Date Field | Doc. No. | Party | Description |
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Sep 28, 2015 | 13 | board | Final Written Decision Download |
Oct 23, 2014 | 11 | board | Decision - Institution of Inter Partes Review Download |
Oct 23, 2014 | 12 | board | Decision - Granting Revised Motion for Joinder Download |
Sep 26, 2014 | 10 | patent_own | Opposition to revised motions for joinder Download |
Sep 22, 2014 | 9 | petitioner | Petitioner's Revised Motion for Joinder Download |
Jul 24, 2014 | 8 | patent_own | preliminary response Download |
Jul 14, 2014 | 7 | patent_own | Patent owner's opposition to motion for joinder Download |
Jun 27, 2014 | 6 | petitioner | Petitioner's Motion for Joinder Download |
Jun 20, 2014 | 4 | potential_ | Power of Attorney Download |
Jun 20, 2014 | 5 | potential_ | Related Matters Download |
Jun 12, 2014 | 3 | board | Notice of Filing Date Accorded Download |
May 30, 2014 | 1 | petitioner | Petition For Inter Partes Review Of U.S. Patent No. 6,853,142 Challenging Claims 22, 23, 25, 29, 30, 33-36, 39 And 43 Download |
May 30, 2014 | 1302 | petitioner | 1302 - Kortshagen Declaration Download |
May 30, 2014 | 1309 | petitioner | 1309 - European Patent Appln 1560943 Response 4-21-2008 Download |
May 30, 2014 | 1303 | petitioner | 1303 - Mozgrin, High-Current Low-Pressure Download |
May 30, 2014 | 2 | petitioner | Power of Attorney Download |
May 30, 2014 | 1311 | petitioner | 1311 - Response for RCE 5-2-2006 Download |
May 30, 2014 | 1307 | petitioner | 1307 - Response 3-8-2004 Download |
May 30, 2014 | 1308 | petitioner | 1308 - Notice of Allowability 3-29-2004 Download |
May 30, 2014 | 1312 | petitioner | 1312 - Manos, Plasma Etching Download |
May 30, 2014 | 1314 | petitioner | 1314 - Claim Chart Mozgrin in view of Kudryavtsev Download |
May 30, 2014 | 1315 | petitioner | 1315 - Claim Chart Wang in View of Kudryavtsev Download |
May 30, 2014 | 1310 | petitioner | 1310 - Chistyakov USP 7147759 Download |
May 30, 2014 | 1313 | petitioner | 1313 - Ohring, The Materials Science of Thin Films Download |
May 30, 2014 | 1301 | petitioner | 1301 - Chistyakov USP 6853142 Download |
May 30, 2014 | 1306 | petitioner | 1306 - Office Action 10-7-2003 Download |
May 30, 2014 | 1304 | petitioner | 1304 - Kudryavtsev, Ionization Relaxation Download |
May 30, 2014 | 1305 | petitioner | 1305 - Wang USP 6413382 Download |