[patent_title] => Plasma processing apparatus and plasma processing method
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[rel_patent_id] =>[rel_patent_doc_number] =>) 15/121075 | Plasma processing apparatus and plasma processing method | Feb 19, 2015 | Issued |
Array
(
[id] => 13030489
[patent_doc_number] => 10037867
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[patent_kind] => B2
[patent_issue_date] => 2018-07-31
[patent_title] => Inductive plasma source with high coupling efficiency
[patent_app_type] => utility
[patent_app_number] => 14/581348
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[rel_patent_id] =>[rel_patent_doc_number] =>) 14/581348 | Inductive plasma source with high coupling efficiency | Dec 22, 2014 | Issued |
Array
(
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[patent_title] => 'Plasma processing method and apparatus'
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[rel_patent_id] =>[rel_patent_doc_number] =>) 14/508859 | Plasma processing method and apparatus | Oct 6, 2014 | Issued |
Array
(
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[patent_title] => Biasing system for a plasma processing apparatus
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Array
(
[id] => 10967682
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[patent_title] => 'PLASMA PROCESSING METHOD AND SUBSTRATE PROCESSING APPARATUS'
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Array
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Array
(
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Array
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[patent_title] => 'Symmetrical plural-coil plasma source with side RF feeds and RF distribution plates'
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Array
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[patent_title] => Multiple coil inductively coupled plasma source with offset frequencies and double-walled shielding
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Array
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Array
(
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Array
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Array
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