Date Field | Doc. No. | Party | Description |
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Mar 7, 2016 | 43 | patent_owner | PO Notice of Appeal Download |
Feb 29, 2016 | 42 | petitioner | Petitioners (652) Updated Mandatory Notice Download |
Jan 5, 2016 | 41 | board | Final Written Decision Download |
Nov 3, 2015 | 40 | board | Record of Oral Hearing Download |
Aug 12, 2015 | 38 | patent_owner | Power of Attorney Download |
Aug 12, 2015 | 39 | patent_owner | Patent Owner's Updated Mandatory Notices Download |
Aug 10, 2015 | 35 | patent_owner | Patent Owner's Updated Exhibit List Download |
Aug 10, 2015 | 36 | petitioner | 652 Petitioner Demonstratives (IPR2014-01088) Download |
Aug 10, 2015 | 37 | petitioner | 652 CORRECTED Petitioner Demonstratives (IPR2014-01088) Download |
Aug 10, 2015 | 2005 | patent_owner | Ex. 2005 PO Demonstrative Exhibits Download |
Jul 30, 2015 | 34 | petitioner | 652 Response to Motion for Observations (IPR2014-01088) Download |
Jul 23, 2015 | 33 | board | Order Trial Hearing Download |
Jul 20, 2015 | 32 | patent_owner | Patent Owner's Motion for Observations Download |
Jul 20, 2015 | 2003 | patent_owner | Ex. 2003 Kortshagen Deposition 7-2-15 Download |
Jul 17, 2015 | 31 | patent_owner | Patent Owner's request for Oral Hearing Download |
Jul 10, 2015 | 30 | petitioner | 652-IPR2014-01088 Petitioner Request for Oral Argument Download |
Jun 26, 2015 | 1020 | petitioner | Ex. 1020 - Supplemental Kortshagen Declaration Download |
Jun 26, 2015 | 1021 | petitioner | Ex. 1021 - Deposition Transcript of Larry D. Hartsough Ph.D. for U.S. Patent No. 6,806,652 dated May 15, 2015 Download |
Jun 26, 2015 | 29 | petitioner | 652 Patent Reply Brief (IPR2014-01088) Download |
Mar 23, 2015 | 28 | patent_owner | Patent Owner's Response to Petition Download |
Mar 23, 2015 | 2002 | patent_owner | Ex. 2002 Declaration of Dr. Hartsough Download |
Mar 18, 2015 | 27 | board | Decision Motion to Designate Lead Petitioner and Amend Scheduling Order Download |
Mar 16, 2015 | 26 | petitioner | Motion to Designate Lead Petitioner and to Amend Scheduling Order Download |
Mar 2, 2015 | 25 | board | DECISION Motions for Pro Hac Vice Admission of Granovsky Download |
Mar 1, 2015 | 24 | patent_owner | PO Updated Mandatory Notices Download |
Feb 27, 2015 | 23 | patent_owner | NOTICE OF STIPULATION TO EXTEND DUE DATES Download |
Feb 26, 2015 | 22 | patent_owner | Notice of Deposition of Dr. Kortshagen Download |
Feb 24, 2015 | 2001 | patent_owner | Ex. 2001 Affidavit of Maria Granovsky Download |
Feb 24, 2015 | 21 | patent_owner | PO Motion PHV re Maria Granovsky Download |
Feb 2, 2015 | 20 | board | Order Conduct of the Proceeding Download |
Jan 29, 2015 | 19 | petitioner | Notice to Extend Due Dates Download |
Jan 6, 2015 | 16 | board | Decision - Institution of Inter Partes Review 37 C.F.R. 42.108 Download |
Jan 6, 2015 | 18 | board | Scheduling Order Download |
Jan 6, 2015 | 17 | board | Decision - Motion for Joinder 37 C.F.R. 42.122 Download |
Dec 3, 2014 | 15 | board | Decision - Motions for Pro Hac Vice Admission of Mr. Brett C. Rismiller Download |
Nov 21, 2014 | 14 | petitioner | Motion for PHV Admission of Brett C. Rismiller Download |
Nov 21, 2014 | 1019 | petitioner | Rismiller Declaration ISO Motion for PHV Admission of Brett C Rismiller Download |
Nov 19, 2014 | 12 | board | Decision Motion to Withdraw Download |
Nov 19, 2014 | 13 | potential_po | Power of Attorney Download |
Nov 3, 2014 | 11 | patent_owner | Motion to withdraw Download |
Oct 7, 2014 | 10 | patent_owner | Preliminary response Download |
Sep 2, 2014 | 9 | patent_owner | Opposition to joinder Download |
Aug 18, 2014 | 8 | petitioner | Petitioner Motion for Joinder Under 35 U.S.C. Section 315(c) and 37 C.F.R. Section 42.22 and Section 42.122(b) Download |
Jul 25, 2014 | 7 | potential_po | Related Matters Download |
Jul 25, 2014 | 6 | potential_po | Power of Attorney Download |
Jul 22, 2014 | 5 | board | Notice of Accepting Corrected Petition Download |
