Date Field | Doc. No. | Party | Description |
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Sep 28, 2015 | 14 | board | Final Written Decision Download |
May 5, 2015 | 13 | patent_own | deposition notice Download |
Oct 23, 2014 | 12 | board | Decision - Granting Revised Motion for Joinder Download |
Oct 23, 2014 | 11 | board | Decision - Institution of Inter Partes Review Download |
Sep 26, 2014 | 10 | patent_own | Opposition to revised motions for joinder Download |
Sep 22, 2014 | 9 | petitioner | Petitioner's Revised Motion for Joinder Download |
Jul 24, 2014 | 8 | patent_own | preliminary response Download |
Jul 14, 2014 | 7 | patent_own | Patent owner's opposition to motion for joinder Download |
Jun 27, 2014 | 6 | petitioner | Petitioner's Motion for Joinder Download |
Jun 20, 2014 | 5 | potential_ | Related Matters Download |
Jun 20, 2014 | 4 | potential_ | Power of Attorney Download |
Jun 12, 2014 | 3 | board | Notice of Filing Date Accorded Download |
May 30, 2014 | 1017 | petitioner | 1017 - Claim Chart Wang in view of Lantsman and Mozgrin Download |
May 30, 2014 | 2 | petitioner | Power of Attorney Download |
May 30, 2014 | 1007 | petitioner | 1007 - Office Action 10-07-2003 Download |
May 30, 2014 | 1 | petitioner | Petition For Inter Partes Review Of U.S. Patent No. 6,853,142 Challenging Claims 1, 3-10, 12, 15, 17-20 And 42 Download |
May 30, 2014 | 1011 | petitioner | 1011 - Response for RCE 5-2-2006 Download |
May 30, 2014 | 1014 | petitioner | 1014 - European Patent Appln 1560943 Response 4-21-2008 Download |
May 30, 2014 | 1009 | petitioner | 1009 - Notice of Allowability 3-29-2004 Download |
May 30, 2014 | 1006 | petitioner | 1006 - Manos, Plasma Etching Download |
May 30, 2014 | 1005 | petitioner | 1005 - Wang USP 6413382 Download |
May 30, 2014 | 1002 | petitioner | 1002 - Kortshagen Declaration Download |
May 30, 2014 | 1004 | petitioner | 1004 - Lantsman USP 6190512 Download |
May 30, 2014 | 1010 | petitioner | 1010 - Chistyakov USP 7147759 Download |
May 30, 2014 | 1001 | petitioner | 1001 - Chistyakov USP 6853142 Download |
May 30, 2014 | 1015 | petitioner | 1015 - Claim Chart Mozgrin in view of Lantsman Download |
May 30, 2014 | 1016 | petitioner | 1016 - Claim Chart Wang in view of Lantsman Download |
May 30, 2014 | 1013 | petitioner | 1013 - Smith, Thin-Film Deposition Download |
May 30, 2014 | 1012 | petitioner | 1012 - Ohring, The Materials Science of Thin Films Download |
May 30, 2014 | 1008 | petitioner | 1008 - Response 3-8-2004 Download |
May 30, 2014 | 1003 | petitioner | 1003 - Mozgrin, High-Current Low-Pressure Download |