Date Field | Doc. No. | Party | Description |
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Oct 22, 2019 | 1 | | Petition for Inter Partes Review Download |
Oct 22, 2019 | 2 | | Petitioner's Power of Attorney Download |
Oct 23, 2019 | 3 | | Petitioner's Notice of Supplemental Service of Petition Download |
Oct 29, 2019 | 4 | | Notice of Accord Filing Date Download |
Nov 13, 2019 | 5 | | Patent Owner's Mandatory Notices Download |
Nov 13, 2019 | 6 | | Patent Owner's Power of Attorney (Hanwha) Download |
Jan 29, 2020 | 7 | | Patent Owner Preliminary Response Download |
Jan 29, 2020 | 8 | | Patent Owner's Power of Attorney Download |
Jan 29, 2020 | 9 | | Patent Owner's Updated Mandatory Notices Download |
Feb 10, 2020 | 10 | | Order - Conduct of the Proceeding - 37 CFR 42.5 Download |
Feb 18, 2020 | 11 | | Petitioner's Reply to Patent Owner's Preliminary Response Download |
Feb 21, 2020 | 12 | | Patent Owner Updated Mandatory Notices Download |
Feb 25, 2020 | 13 | | ORDER
Conduct of the Proceeding Download |
Mar 4, 2020 | 14 | | Patent Owner's Preliminary Sur-Reply in Response to Petitioner's Preliminary Reply Download |
Apr 23, 2020 | 15 | | Patent Owner's Motion to Withdraw and Substitute Counsel Download |
Apr 23, 2020 | 16 | | Patent Owner's Power of Attorney Download |
Apr 23, 2020 | 17 | | Patent Owner's Updated Mandatory Disclosures Download |
Apr 27, 2020 | 18 | | Trial Instituted Document Download |
May 8, 2020 | 19 | | Request for Refund of Post-Institution Fees for Inter Partes Review Download |
May 14, 2020 | 20 | | Notice of Refund Download |
Oct 22, 2019 | 1001 | | U.S. Patent No. 9,893,215 Download |
Oct 22, 2019 | 1002 | | Original File History of 215 Patent (Part II) Download |
Oct 22, 2019 | 1002 | | Original File History of 215 Patent (Part II) Download |
Oct 22, 2019 | 1002 | | Original File History of 215 Patent (Part II) Download |
Oct 22, 2019 | 1002 | | Original File History of 215 Patent (Part IV) Download |
Oct 22, 2019 | 1002 | | Original File History of 215 Patent (Part I) Download |
Oct 22, 2019 | 1002 | | Original File History of 215 Patent (Part III) Download |
Oct 22, 2019 | 1002 | | Original File History of 215 Patent (Part II) Download |
Oct 22, 2019 | 1003 | | Declaration of Dr. Sanjay Banerjee Download |
Oct 22, 2019 | 1004 | | Curriculum Vitae of Dr. Sanjay Banerjee Download |
Oct 22, 2019 | 1005 | | U.S. Patent Application Publication No. 2006/0102972 Download |
Oct 22, 2019 | 1007 | | Hoex, Bram, et al. Ultralow surface recombination of c-Si substrates passivated by plasma-assisted atomic layer deposited Al2O3 Download |
Oct 22, 2019 | 1008 | | Duerinckx, F., and J. Szlufcik. Defect passivation of industrial multicrystalline solar cells based on PECVD silicon nitride Download |
Oct 22, 2019 | 1009 | | Hoex, B., et al. Industrial high rate (5 nm/s) deposited silicon nitride yielding high quality bulk and surface passivation under optimum anti reflection coating conditions Download |
Oct 22, 2019 | 1010 | | Aiken, Peter. Microsoft Computer Dictionary 2002 Download |
Oct 22, 2019 | 1011 | | Freedman, A. The Computer Glossary: The Complete Illustrated Dictionary Download |
Oct 22, 2019 | 1012 | | U.S. Patent No. 5,428,244 Download |
Oct 22, 2019 | 1013 | | Schmidt, Jan, et al. Surface passivation of silicon solar cells using plasma-enhanced chemical vapour deposited SiN films and thin thermal SiO2 plasma SiN stacks Download |
