Date Field | Doc. No. | Party | Description |
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Jun 6, 2022 | 1 | petitioner | IPR Petition, US 7,402,903 - IPR2022-01083 Download |
Jun 6, 2022 | 1001 | petitioner | Ex.1001 - US7402903 Download |
Jun 6, 2022 | 1002 | petitioner | Ex.1002 - US7402903 Prosecution History Download |
Jun 6, 2022 | 1003 | petitioner | Ex.1003 - Thompson Declaration - US 7,402,903 Download |
Jun 6, 2022 | 1004 | petitioner | Ex.1004 - Scott E. Thompson CV Download |
Jun 6, 2022 | 1005 | petitioner | Ex.1005 - US6633075 Download |
Jun 6, 2022 | 1006 | petitioner | Ex.1006 - Declaration of Dr. Hsieh Yee Download |
Jun 6, 2022 | 1007 | petitioner | Ex.1007 - Guyton - MIT Thesis, Sep. 2002 Download |
Jun 6, 2022 | 1008 | petitioner | Ex.1008 - Kofol - IEEE 1992 Download |
Jun 6, 2022 | 1009 | petitioner | Ex.1009 - US5387807 Download |
Jun 6, 2022 | 1010 | petitioner | Ex.1010 - US6071812 Download |
Jun 6, 2022 | 1011 | petitioner | Ex.1011 - Tuinhout IEEE - Measurement of Lithographical Proximity Effects Download |
Jun 6, 2022 | 1012 | petitioner | Ex.1012 - US6259901 Download |
Jun 6, 2022 | 1013 | petitioner | Ex.1013 - Asbeck - Buried Oxygen-Implanted Isolation Layers Download |
Jun 6, 2022 | 1014 | petitioner | Ex.1014 - US6127260 Download |
Jun 6, 2022 | 1015 | petitioner | Ex.1015 - US6285073 Download |
Jun 6, 2022 | 1016 | petitioner | Ex.1016 - US6943387 Download |
Jun 6, 2022 | 1017 | petitioner | Ex.1017 - US5970340 Download |
Jun 6, 2022 | 1018 | petitioner | Ex.1018 - US6607650 Download |
Jun 6, 2022 | 1019 | petitioner | Ex.1019 - US6689654 Download |
Jun 6, 2022 | 1020 | petitioner | Ex.1020 - US20020113288A1 Download |
Jun 6, 2022 | 1021 | petitioner | Ex.1021 - US5429957 Download |
Jun 6, 2022 | 1022 | petitioner | Ex.1022 - US5296394 Download |
Jun 6, 2022 | 1023 | petitioner | Ex.1023 - US6297128 Download |
Jun 6, 2022 | 1024 | petitioner | Ex.1024 - Westerheim - Integration of chemical vapor deposition TiN Download |
Jun 6, 2022 | 1025 | petitioner | Ex.1025 - US4889824 Download |
Jun 6, 2022 | 1026 | petitioner | Ex.1026 - Ren AIP Implant isolation of GaAs-AlGaAs Download |
Jun 6, 2022 | 1027 | petitioner | Ex.1027 - US5019524 Download |
Jun 6, 2022 | 1028 | petitioner | Ex.1028 - EP0621641A2 Download |
Jun 6, 2022 | 1029 | petitioner | Ex.1029 - US4876218 Download |
Jun 6, 2022 | 1030 | petitioner | Ex.1030 - US6580133 Download |
Jun 6, 2022 | 1031 | petitioner | Ex.1031 - US4997786 Download |
Jun 6, 2022 | 1032 | petitioner | Ex.1032 - US6498057 Download |
Jun 6, 2022 | 1033 | petitioner | Ex.1033 - US5889306 Download |
Jun 6, 2022 | 1034 | petitioner | Ex.1034 - Yasushi - JP2000-156494A certified translation Download |
Jun 6, 2022 | 1035 | petitioner | Ex.1035 - JP2000-156494(A) Download |
Jun 6, 2022 | 1036 | petitioner | Ex.1036 - US6127716 Download |
