Date Field | Doc. No. | Party | Description |
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Dec 15, 2016 | 3001 | | Exhibit 3001 Download |
Dec 15, 2016 | 25 | | Termination Settlement after Institution Download |
Dec 6, 2016 | 24 | | JOINT MOTION TO TERMINATE PROCEEDING IN VIEW OF SETTLEMENT PURSUANT TO 35 U.S.C. ¿¿317(a) Download |
Dec 1, 2016 | 23 | | Record of Oral Hearing Download |
Oct 6, 2016 | 1020 | | Ex 1020 Petitioner's Demonstrative Exhibits (Graphics) Download |
Oct 6, 2016 | 22 | | Petitioner's Updated Exhibit List Download |
Oct 6, 2016 | 1019 | | Ex 1019 Petitioner's Demonstrative Exhibits (Slides) Download |
Sep 26, 2016 | 21 | | Related Matters Download |
Sep 10, 2016 | 20 | | Order - Trial Hearing Download |
Aug 16, 2016 | 19 | | Request for Oral Hearing Download |
Aug 11, 2016 | 18 | | Notice of Deposition of Dr. Joseph L. Cecchi Download |
Jul 28, 2016 | 1018 | | Cecchi Declaration Download |
Jul 28, 2016 | 17 | | Petitioner's Reply Download |
Jul 25, 2016 | 16 | | Order - Patent Owner's Pro Hac Vice Motions Download |
Jul 19, 2016 | 2008 | | Declaration of GCS ISO Motion for PHV Download |
Jul 19, 2016 | 15 | | Patent Owner Unopposed Motion for PHV Admission of GCS Download |
Jul 18, 2016 | 14 | | Patent Owner Unopposed Motion for PHV Admission of RSpalding Download |
Jul 18, 2016 | 2007 | | Declaration of RSpalding ISO Motion for PHV Download |
May 17, 2016 | 13 | board | Petitiner's Motions for Admission Pro Hac Vice of Morgan Chu and Talin Gordnia Download |
May 16, 2016 | 2005 | patent_owner | PTAB Decision_IPR-01759 Download |
May 16, 2016 | 2006 | patent_owner | PTAB Decision_IPR-01766 Download |
May 16, 2016 | 12 | patent_owner | Patent Owner Response Fourth Petition Download |
May 9, 2016 | 1017 | petitioner | Ex 1017 Gordnia PHV Declaration Download |
May 9, 2016 | 11 | petitioner | Gordnia PHV Motion Download |
May 9, 2016 | 1016 | petitioner | Ex 1016 Chu PHV Declaration Download |
May 9, 2016 | 10 | petitioner | Chu PHV Motion Download |
Apr 28, 2016 | 9 | petitioner | Joint Stip to Modify Dates 1 - 2 Download |
Feb 24, 2016 | 8 | board | Scheduling Order Download |
Feb 24, 2016 | 7 | board | Decision - Institution of Inter Partes Review Download |
Nov 25, 2015 | 6 | patent_owner | Patent Owner Preliminary Response Download |
Nov 25, 2015 | 2004 | patent_owner | US 20010003676 Download |
Nov 25, 2015 | 2001 | patent_owner | US 5,294,778 Carman Download |
Nov 25, 2015 | 2002 | patent_owner | US 5,320,982 Tsubone Download |
Nov 25, 2015 | 2003 | patent_owner | US 5,939,831 Fong Download |
Sep 25, 2015 | 4 | patent_owner | Patent Owner Mandatory Notice Download |
Sep 25, 2015 | 5 | patent_owner | Power of Attorney Download |
Aug 25, 2015 | 3 | board | NOTICE OF FILING DATE ACCORDED TO PETITION Download |
Aug 18, 2015 | 1015 | petitioner | Ex 1015 Plasma Etching Technology Download |
Aug 18, 2015 | 1003 | petitioner | Ex 1003 Matsumura-US5151871 Download |
Aug 18, 2015 | 2 | petitioner | Power of Attorney Download |
Aug 18, 2015 | 1008 | petitioner | Ex 1008 Wang-US4992391 Download |
Aug 18, 2015 | 1007 | petitioner | Ex 1007 Etching of Tungsten Download |
Aug 18, 2015 | 1006 | petitioner | Ex 1006 Wang-US5219485 Download |
Aug 18, 2015 | 1 | petitioner | Petition 4 - RE40264 Download |
Aug 18, 2015 | 1011 | petitioner | Ex 1011 American Heritage Dictionary Download |
Aug 18, 2015 | 1002 | petitioner | Ex 1002 Tegal EP 90304724.9 Download |
Aug 18, 2015 | 1012 | petitioner | Ex 1012 Webster's Dictionary Download |
Aug 18, 2015 | 1013 | petitioner | Ex 1013 Ooshio-US4645218 Download |
Aug 18, 2015 | 1014 | petitioner | Ex 1014 Cecchi CV Download |
Aug 18, 2015 | 1010 | petitioner | Ex 1010 Cecchi Declaration Download |
Aug 18, 2015 | 1004 | petitioner | Ex 1004 Narita-US4913790 Download |
Aug 18, 2015 | 1009 | petitioner | Ex 1009 Hwang-US5174856 Download |
Aug 18, 2015 | 1001 | petitioner | Ex 1001 RE40264 Patent Download |
Aug 18, 2015 | 1005 | petitioner | Ex 1005 Thomas-US4680086 Download |