Search

Zandra V. Smith

Supervisory Patent Examiner (ID: 14247, Phone: (571)272-2429 , Office: P/2816 )

Most Active Art Unit
2877
Art Unit(s)
2816, 2899, 2505, 2822, 2877
Total Applications
656
Issued Applications
507
Pending Applications
108
Abandoned Applications
41

Applications

Application numberTitle of the applicationFiling DateStatus
Array ( [id] => 1117792 [patent_doc_number] => 06801315 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-10-05 [patent_title] => 'Method and system for overlay measurement' [patent_app_type] => B2 [patent_app_number] => 10/303052 [patent_app_country] => US [patent_app_date] => 2002-11-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 16 [patent_no_of_words] => 6843 [patent_no_of_claims] => 43 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 124 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/801/06801315.pdf [firstpage_image] =>[orig_patent_app_number] => 10303052 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/303052
Method and system for overlay measurement Nov 24, 2002 Issued
Array ( [id] => 1162248 [patent_doc_number] => 06765671 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-07-20 [patent_title] => 'Automated system for measurement of an optical property' [patent_app_type] => B2 [patent_app_number] => 10/149693 [patent_app_country] => US [patent_app_date] => 2002-11-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 4983 [patent_no_of_claims] => 17 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 144 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/765/06765671.pdf [firstpage_image] =>[orig_patent_app_number] => 10149693 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/149693
Automated system for measurement of an optical property Nov 17, 2002 Issued
Array ( [id] => 936049 [patent_doc_number] => 06975399 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-12-13 [patent_title] => 'mark position detecting apparatus' [patent_app_type] => utility [patent_app_number] => 10/291680 [patent_app_country] => US [patent_app_date] => 2002-11-12 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 18 [patent_no_of_words] => 7917 [patent_no_of_claims] => 19 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 133 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/975/06975399.pdf [firstpage_image] =>[orig_patent_app_number] => 10291680 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/291680
mark position detecting apparatus Nov 11, 2002 Issued
Array ( [id] => 7185267 [patent_doc_number] => 20040083892 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-05-06 [patent_title] => 'Foam detector and disruptor' [patent_app_type] => new [patent_app_number] => 10/288391 [patent_app_country] => US [patent_app_date] => 2002-11-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 3538 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 45 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0083/20040083892.pdf [firstpage_image] =>[orig_patent_app_number] => 10288391 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/288391
Foam detector and disruptor Nov 4, 2002 Issued
Array ( [id] => 1026282 [patent_doc_number] => 06885452 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-04-26 [patent_title] => 'Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use' [patent_app_type] => utility [patent_app_number] => 10/287512 [patent_app_country] => US [patent_app_date] => 2002-11-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 6 [patent_no_of_words] => 6424 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 34 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/885/06885452.pdf [firstpage_image] =>[orig_patent_app_number] => 10287512 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/287512
Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use Nov 4, 2002 Issued
Array ( [id] => 656927 [patent_doc_number] => 07110116 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-09-19 [patent_title] => 'Alignment apparatus, exposure apparatus using same, and method of manufacturing devices' [patent_app_type] => utility [patent_app_number] => 10/279924 [patent_app_country] => US [patent_app_date] => 2002-10-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 6516 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 199 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/110/07110116.pdf [firstpage_image] =>[orig_patent_app_number] => 10279924 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/279924
Alignment apparatus, exposure apparatus using same, and method of manufacturing devices Oct 24, 2002 Issued
Array ( [id] => 1234032 [patent_doc_number] => 06693709 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-02-17 [patent_title] => 'Photometric device' [patent_app_type] => B2 [patent_app_number] => 10/266062 [patent_app_country] => US [patent_app_date] => 2002-10-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 17 [patent_no_of_words] => 12550 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 139 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/693/06693709.pdf [firstpage_image] =>[orig_patent_app_number] => 10266062 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/266062
Photometric device Oct 6, 2002 Issued
Array ( [id] => 1041853 [patent_doc_number] => 06870623 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-03-22 [patent_title] => 'Position detection apparatus, alignment apparatus and methods therefor, and exposure apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 10/244171 [patent_app_country] => US [patent_app_date] => 2002-09-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 17 [patent_no_of_words] => 8518 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/870/06870623.pdf [firstpage_image] =>[orig_patent_app_number] => 10244171 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/244171
Position detection apparatus, alignment apparatus and methods therefor, and exposure apparatus and device manufacturing method Sep 15, 2002 Issued
Array ( [id] => 973558 [patent_doc_number] => 06937341 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2005-08-30 [patent_title] => 'System and method enabling simultaneous investigation of sample with two beams of electromagnetic radiation' [patent_app_type] => utility [patent_app_number] => 10/238241 [patent_app_country] => US [patent_app_date] => 2002-09-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 14 [patent_no_of_words] => 10753 [patent_no_of_claims] => 40 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 43 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/937/06937341.pdf [firstpage_image] =>[orig_patent_app_number] => 10238241 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/238241
System and method enabling simultaneous investigation of sample with two beams of electromagnetic radiation Sep 9, 2002 Issued
Array ( [id] => 6833415 [patent_doc_number] => 20030160960 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-08-28 [patent_title] => 'Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device' [patent_app_type] => new [patent_app_number] => 10/235656 [patent_app_country] => US [patent_app_date] => 2002-09-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 25 [patent_figures_cnt] => 25 [patent_no_of_words] => 11629 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 222 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0160/20030160960.pdf [firstpage_image] =>[orig_patent_app_number] => 10235656 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/235656
Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device Sep 5, 2002 Issued
Array ( [id] => 6719373 [patent_doc_number] => 20030053061 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-03-20 [patent_title] => 'Optical measurement device and related process' [patent_app_type] => new [patent_app_number] => 10/236529 [patent_app_country] => US [patent_app_date] => 2002-09-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 17 [patent_no_of_words] => 12561 [patent_no_of_claims] => 132 [patent_no_of_ind_claims] => 25 [patent_words_short_claim] => 49 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0053/20030053061.pdf [firstpage_image] =>[orig_patent_app_number] => 10236529 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/236529
Optical measurement device and related process Sep 5, 2002 Issued
Array ( [id] => 6837767 [patent_doc_number] => 20030035107 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-02-20 [patent_title] => 'Optical measurement device and related process' [patent_app_type] => new [patent_app_number] => 10/236305 [patent_app_country] => US [patent_app_date] => 2002-09-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 17 [patent_no_of_words] => 12569 [patent_no_of_claims] => 132 [patent_no_of_ind_claims] => 28 [patent_words_short_claim] => 12 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0035/20030035107.pdf [firstpage_image] =>[orig_patent_app_number] => 10236305 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/236305
Optical measurement device and related process Sep 5, 2002 Issued
Array ( [id] => 1365583 [patent_doc_number] => 06584481 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-06-24 [patent_title] => 'FPGA implemented bit-serial multiplier and infinite impulse response filter' [patent_app_type] => B1 [patent_app_number] => 10/215778 [patent_app_country] => US [patent_app_date] => 2002-08-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 23 [patent_no_of_words] => 7051 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 410 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/584/06584481.pdf [firstpage_image] =>[orig_patent_app_number] => 10215778 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/215778
FPGA implemented bit-serial multiplier and infinite impulse response filter Aug 8, 2002 Issued
Array ( [id] => 7390195 [patent_doc_number] => 20040021865 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-02-05 [patent_title] => 'Aligning a lens with respect to an axis of beam propagation' [patent_app_type] => new [patent_app_number] => 10/212931 [patent_app_country] => US [patent_app_date] => 2002-08-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 6792 [patent_no_of_claims] => 39 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 71 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0021/20040021865.pdf [firstpage_image] =>[orig_patent_app_number] => 10212931 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/212931
Aligning a lens with respect to an axis of beam propagation Aug 4, 2002 Issued
Array ( [id] => 1356629 [patent_doc_number] => 06580505 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-06-17 [patent_title] => 'Overlay alignment mark design' [patent_app_type] => B1 [patent_app_number] => 10/212281 [patent_app_country] => US [patent_app_date] => 2002-08-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 5740 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 358 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/580/06580505.pdf [firstpage_image] =>[orig_patent_app_number] => 10212281 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/212281
Overlay alignment mark design Jul 31, 2002 Issued
Array ( [id] => 6503811 [patent_doc_number] => 20020191186 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-12-19 [patent_title] => 'Broadband spectroscopic rotating compensator ellipsometer' [patent_app_type] => new [patent_app_number] => 10/206428 [patent_app_country] => US [patent_app_date] => 2002-07-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 7159 [patent_no_of_claims] => 56 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 189 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0191/20020191186.pdf [firstpage_image] =>[orig_patent_app_number] => 10206428 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/206428
Broadband spectroscopic rotating compensator ellipsometer Jul 25, 2002 Issued
Array ( [id] => 7619306 [patent_doc_number] => 06943883 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-09-13 [patent_title] => 'Apparatus, sample cuvette and method for optical measurements' [patent_app_type] => utility [patent_app_number] => 10/198400 [patent_app_country] => US [patent_app_date] => 2002-07-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 9 [patent_no_of_words] => 8306 [patent_no_of_claims] => 40 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 43 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/943/06943883.pdf [firstpage_image] =>[orig_patent_app_number] => 10198400 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/198400
Apparatus, sample cuvette and method for optical measurements Jul 17, 2002 Issued
Array ( [id] => 969531 [patent_doc_number] => 06940595 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2005-09-06 [patent_title] => 'Application of spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters' [patent_app_type] => utility [patent_app_number] => 10/194881 [patent_app_country] => US [patent_app_date] => 2002-07-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 12 [patent_no_of_words] => 7548 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 27 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/940/06940595.pdf [firstpage_image] =>[orig_patent_app_number] => 10194881 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/194881
Application of spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters Jul 14, 2002 Issued
Array ( [id] => 7424638 [patent_doc_number] => 20040001204 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-01-01 [patent_title] => 'Apparatus and method for measuring the volume of an object' [patent_app_type] => new [patent_app_number] => 10/185598 [patent_app_country] => US [patent_app_date] => 2002-06-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 4374 [patent_no_of_claims] => 37 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 101 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0001/20040001204.pdf [firstpage_image] =>[orig_patent_app_number] => 10185598 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/185598
Apparatus and method for measuring the volume of an object Jun 25, 2002 Issued
Array ( [id] => 6734154 [patent_doc_number] => 20030011789 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-01-16 [patent_title] => 'Apparatus and methods for optically monitoring thickness' [patent_app_type] => new [patent_app_number] => 10/180679 [patent_app_country] => US [patent_app_date] => 2002-06-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 8114 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 64 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0011/20030011789.pdf [firstpage_image] =>[orig_patent_app_number] => 10180679 [rel_patent_id] =>[rel_patent_doc_number] =>)
10/180679
Apparatus and methods for optically monitoring thickness Jun 25, 2002 Issued
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