Oct 22, 2019 | 1014 | | Pierson, Hugh O. Handbook of chemical vapor deposition: principles, technology and applications Download |
Oct 22, 2019 | 1015 | | Hezel, R. Silicon nitride for the improvement of silicon inversion layer solar cells Download |
Oct 22, 2019 | 1016 | | Agostinelli, G., et al. Rear surface passivation for industrial solar cells on thin substrates Download |
Oct 22, 2019 | 1017 | | Soppe, Wim et al. Bulk and surface passivation of silicon solar cells accomplished by silicon nitride deposited on industrial scale by microwave PECVD Download |
Oct 22, 2019 | 1018 | | Hofstetter, J., et al. Optimisation of SiNx: H anti-reflection coatings for silicon solar cells Download |
Oct 22, 2019 | 1019 | | Yadavalli, Kameshwar K., et al. Aluminum oxide tunnel barriers for single electron memory devices Download |
Oct 22, 2019 | 1020 | | U.S. Patent No. 6,630,413 Download |
Oct 22, 2019 | 1021 | | Hsieh, S. W., et al. Properties of plasma enhanced chemical vapor deposited a SiN x: H by various dilution gases Download |
Oct 22, 2019 | 1022 | | Kolodzey, James, et al. Electrical conduction and dielectric breakdown in aluminum oxide insulators on silicon Download |
Oct 22, 2019 | 1023 | | Kerr, M. J., et al. Surface recombination velocity of phosphorus diffused silicon solar cell emitters passivated with plasma enhanced chemical vapor deposited silicon nitride and thermal silicon oxide. Download |
Oct 22, 2019 | 1024 | | Dauwe, Stefan. Low-temperature surface passivation of crystalline silicon and its application to the rear side of solar cells Download |
Oct 22, 2019 | 1025 | | U.S. Patent No. 5,270,248 Download |
Oct 22, 2019 | 1026 | | Razavy, Mohsen. Quantum theory of tunneling Download |
Oct 22, 2019 | 1030 | | Jaehyun Kim et al., Growth and Characterization of Hf-Silicate/ Al2O3 Gate Stacks Grown on Si(100) by Self-Limiting Atomic Layer Deposition Download |
Oct 22, 2019 | 1035 | | Complainant Notice of Priority Date, In re Certain Photovoltaic Cells Download |
Oct 22, 2019 | 1036 | | Declaration of James L. Mullins, Ph.D Download |
Oct 22, 2019 | 1039 | | Cuevas, Andres, Mark J. Kerr, and Jan Schmidt. Passivation of crystalline silicon using silicon nitride Download |
Oct 22, 2019 | 1040 | | U.S. Patent No. 4,058,430 to Suntola et al. Download |
Oct 22, 2019 | 1041 | | Higashi, G. S., and C. G. Fleming. Sequential surface chemical reaction limited growth of high quality Al2O3 dielectrics Download |
Oct 22, 2019 | 1042 | | Jeong, Chang-Wook, Jang-Sik Lee, and Seung-Ki Joo. Plasma-assisted atomic layer growth of high-quality aluminum oxide thin films Download |
Oct 22, 2019 | 1043 | | Ritala, Mikko, and Markku Leskel. Atomic layer deposition Download |
Oct 22, 2019 | 1044 | | Van Hemmen, J. L., et al. Plasma and Thermal ALD of Al2O3 in a Commercial 200 mm ALD Reactor Download |
Oct 22, 2019 | 1045 | | Ritala, Mikko, et al. Atomic layer deposition of oxide thin films with metal alkoxides as oxygen sources Download |
Oct 22, 2019 | 1046 | | B.J. Jones and R.C. Barklie J. Phys. D: Appl. Phys. 38 Download |
Oct 22, 2019 | 1048 | | Park, Dae-Gyu, et al. Characteristics of n+ polycrystalline Si Al 2 O 3 Si metal oxide semiconductor structures prepared by atomic layer chemical vapor deposition using Al (CH 3) 3 and H 2 O vapor Download |
