Carl Zeiss SMT GmbH v. NIKON CORPORATION > Summary
Court Case Number IPR2013-00362
Filing Date Jun 17, 2013
Institution Decision Date Dec 16, 2013
Decision Date Nov 4, 2014
Court Patent Trial and Appeal Board
Status FWD Entered
Administrative JudgesMatthew R. Clements, Howard B. Blankenship, Sally C. Medley
Judge Writing the Final DecisionMatthew R. Clements
Claims Challenged in the Petition: 1, 2, 3, 8, 9, 10, 11, 12, 16, 17, 18, 19, 20, 23, 24, 25, 26, 29, 30, 31, 32, 33
Claims Instituted: 1, 2, 3, 8, 9, 10, 11, 12, 16, 17, 18, 19, 20, 23, 24, 25, 26, 29, 30, 31, 32, 33
Claims Invalidated: 1, 2, 3, 8, 9, 10, 11, 12, 16, 17, 18, 19, 20, 23, 24, 25, 26, 29, 30, 31, 32, 33
Petitioner
Patent Owner
Petitioner Attorneys
4Carl Zeiss SMT GmbH
Attorney Name: Kurt L. Glitzenstein
Fish & Richardson
Carl Zeiss SMT GmbH
Attorney Name: Lawrence K. Kolodney
Fish & Richardson
Carl Zeiss SMT GmbH
Attorney Name: Christopher C. Bowley
Fish & Richardson
Carl Zeiss SMT GmbH
Attorney Name: Marc M. Wefers
Fish & Richardson
Patent Owner Attorneys
2Related Patents
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07348575 | Projection optical system, exposure apparatus, and exposure method | Mar 25, 2008 |