Zandra V. Smith

Array ( [id] => 1026282 [patent_doc_number] => 06885452 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-04-26 [patent_title] => 'Chamber effluent monitoring system and semiconductor processing system comprising absorption spectroscopy measurement system, and methods of use' [patent_app_type] => utility [patent_app_number] => 10/287512 [patent_app_country] => US [patent_app_date] => 2002-11-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 3 [patent_figures_cnt] => 6 [patent_no_of_words] => 6424 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 34 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/885/06885452.pdf [firstpage_image] =>[orig_patent_app_number] => 10287512 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 656927 [patent_doc_number] => 07110116 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2006-09-19 [patent_title] => 'Alignment apparatus, exposure apparatus using same, and method of manufacturing devices' [patent_app_type] => utility [patent_app_number] => 10/279924 [patent_app_country] => US [patent_app_date] => 2002-10-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 10 [patent_figures_cnt] => 10 [patent_no_of_words] => 6516 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 199 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/07/110/07110116.pdf [firstpage_image] =>[orig_patent_app_number] => 10279924 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1234032 [patent_doc_number] => 06693709 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-02-17 [patent_title] => 'Photometric device' [patent_app_type] => B2 [patent_app_number] => 10/266062 [patent_app_country] => US [patent_app_date] => 2002-10-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 17 [patent_no_of_words] => 12550 [patent_no_of_claims] => 22 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 139 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/693/06693709.pdf [firstpage_image] =>[orig_patent_app_number] => 10266062 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1041853 [patent_doc_number] => 06870623 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-03-22 [patent_title] => 'Position detection apparatus, alignment apparatus and methods therefor, and exposure apparatus and device manufacturing method' [patent_app_type] => utility [patent_app_number] => 10/244171 [patent_app_country] => US [patent_app_date] => 2002-09-16 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 16 [patent_figures_cnt] => 17 [patent_no_of_words] => 8518 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 88 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/870/06870623.pdf [firstpage_image] =>[orig_patent_app_number] => 10244171 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 973558 [patent_doc_number] => 06937341 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2005-08-30 [patent_title] => 'System and method enabling simultaneous investigation of sample with two beams of electromagnetic radiation' [patent_app_type] => utility [patent_app_number] => 10/238241 [patent_app_country] => US [patent_app_date] => 2002-09-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 14 [patent_no_of_words] => 10753 [patent_no_of_claims] => 40 [patent_no_of_ind_claims] => 8 [patent_words_short_claim] => 43 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/937/06937341.pdf [firstpage_image] =>[orig_patent_app_number] => 10238241 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6833415 [patent_doc_number] => 20030160960 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-08-28 [patent_title] => 'Apparatus and method for measuring alignment accuracy, as well as method and system for manufacturing semiconductor device' [patent_app_type] => new [patent_app_number] => 10/235656 [patent_app_country] => US [patent_app_date] => 2002-09-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 25 [patent_figures_cnt] => 25 [patent_no_of_words] => 11629 [patent_no_of_claims] => 21 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 222 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0160/20030160960.pdf [firstpage_image] =>[orig_patent_app_number] => 10235656 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6837767 [patent_doc_number] => 20030035107 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-02-20 [patent_title] => 'Optical measurement device and related process' [patent_app_type] => new [patent_app_number] => 10/236305 [patent_app_country] => US [patent_app_date] => 2002-09-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 17 [patent_no_of_words] => 12569 [patent_no_of_claims] => 132 [patent_no_of_ind_claims] => 28 [patent_words_short_claim] => 12 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0035/20030035107.pdf [firstpage_image] =>[orig_patent_app_number] => 10236305 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6719373 [patent_doc_number] => 20030053061 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-03-20 [patent_title] => 'Optical measurement device and related process' [patent_app_type] => new [patent_app_number] => 10/236529 [patent_app_country] => US [patent_app_date] => 2002-09-06 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 17 [patent_figures_cnt] => 17 [patent_no_of_words] => 12561 [patent_no_of_claims] => 132 [patent_no_of_ind_claims] => 25 [patent_words_short_claim] => 49 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0053/20030053061.pdf [firstpage_image] =>[orig_patent_app_number] => 10236529 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1365583 [patent_doc_number] => 06584481 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-06-24 [patent_title] => 'FPGA implemented bit-serial multiplier and infinite impulse response filter' [patent_app_type] => B1 [patent_app_number] => 10/215778 [patent_app_country] => US [patent_app_date] => 2002-08-09 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 14 [patent_figures_cnt] => 23 [patent_no_of_words] => 7051 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 410 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/584/06584481.pdf [firstpage_image] =>[orig_patent_app_number] => 10215778 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7390195 [patent_doc_number] => 20040021865 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-02-05 [patent_title] => 'Aligning a lens with respect to an axis of beam propagation' [patent_app_type] => new [patent_app_number] => 10/212931 [patent_app_country] => US [patent_app_date] => 2002-08-05 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 6792 [patent_no_of_claims] => 39 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 71 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0021/20040021865.pdf [firstpage_image] =>[orig_patent_app_number] => 10212931 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1356629 [patent_doc_number] => 06580505 