Date Field | Doc. No. | Party | Description |
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Mar 25, 2022 | 1 | petitioner | Petitioner's Power of Attorney - IPR2022-00763 Download |
Mar 25, 2022 | 1001 | petitioner | Ex.1001 - US6291861 Download |
Mar 25, 2022 | 1002 | petitioner | Ex.1002 - US6291861 Prosecution History Download |
Mar 25, 2022 | 1003 | petitioner | Ex.1003 - Declaration of Dr. Jack C. Lee US 6,291,861 Patent Download |
Mar 25, 2022 | 1004 | petitioner | Ex.1004 - CV of Dr. Jack C. Lee Download |
Mar 25, 2022 | 1005 | petitioner | Ex.1005 - JPH0374848A - Certified Translation Download |
Mar 25, 2022 | 1006 | petitioner | Ex.1006 - JPH0374848A - Orig Doc Download |
Mar 25, 2022 | 1007 | petitioner | Ex.1007 - US5723379 - Watanabe Download |
Mar 25, 2022 | 1008 | petitioner | Ex.1008 - Horiuchi 1975 -- diffusion in polysilicon Download |
Mar 25, 2022 | 1010 | petitioner | Ex.1010 - JPH0327533A - Certified Translation Download |
Mar 25, 2022 | 1011 | petitioner | Ex.1011 - JPH0327533A - Orig Doc Download |
Mar 25, 2022 | 1012 | petitioner | Ex.1012 - JPH05218406A - Certified Translation Download |
Mar 25, 2022 | 1013 | petitioner | Ex.1013 - JPH05218406A - Orig Doc Download |
Mar 25, 2022 | 1014 | petitioner | Ex.1014 - JPH03268436A - Certified Translation Download |
Mar 25, 2022 | 1015 | petitioner | Ex.1015 - JPH03268436A - Orig Doc Download |
Mar 25, 2022 | 1016 | petitioner | Ex.1016 - US5994190 - Hashimoto Download |
Mar 25, 2022 | 1017 | petitioner | Ex.1017 - Natl Techn Roadmaps - IEEE - Oct1995 Download |
Mar 25, 2022 | 1018 | petitioner | Ex.1018 - Kamins - Journal of Applied Physics 1972 Download |
Mar 25, 2022 | 1019 | petitioner | Ex.1019 - Wolf - Silicon Processing - Vol. 1, Process Techn Download |
Mar 25, 2022 | 1020 | petitioner | Ex.1020 - US5084419 - Sakao Download |
Mar 25, 2022 | 1021 | petitioner | Ex.1021 - US5970340 - Edgar Download |
Mar 25, 2022 | 1022 | petitioner | Ex.1022 - US4160987 - Dennard Download |
Mar 25, 2022 | 1023 | petitioner | Ex.1023 - US6285073 - Cooper Download |
Mar 25, 2022 | 1024 | petitioner | Ex.1024 - Natl Techn Roadmap - Microelectronic Eng - 1996 30 11-15 Download |
Mar 25, 2022 | 1025 | petitioner | Ex.1025 - Selected pages of 1994 Natl Techn Roadmap Download |
Mar 25, 2022 | 1026 | petitioner | Ex.1026 - Copyright Record of 1994 Natl Techn Roadmap Download |
Mar 25, 2022 | 1027 | petitioner | Ex.1027 - Selected Pages of 1997 Natl Techn Roadmap Download |
Mar 25, 2022 | 1028 | petitioner | Ex.1028 - Copyright Record of 1997 Natl Techn Roadmap Download |
Mar 25, 2022 | 2 | petitioner | IPR Petition, US 6,291,861 - IPR2022-00763 Download |
Apr 26, 2022 | 3 | board | Notice: Notice filing date accorded Download |
Jun 30, 2022 | 4 | patent_own | Patent Owner's Mandatory Notice Download |
Jun 30, 2022 | 5 | patent_own | Patent Owner's Power of Attorney Download |
Jul 26, 2022 | 2001 | patent_own | EX2001 Download |
Jul 26, 2022 | 6 | patent_own | Patent Owner's Preliminary Response Download |
Oct 7, 2022 | 7 | board | Institution Decision: Deny Download |
Mar 13, 2023 | 8 | petitioner | Petitioners' Request for Refund - IPR2022-00763 Download |
Mar 16, 2023 | 9 | board | Notice: refund approved Download |