Date Field | Doc. No. | Party | Description |
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Apr 21, 2020 | 34 | | Petitioner Intel Corp. Updated Mandatory Notice Download |
Apr 3, 2019 | 33 | | Patent Owner Notice of Appeal Download |
Jan 31, 2019 | 32 | | Termination Decision Document Download |
May 29, 2018 | 31 | | Petitioner Micron's Updated Mandatory Notices Download |
Apr 23, 2018 | 30 | | Hearing Transcript Download |
Mar 9, 2018 | 29 | | Order - Granting Patent Owner's Motion to Enter the Curriculum Vitae of Daniel L. Flamm, Sc.D. - 37 CFR 42.5 Download |
Mar 6, 2018 | 27 | | Motion to Submit CV Download |
Mar 6, 2018 | 28 | | Patent Owner Exhibit List Download |
Mar 6, 2018 | 2003 | | Flamm CV Download |
Mar 5, 2018 | 1029 | | Ex1029 - Intel Demonstratives Download |
Mar 5, 2018 | 26 | | Petitioners' Updated Exhibit List Download |
Mar 1, 2018 | 25 | | PO Power of Attorney Download |
Mar 1, 2018 | 24 | | PO Mandatory Notice Download |
Mar 1, 2018 | 23 | | ORDER Granting Patent Owner's Motion to Withdraw and Substitute Counsel Download |
Feb 28, 2018 | 22 | | Motion for Withdrawal and Substitution of Counsel Download |
Feb 16, 2018 | 21 | | Order Granting Patent Owner's Motion for Pro Hac Vice Admission Download |
Feb 14, 2018 | 20 | | Motion for PHV Admission of Rolf Stadheim Download |
Feb 14, 2018 | 2002 | | Stadheim Declaration in Support of PHV Motion Download |
Feb 7, 2018 | 19 | | Order Trial Hearing Download |
Feb 1, 2018 | 17 | | Patent Owner's Request for Oral Argument Download |
Feb 1, 2018 | 18 | | Petitioners' Request for Oral Argument Download |
Dec 26, 2017 | 16 | | Mandatory Notice Download |
Dec 26, 2017 | 15 | | Power of Attorney Download |
Dec 20, 2017 | 1024 | | Ex1024 - IPR2016-00352, Paper 25 Download |
Dec 20, 2017 | 1026 | | Ex1026 - IPR2016-00469, Paper 5 Download |
Dec 20, 2017 | 14 | | Petitioners' Reply to Patent Owner's Response Download |
Dec 20, 2017 | 1025 | | Ex1025 - IPR2015-00560, Paper 21 Download |
Dec 20, 2017 | 1028 | | Ex1028 - IPR2014-00529, Paper 8 Download |
Dec 20, 2017 | 1027 | | Ex1027 - IPR2016-00906, Paper 79 Download |
Dec 20, 2017 | 1023 | | Ex1023 - Bravman Declaration Download |
Sep 20, 2017 | 2001 | | Flamm Declaration in Support of Response Download |
Sep 20, 2017 | 13 | | Patent Owner's Response Download |
Sep 15, 2017 | 12 | | Decision Granting Motion for Joinder Download |
Aug 8, 2017 | 11 | | Notice of Joint Stipulation to Modify Due Dates 1-5 Download |
Jun 13, 2017 | 9 | | Trial Instituted Document Download |
Jun 13, 2017 | 10 | | Scheduling Order Download |
Mar 14, 2017 | 8 | | PATENT OWNER'S PRELIMINARY RESPONSE Download |
Feb 21, 2017 | 7 | | Petitioners¿¿¿ Motions for Admission Pro Hac Vice of
Jared Bobrow and Chad S. Campbell Download |
Jan 23, 2017 | 6 | | Patent Owner Mandatory Notice Download |
Jan 20, 2017 | 4 | | Petitioner Motion for Pro Hac Vice Admission of Jared Bobrow Download |
Jan 20, 2017 | 1022 | | Ex1022 - Affidavit of Chad S. Campbell in Support of Petitioner Pro Hac Vice Motion Download |
Jan 20, 2017 | 5 | | Petitioner Motion for Pro Hac Vice Admission of Chad S. Campbell Download |
Jan 20, 2017 | 1021 | | Ex1021 - Affidavit of Jared Bobrow in Support of Petitioner Pro Hac Vice Motion Download |
Dec 14, 2016 | 3 | | Notice of Accord Filing Date Download |
Dec 2, 2016 | 1002 | | Ex. 1002 - U.S. Patent 5,605,600 (Muller) Download |
Dec 2, 2016 | 1007 | | Ex. 1007 - U.S. Patent Application No. 08/567,224 (224 application) Download |
Dec 2, 2016 | 1020 | | Ex. 1020 - Declaration of Rachel J. Watters regarding Exhibit 1011 Download |
Dec 2, 2016 | 1005 | | Ex. 1005 - U.S. Patent 6,063,710 (Kadomura) Download |
Dec 2, 2016 | 1009 | | Ex. 1009 - U.S. Patent No. 5,711,849 (849 patent) Download |
Dec 2, 2016 | 1011 | | Ex. 1011 - Fischl, Etching of Tungsten and Tungsten Silicide Films by Chlorine Atoms (Fischl) Download |
Dec 2, 2016 | 2 | | Petition for Inter Partes Review Download |
Dec 2, 2016 | 1 | | Power of Attorney Download |
Dec 2, 2016 | 1016 | | Ex. 1016 - IPR2015-01768, Paper 1 Download |
Dec 2, 2016 | 1013 | | Ex. 1013 - U.S. Patent No. 5,393,374 (Sato) Download |
Dec 2, 2016 | 1003 | | Ex. 1003 - U.S. Patent 5,151,871 (Matsumura) Download |
Dec 2, 2016 | 1014 | | Ex. 1014 - IPR2016-00469, Paper 6 Download |
Dec 2, 2016 | 1004 | | Ex. 1004 - U.S. Patent 5,226,056 (Kikuchi) Download |
Dec 2, 2016 | 1017 | | Ex. 1017 - U.S. Patent No. 5,242,536 (Schoenborn) Download |
Dec 2, 2016 | 1008 | | Ex. 1008 - Wright, A Closed Loop Temperature Control System for a Low-Temperature Etch Chuck (Wright) Download |
Dec 2, 2016 | 1018 | | Ex. 1018 - U.S. Patent No. 5,174,856 (Hwang) Download |
Dec 2, 2016 | 1010 | | Ex. 1010 - U.S. Patent No. 4,992,391 (Wang) Download |
Dec 2, 2016 | 1015 | | Ex. 1015 - IPR2015-01768, Paper 7 Download |
Dec 2, 2016 | 1012 | | Ex. 1012 - U.S. Patent No. 4,331,485 (Gat) Download |
Dec 2, 2016 | 1001 | | Ex. 1001 - U.S. Patent No. RE40,264 (264 patent) Download |
Dec 2, 2016 | 1006 | | Ex. 1006 - Declaration of Dr. John Bravman Download |
Dec 2, 2016 | 1019 | | Ex. 1019 - Declaration of Rachel J. Watters regarding Exhibit 1008 Download |