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2003-06-17 [patent_title] => 'Overlay alignment mark design' [patent_app_type] => B1 [patent_app_number] => 10/212281 [patent_app_country] => US [patent_app_date] => 2002-08-01 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 5740 [patent_no_of_claims] => 6 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 358 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/580/06580505.pdf [firstpage_image] =>[orig_patent_app_number] => 10212281 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6503811 [patent_doc_number] => 20020191186 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-12-19 [patent_title] => 'Broadband spectroscopic rotating compensator ellipsometer' [patent_app_type] => new [patent_app_number] => 10/206428 [patent_app_country] => US [patent_app_date] => 2002-07-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 7159 [patent_no_of_claims] => 56 [patent_no_of_ind_claims] => 2 [patent_words_short_claim] => 189 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0191/20020191186.pdf [firstpage_image] =>[orig_patent_app_number] => 10206428 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7619306 [patent_doc_number] => 06943883 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2005-09-13 [patent_title] => 'Apparatus, sample cuvette and method for optical measurements' [patent_app_type] => utility [patent_app_number] => 10/198400 [patent_app_country] => US [patent_app_date] => 2002-07-18 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 5 [patent_figures_cnt] => 9 [patent_no_of_words] => 8306 [patent_no_of_claims] => 40 [patent_no_of_ind_claims] => 6 [patent_words_short_claim] => 43 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/943/06943883.pdf [firstpage_image] =>[orig_patent_app_number] => 10198400 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 969531 [patent_doc_number] => 06940595 [patent_country] => US [patent_kind] => B1 [patent_issue_date] => 2005-09-06 [patent_title] => 'Application of spectroscopic ellipsometry to in-situ real time fabrication of multiple layer alternating high/low refractive index filters' [patent_app_type] => utility [patent_app_number] => 10/194881 [patent_app_country] => US [patent_app_date] => 2002-07-15 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 12 [patent_no_of_words] => 7548 [patent_no_of_claims] => 28 [patent_no_of_ind_claims] => 7 [patent_words_short_claim] => 27 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/940/06940595.pdf [firstpage_image] =>[orig_patent_app_number] => 10194881 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6734154 [patent_doc_number] => 20030011789 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-01-16 [patent_title] => 'Apparatus and methods for optically monitoring thickness' [patent_app_type] => new [patent_app_number] => 10/180679 [patent_app_country] => US [patent_app_date] => 2002-06-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 6 [patent_figures_cnt] => 6 [patent_no_of_words] => 8114 [patent_no_of_claims] => 25 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 64 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0011/20030011789.pdf [firstpage_image] =>[orig_patent_app_number] => 10180679 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7424638 [patent_doc_number] => 20040001204 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-01-01 [patent_title] => 'Apparatus and method for measuring the volume of an object' [patent_app_type] => new [patent_app_number] => 10/185598 [patent_app_country] => US [patent_app_date] => 2002-06-26 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 4 [patent_figures_cnt] => 4 [patent_no_of_words] => 4374 [patent_no_of_claims] => 37 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 101 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0001/20040001204.pdf [firstpage_image] =>[orig_patent_app_number] => 10185598 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 1179174 [patent_doc_number] => 06750964 [patent_country] => US [patent_kind] => B2 [patent_issue_date] => 2004-06-15 [patent_title] => 'Spectral imaging methods and systems' [patent_app_type] => B2 [patent_app_number] => 10/183335 [patent_app_country] => US [patent_app_date] => 2002-06-25 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 8 [patent_figures_cnt] => 8 [patent_no_of_words] => 8833 [patent_no_of_claims] => 27 [patent_no_of_ind_claims] => 1 [patent_words_short_claim] => 83 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => patent [pdf_file] => patents/06/750/06750964.pdf [firstpage_image] =>[orig_patent_app_number] => 10183335 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 7297433 [patent_doc_number] => 20040125371 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2004-07-01 [patent_title] => 'Method and instrumentation for measuring fluorescence spectra of individual airborne particles sampled from ambient air' [patent_app_type] => new [patent_app_number] => 10/360767 [patent_app_country] => US [patent_app_date] => 2002-06-19 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 7808 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 3 [patent_words_short_claim] => 151 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0125/20040125371.pdf [firstpage_image] =>[orig_patent_app_number] => 10360767 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6677473 [patent_doc_number] => 20030227613 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2003-12-11 [patent_title] => 'Methods and apparatus for harvesting vaccine from eggs' [patent_app_type] => new [patent_app_number] => 10/166919 [patent_app_country] => US [patent_app_date] => 2002-06-10 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 11 [patent_figures_cnt] => 11 [patent_no_of_words] => 5260 [patent_no_of_claims] => 39 [patent_no_of_ind_claims] => 5 [patent_words_short_claim] => 80 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0227/20030227613.pdf [firstpage_image] =>[orig_patent_app_number] => 10166919 [rel_patent_id] =>[rel_patent_doc_number] =>)

Array ( [id] => 6172468 [patent_doc_number] => 20020154296 [patent_country] => US [patent_kind] => A1 [patent_issue_date] => 2002-10-24 [patent_title] => 'Method and apparatus for scanning, stitching, and damping measurements of a double-sided metrology inspection tool' [patent_app_type] => new [patent_app_number] => 10/165344 [patent_app_country] => US [patent_app_date] => 2002-06-07 [patent_effective_date] => 0000-00-00 [patent_drawing_sheets_cnt] => 7 [patent_figures_cnt] => 7 [patent_no_of_words] => 6334 [patent_no_of_claims] => 20 [patent_no_of_ind_claims] => 4 [patent_words_short_claim] => 32 [patent_maintenance] => 1 [patent_no_of_assignments] => 0 [patent_current_assignee] =>[type] => publication [pdf_file] => publications/A1/0154/20020154296.pdf [firstpage_image] =>[orig_patent_app_number] => 10165344 [rel_patent_id] =>[rel_patent_doc_number] =>)