Oct 22, 2019 | 1049 | | U.S. Patent No. 6,828,218 to Kim et al. Download |
Oct 22, 2019 | 1050 | | Groner et al., Low Temperature Al2O3 Atomic Layer Deposition Download |
Oct 22, 2019 | 1051 | | Heil, S. B. S., et al. Deposition of TiN and Hf O 2 in a commercial 200 mm remote plasma atomic layer deposition reactor Download |
Oct 22, 2019 | 1052 | | Gusev, Evgeni P., et al. High resolution depth profiling in ultrathin Al 2 O 3 films on Si Download |
Oct 22, 2019 | 1053 | | Cai, Li, and Ajeet Rohatgi. Effect of post-PECVD photo-assisted anneal on multicrystalline silicon solar cells Download |
Oct 22, 2019 | 1054 | | Schmidt, Jan, Mark Kerr, and Andres Cuevas. Surface passivation of silicon solar cells using plasma enhanced chemical vapour deposited SiN films and thin thermal SiO2/plasma SiN stacks Download |
Oct 22, 2019 | 1055 | | Wright, Daniel N., Erik S. Marstein, and Arve Holt. Double layer anti-reflective coatings for silicon solar cells Download |
Oct 22, 2019 | 1057 | | Rohatgi, A., et al. Comprehensive study of rapid, low-cost silicon surface passivation technologies Download |
Oct 22, 2019 | 1058 | | U.S. Patent No. 4,253,881 to Hezel Download |
Oct 22, 2019 | 1059 | | Streetman, Ben G., and Sanjay Banerjee. Solid state electronic devices (Part II) Download |
Oct 22, 2019 | 1059 | | Streetman, Ben G., and Sanjay Banerjee. Solid state electronic devices (Part I) Download |
Oct 22, 2019 | 1059 | | Streetman, Ben G., and Sanjay Banerjee. Solid state electronic devices (Part III) Download |
Oct 22, 2019 | 1059 | | Streetman, Ben G., and Sanjay Banerjee. Solid state electronic devices (Part III) Download |
Oct 22, 2019 | 1059 | | Streetman, Ben G., and Sanjay Banerjee. Solid state electronic devices (Part III) Download |
Oct 22, 2019 | 1060 | | Second Declaration of Jim Mullins Download |
Oct 22, 2019 | 1061 | | U.S. Patent No. 9,548,405 to Engelhart et al. Download |
Oct 22, 2019 | 1062 | | Excerpt from Expert Report of Dr. Michael S. Lebby, 337-TA-1151 Download |
Oct 22, 2019 | 1063 | | Wilk, G.D. et al. High K gate dielectrics: Current status and materials properties considerations Download |
Oct 22, 2019 | 1064 | | Order Constructing Certain Terms of the Asserted Claims of the Patents at Issue (Markman Claim Construction), 337-TA-1151 Download |
Oct 22, 2019 | 1066 | | Hezel, R. and Jaeger, K. Low Temperature Surface Passivation of Silicon for Solar Cells Download |
Oct 22, 2019 | 1067 | | Shewchun, John et al. MIS and SIS Solar Cells Download |
Oct 22, 2019 | 1068 | | Ng, Kwok K. and Card, Howard C. A Comparison of Majority- and Minority-Carrier Silicon MIS Solar Cells Download |
Oct 22, 2019 | 1069 | | Kuhlmann, Burkhard, et al. Simulation and Optimization of Metal-Insulator-Semiconductor Inversion-Layer Silicon Solar Cells Download |
Oct 22, 2019 | 1070 | | Sarehraz, Mohammad et al. Rectenna developments for solar energy collection Download |
Jan 29, 2020 | 2001 | | Ex. 2001 Banerjee deposition rough transcript Download |
Jan 29, 2020 | 2002 | | Ex. 2002 IPR2019-01072 PO Preliminary Response Download |
Jan 29, 2020 | 2003 | | Ex. 2003 ITC Respondents' Notice of Prior Art Download |
Jan 29, 2020 | 2004 | | Ex. 2004 IPR2019-01072 Petition Download |
Jan 29, 2020 | 2005 | | Ex. 2005 Hoex 2007 Download |
Feb 10, 2020 | 3001 | | Ex. 3001 Download |