Date Field | Doc. No. | Party | Description |
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Mar 7, 2016 | 9 | board | Notice of Refund Download |
Mar 3, 2016 | 8 | petitioner | Request for Refund Download |
Feb 24, 2016 | 7 | board | Decision Denying Institution of Inter Partes Review Download |
Nov 25, 2015 | 2004 | patent_owner | US 20010003676 Download |
Nov 25, 2015 | 6 | patent_owner | Patent Owner Preliminary Response Download |
Nov 25, 2015 | 2002 | patent_owner | US 5,320,982 Tsubone Download |
Nov 25, 2015 | 2001 | patent_owner | US 5,294,778 Carman Download |
Nov 25, 2015 | 2003 | patent_owner | US 5,939,831 Fong Download |
Sep 25, 2015 | 4 | patent_owner | Patent Owner Mandatory Notice Download |
Sep 25, 2015 | 5 | patent_owner | Power of Attorney Download |
Aug 27, 2015 | 3 | board | Notice of Filing Date Accorded to Petition Download |
Aug 18, 2015 | 1007 | petitioner | Ex 1007 Collins-EP App 93309608.3 Download |
Aug 18, 2015 | 1004 | petitioner | Ex 1004 Narita-US4913790 Download |
Aug 18, 2015 | 1009 | petitioner | Ex 1009 Cecchi Declaration Download |
Aug 18, 2015 | 1002 | petitioner | Ex 1002 Tegal-EP App 90304724.9 Download |
Aug 18, 2015 | 1012 | petitioner | Ex 1012 Elements of Physics Download |
Aug 18, 2015 | 1011 | petitioner | Ex 1011 Cecchi CV Download |
Aug 18, 2015 | 1015 | petitioner | Ex 1015 Journal of Vacuum Science Download |
Aug 18, 2015 | 1 | petitioner | Petition 1 - RE40,264 Download |
Aug 18, 2015 | 1003 | petitioner | Ex 1003 Matsumura-US5151871 Download |
Aug 18, 2015 | 2 | petitioner | Power of Attorney Download |
Aug 18, 2015 | 1010 | petitioner | Ex 1010 American Heritage Dictionary Download |
Aug 18, 2015 | 1006 | petitioner | Ex 1006 Hwang-US5174856 Download |
Aug 18, 2015 | 1001 | petitioner | Ex 1001 RE40,264 Patent Download |
Aug 18, 2015 | 1013 | petitioner | Ex 1013 264 FH-Applicant Response 7-25-05 Download |
Aug 18, 2015 | 1014 | petitioner | Ex 1014 Plasma Etching Book Download |
Aug 18, 2015 | 1008 | petitioner | Ex 1008 Mahawili-US5059770 Download |
Aug 18, 2015 | 1005 | petitioner | Ex 1005 Thomas-US4680086 Download |