Jul 11, 2014 | 1004 | petitioner | Revised-U.S. Pat. No. 6,413,382 Download |
Jul 11, 2014 | 1002 | petitioner | Revised-Kortshagen Declaration Download |
Jul 11, 2014 | 4 | petitioner | '652 Revised Petition - Claims 1-17 - 1642930-0008-IPR2 Download |
Jul 11, 2014 | 1014 | petitioner | Revised-Clarenbach, Time-dependent gas density and temperature measurements in pulsed helicon discharges in argon, Plasma Sources Sci. Technol. 12 (2003) 345-357 Download |
Jul 11, 2014 | 1013 | petitioner | Revised-Lantsman, U.S. Pat. No. 6,190,512 Download |
Jul 11, 2014 | 1008 | petitioner | Revised-Vratny, U.S. Pat No. 3,461,054 Download |
Jul 11, 2014 | 1013 | petitioner | Revised-Lantsman, U.S. Pat. No. 6,190,512 Download |
Jul 11, 2014 | 1010 | petitioner | Revised-J. Hopwood and J. Asmussen, Neutral gas temperatures in a multipolar electron cyclotron resonance plasma, Appl. Phys. Let. 58 (22), 2473-2475 (1991) Download |
Jul 11, 2014 | 1012 | petitioner | Revised-U.S. Patent No. 7,147,759 Download |
Jul 11, 2014 | 1012 | petitioner | Revised-U.S. Patent No. 7,147,759 Download |
Jul 11, 2014 | 1004 | petitioner | Revised-U.S. Pat. No. 6,413,382 Download |
Jul 11, 2014 | 1018 | petitioner | Revised-List of Related Litigations Download |
Jul 11, 2014 | 1011 | petitioner | Revised-G. A. Hebner, Spatially resolved, excited state densities and neutral and ion temperatures in inductively coupled argon plasmas, J. Appl. Physics, 80 (5), 2624- 2636 (1996) Download |
Jul 11, 2014 | 1011 | petitioner | Revised-G. A. Hebner, Spatially resolved, excited state densities and neutral and ion temperatures in inductively coupled argon plasmas, J. Appl. Physics, 80 (5), 2624- 2636 (1996) Download |
Jul 11, 2014 | 1002 | petitioner | Revised-Kortshagen Declaration Download |
Jul 11, 2014 | 1009 | petitioner | Revised-Röepcke et al., Comparison of Optical Emission Spectrometric Measurements of the Concentration and Energy of Species in Low-pressure Microwave and Radiofrequency Plasma Sources, J. Analytical Atomic Spectrometry, Sept 1993, Vol. 8, pp. 803-808 Download |
Jul 11, 2014 | 1014 | petitioner | Revised-Clarenbach, Time-dependent gas density and temperature measurements in pulsed helicon discharges in argon, Plasma Sources Sci. Technol. 12 (2003) 345-357 Download |
Jul 11, 2014 | 1018 | petitioner | Revised-List of Related Litigations Download |
Jul 11, 2014 | 1010 | petitioner | Revised-J. Hopwood and J. Asmussen, Neutral gas temperatures in a multipolar electron cyclotron resonance plasma, Appl. Phys. Let. 58 (22), 2473-2475 (1991) Download |
Jul 11, 2014 | 1008 | petitioner | Revised-Vratny, U.S. Pat No. 3,461,054 Download |
Jul 11, 2014 | 1009 | petitioner | Revised-Röepcke et al., Comparison of Optical Emission Spectrometric Measurements of the Concentration and Energy of Species in Low-pressure Microwave and Radiofrequency Plasma Sources, J. Analytical Atomic Spectrometry, Sept 1993, Vol. 8, pp. 803-808 Download |
Jul 11, 2014 | 1009 | petitioner | Revised-Röepcke et al., Comparison of Optical Emission Spectrometric Measurements of the Concentration and Energy of Species in Low-pressure Microwave and Radiofrequency Plasma Sources, J. Analytical Atomic Spectrometry, Sept 1993, Vol. 8, pp. 803-808 Download |
Jul 11, 2014 | 1001 | petitioner | Revised-U.S. Patent No. 6,806,652 Download |
Jul 11, 2014 | 1003 | petitioner | Revised-D.V. Mozgrin, et al, High-Current Low-Pressure Quasi-Stationary Discharge in a Magnetic Field Experimental Research, Plasma Physics Reports, Vol. 21, No. 5, 1995 Download |
Jul 11, 2014 | 1005 | petitioner | Revised-D. W. Fahey, et al., High flux beam source of thermal rare-gas metastable atoms, J. Phys. E Sci. Insrum., Vol. 13, 1980 Download |
Jul 11, 2014 | 1006 | petitioner | Revised-A. A. Kudryavtsev and V.N. Skerbov, Ionization relaxation in a plasma produced by a pulsed inert-gas discharge, Sov. Phys. Tech. Phys. 28(1), pp. 30-35, January 1983 Download |
Jul 11, 2014 | 1007 | petitioner | Revised-Iwamura, U.S. Pat. No. 5,753,886 Download |
