Lam Research Corporation v. Daniel L. Flamm > Summary
Court Case Number IPR2016-00466
Filing Date Jan 14, 2016
Court Patent Trial and Appeal Board
Status Institution Denied
Administrative JudgesChristopher L. Crumbley, Donna M. Praiss, Jo-Anne M. Kokoski
Judge Writing the Final DecisionJo-Anne M. Kokoski
Claims Challenged in the Petition: 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29
Petitioner
Patent Owner
Petitioner Attorneys
4Lam Research
Attorney Name: Kamran Vakili
Irell & Manella LLP
Lam Research
Attorney Name: Samuel K. Lu
Irell & Manella LLP
Lam Research
Attorney Name: Michael R. Fleming
Irell & Manella LLP
Attorney Name: Susan M. Langworthy
Patent Owner Attorneys
4Daniel L Flamm
Attorney Name: Christopher J. Frerking
Independent Attorney
Daniel L Flamm
Attorney Name: Christopher J. Frerking
Independent Attorney
Attorney Name: George C. Summerfield
Stadheim & Grear
Attorney Name: Daniel L. Flamm
Related Patents
| Doc No | Title | Issue date |
|---|---|---|
| 05711849 | Process optimization in gas phase dry etching | Jan 27, 1998 |