Jun 6, 2022 | 1037 | petitioner | Ex.1037 - Baker - CMOS Circuit Design, Layout, and Simulation Download |
Jun 6, 2022 | 1038 | petitioner | Ex.1038 - US6737302 Download |
Jun 6, 2022 | 1039 | petitioner | Ex.1039 - Electric Circuits Fundamentals Download |
Jun 6, 2022 | 1040 | petitioner | Ex.1040 - US5838047 Download |
Jun 6, 2022 | 1041 | petitioner | Ex.1041 - Film definition - Dictionary glossary Quirk and Serda Download |
Jun 6, 2022 | 1042 | petitioner | Ex.1042 - US5063113 Download |
Jun 6, 2022 | 1043 | petitioner | Ex.1043 - US6130458 Download |
Jun 6, 2022 | 1044 | petitioner | Ex.1044 - US6246094 Download |
Jun 6, 2022 | 1045 | petitioner | Ex.1045 - 1994 National Technology Roadmap for Semiconductors Download |
Jun 6, 2022 | 1046 | petitioner | Ex.1046 - US6803643 Download |
Jun 6, 2022 | 1047 | petitioner | Ex.1047 - National technology roadmaps - IEEE - Oct1995 Download |
Jun 6, 2022 | 1048 | petitioner | Ex.1048 - Natl Techn Roadmap for Semiconductors - Microelectronic Eng - 1996 Download |
Jun 6, 2022 | 1049 | petitioner | Download |
Jun 6, 2022 | 1050 | petitioner | Ex.1050 - US6337644 Download |
Jun 6, 2022 | 1051 | petitioner | Ex.1051 - US5151378 Download |
Jun 6, 2022 | 1052 | petitioner | Ex.1052 - 1997 National Technology Roadmap for Semiconductors Download |
Jun 6, 2022 | 1053 | petitioner | Ex.1053 - Design of GaAs - and InP-Based HBT - Juntao Hu Dissertation - U of Michigan - 1991 Download |
Jun 6, 2022 | 1054 | petitioner | Ex.1054 - US6483147 Download |
Jun 6, 2022 | 1055 | petitioner | Ex.1055 - US5191405 Download |
Jun 6, 2022 | 1056 | petitioner | Ex.1056 - Monte Carlo Study of Phonon Transport in Solid Thin Films - J. Heat Transfer - 2001 Download |
Jun 6, 2022 | 1057 | petitioner | Ex.1057 - US6498372 Download |
Jun 6, 2022 | 1058 | petitioner | Ex.1058 - Asheghi - Thermal Conduction in doped single-crystal silicon films - Apr2002 Download |
Jun 6, 2022 | 1059 | petitioner | Ex.1059 - 2002-vol06-iss-2-intel-technology-journal Download |
Jun 6, 2022 | 2 | petitioner | Petitioner's Power of Attorney for '903 Patent - IPR2022-01083 Download |
Jun 10, 2022 | 3 | board | NOTICE OF FILING DATE ACCORDED TO PETITION AND TIME FOR FILING PATENT OWNER PRELIMINARY RESPONSE Download |
Jun 30, 2022 | 4 | patent_own | Patent Owner's Power of Attorney Download |
Jun 30, 2022 | 5 | patent_own | Patent Owner's Mandatory Notice Download |
Sep 12, 2022 | 2001 | patent_own | EX2001 Download |
Sep 12, 2022 | 2002 | patent_own | EX2002 Download |
Sep 12, 2022 | 2003 | patent_own | EX2003 Download |
Sep 12, 2022 | 2004 | patent_own | EX2004 Download |
Sep 12, 2022 | 6 | patent_own | POPR Download |
Dec 6, 2022 | 7 | board | Institution Decision: Denying Institution of Inter Partes Review 35 U.S.C. sec. 314 Download |
Mar 13, 2023 | 8 | petitioner | Petitioners' Request for Refund - IPR2022-01083 Download |
Mar 16, 2023 | 9 | board | Notice: refund approved Download |