Jul 11, 2014 | 1015 | petitioner | Revised-Plaintiff Zond LLCs Preliminary Proposed Claim Constructions, Civil Action No. 13-cv-11634-WGY Download |
Jul 11, 2014 | 1016 | petitioner | Revised-The Materials Science of Thin Films, by Ohring M., Academic Press (1992) Download |
Jul 11, 2014 | 1017 | petitioner | Revised-Thin-Film Deposition Principles and Practice by Smith, D.L., McGraw Hill (1995) Download |
Jul 7, 2014 | 3 | board | Notice of Filing Date Accorded to Petition Download |
Jul 1, 2014 | 1017 | petitioner | Thin-Film Deposition Principles and Practice by Smith, D.L., McGraw Hill (1995) Download |
Jul 1, 2014 | 1001 | petitioner | U.S. Patent No. 6,806,652 Download |
Jul 1, 2014 | 1016 | petitioner | The Materials Science of Thin Films, by Ohring M., Academic Press (1992) Download |
Jul 1, 2014 | 1017 | petitioner | Thin-Film Deposition Principles and Practice by Smith, D.L., McGraw Hill (1995) Download |
Jul 1, 2014 | 1003 | petitioner | D.V. Mozgrin, et al, High-Current Low-Pressure Quasi-Stationary Discharge in a Magnetic Field Experimental Research, Plasma Physics Reports, Vol. 21, No. 5, 1995 Download |
Jul 1, 2014 | 1015 | petitioner | Plaintiff Zond LLCs Preliminary Proposed Claim Constructions, Civil Action No. 13-cv-11634-WGY Download |
Jul 1, 2014 | 1007 | petitioner | Iwamura, U.S. Pat. No. 5,753,886 Download |
Jul 1, 2014 | 1016 | petitioner | The Materials Science of Thin Films, by Ohring M., Academic Press (1992) Download |
Jul 1, 2014 | 1006 | petitioner | A. A. Kudryavtsev and V.N. Skerbov, Ionization relaxation in a plasma produced by a pulsed inert-gas discharge, Sov. Phys. Tech. Phys. 28(1), pp. 30-35, January 1983 Download |
Jul 1, 2014 | 2 | petitioner | '652 Petition - Claims 1-17, 1642930-0008 IPR2 Download |
Jul 1, 2014 | 1007 | petitioner | Iwamura, U.S. Pat. No. 5,753,886 Download |
Jul 1, 2014 | 1005 | petitioner | D. W. Fahey, et al., High flux beam source of thermal rare-gas metastable atoms, J. Phys. E, Sci. Insrum., Vol. 13, Download |
Jul 1, 2014 | 1003 | petitioner | D.V. Mozgrin, et al, High-Current Low-Pressure Quasi-Stationary Discharge in a Magnetic Field Experimental Research, Plasma Physics Reports, Vol. 21, No. 5, 1995 Download |
Jul 1, 2014 | 1015 | petitioner | Plaintiff Zond LLCs Preliminary Proposed Claim Constructions, Civil Action No. 13-cv-11634-WGY Download |
Jul 1, 2014 | 1001 | petitioner | U.S. Patent No. 6,806,652 Download |
Jul 1, 2014 | 1 | petitioner | Power of Attorney Download |
Jul 1, 2014 | 1005 | petitioner | D. W. Fahey, et al., High flux beam source of thermal rare-gas metastable atoms, J. Phys. E, Sci. Insrum., Vol. 13, Download |
Jul 1, 2014 | 1006 | petitioner | A. A. Kudryavtsev and V.N. Skerbov, Ionization relaxation in a plasma produced by a pulsed inert-gas discharge, Sov. Phys. Tech. Phys. 28(1), pp. 30-35, January 1983 Download |
Jul 1, 2014 | 1002 | petitioner | Kortshagen Declaration Download |
Jul 1, 2014 | 1004 | petitioner | U.S. Pat. No. 6,413,382 Download |
Jul 1, 2014 | 1008 | petitioner | Vratny, U.S. Pat No. 3,461,054 Download |
Jul 1, 2014 | 1009 | petitioner | Download |
Jul 1, 2014 | 1010 | petitioner | J. Hopwood and J. Asmussen, Neutral gas temperatures in a multipolar electron cyclotron resonance plasma, Appl. Phys. Let. 58 (22), 2473-2475 (1991) Download |
Jul 1, 2014 | 1011 | petitioner | G. A. Hebner, Spatially resolved, excited state densities and neutral and ion temperatures in inductively coupled argon plasmas, J. Appl. Physics, 80 (5), 2624- 2636 (1996) Download |
Jul 1, 2014 | 1012 | petitioner | U.S. Patent No. 7,147,759 Download |
Jul 1, 2014 | 1013 | petitioner | Lantsman, U.S. Pat. No. 6,190,512 Download |
Jul 1, 2014 | 1014 | petitioner | Clarenbach, Time-dependent gas density and temperature measurements in pulsed helicon discharges in argon, Plasma Sources Sci. Technol. 12 (2003) 345-357 Download |
Jul 1, 2014 | 1018 | petitioner | List of Related Litigations Download |