Date Field | Doc. No. | Party | Description |
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Aug 24, 2017 | 65 | | Petitioners' Notice of Appeal Download |
Jun 23, 2017 | 64 | | Final Written Decision Download |
May 12, 2017 | 63 | | Record of Oral Hearing Download |
Mar 15, 2017 | 62 | | Revised Trial Order Download |
Mar 7, 2017 | 61 | | Order - Trial Hearing Download |
Feb 24, 2017 | 60 | | Petitioner's Request for Oral Argument Download |
Feb 24, 2017 | 59 | | Patent Owner's Request for Oral Hearing Download |
Feb 13, 2017 | 58 | | Patent Owner's Objection to Evidence Download |
Feb 6, 2017 | 57 | | Petitioner's Reply to Patent Owner's Response Download |
Feb 6, 2017 | 1081 | | Alexander David Glew, Plasma Deposition of Diamond-Like Carbon and Fluorinated Amorphouse Carbon and the Resultant Properties and Structure (Dec. 2002), UMI No. 3085291 Download |
Feb 6, 2017 | 1084 | | Wang et al., Characteristics of CMOS Devices Fabricated Using High Quality Thin PECVD Gate Oxide, IEDM ¿¿¿89:463-466 (Dec. 1989) Download |
Feb 6, 2017 | 1085 | | Milton Ohring, The Materials Science of Thin Films, pp. 355-402 (Academic Press 1992) Download |
Feb 6, 2017 | 1088 | | Schubert, P.J., and Neudeck, G.W., Confined Lateral Selective Epitaxial Growth of Silicon for Device Fabrication, IEEE Electronic Devices Letters 11(5):181-183 (May 1990) Download |
Feb 6, 2017 | 1090 | | Guldi, R.L., Source/Drain Dislocations and Electrical Leakage in Titanium-Salicided CMOS Integrated Circuits¿¿¿ J. Electrochem. Soc. 141(7):1957-1963 (July 1994) Download |
Feb 6, 2017 | 1087 | | U.S. Patent No. 4,717,448 to Cox, issued January 5, 1988 Download |
Feb 6, 2017 | 1080 | | U.S. Patent No. 6,204,174 to Glew et al., issued March 20, 2001 Download |
Feb 6, 2017 | 1089 | | U.S. Patent No. 7,485,571 to Leedy, issued February 3, 2009 Download |
Feb 6, 2017 | 1086 | | U.S. Patent No. 8,907,499 to Leedy, issued December 9, 2014 Download |
Feb 6, 2017 | 1082 | | Deposition Transcript of Alexander D. Glew, Ph.D. (January 20, 2017) Download |
Feb 6, 2017 | 1083 | | Chanana, et al., Effect of Annealing and Plasma Precleaning on the Electrical Properties of N2/SiH4 PECVD Oxide as Gate Material in Mosfets and CCDs, Solid State Electronics, 36(7):1021-1026 (1993) Download |
Dec 19, 2016 | 56 | | Notice of Second Joint Stipulation to Adjust Schedule Download |
Dec 19, 2016 | 55 | | Notice of Deposition of Dr. Alexander D. Glew Download |
Dec 9, 2016 | 2162 | | MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) (Part 4) Download |
Dec 9, 2016 | 2168 | | Prosecution History of U.S. Application 12/497,652 ¿¿¿ Office Action mailed on May 20, 2014 Download |
Dec 9, 2016 | 2163 | | Silicon dioxide - Wikipedia. Download |
Dec 9, 2016 | 2162 | | MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) (Part 4) Download |
Dec 9, 2016 | 2164 | | Transcript of Deposition of Paul D. Franzon, Ph.D. ¿¿¿ October 6, 2016 Download |
Dec 9, 2016 | 2162 | | MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) (Part 4) Download |
Dec 9, 2016 | 2162 | | MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) (Part 4) Download |
Dec 9, 2016 | 2159 | | W. R. RUNYAN & K. E. BEAN, SEMICONDUCTOR INTEGRATED CIRCUIT PROCESSING TECHNOLOGY (1990) (Part 1) Download |
Dec 9, 2016 | 2169 | | HANDBOOK SEMICONDUCTOR MANUFACTURING TECHNOLOGY (Robert Doering & Yoshio Nishi eds., 2nd ed. 2008) Download |
Dec 9, 2016 | 2159 | | W. R. RUNYAN & K. E. BEAN, SEMICONDUCTOR INTEGRATED CIRCUIT PROCESSING TECHNOLOGY (1990) (Part 1) Download |
Dec 9, 2016 | 2158 | | PETER VAN ZANT, MICROCHIP FABRICATION (4th ed., 2000) Download |
Dec 9, 2016 | 2162 | | MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) (Part 4) Download |
Dec 9, 2016 | 2160 | | SILICON NITRIDE AND SILICON DIOXIDE THIN INSULATING FILMS (M.J. Dean, et al. eds., 1997) Download |
Dec 9, 2016 | 2146 | | STANLEY WOLF, SILICON PROCESSING FOR THE VLSI ERA - VOLUME 2: PROCESS INTEGRATION (1990) Download |
Dec 9, 2016 | 2159 | | W. R. RUNYAN & K. E. BEAN, SEMICONDUCTOR INTEGRATED CIRCUIT PROCESSING TECHNOLOGY (1990) (Part 2) Download |
Dec 9, 2016 | 2162 | | MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) (Part 5) Download |
Dec 9, 2016 | 2162 | | MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) (Part 3) Download |
Dec 9, 2016 | 2162 | | MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) (Part 1) Download |
Dec 9, 2016 | 2162 | | MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) (Part 2) Download |
Dec 9, 2016 | 2165 | | Flexible and Substantial excerpts from the Oxford American Dictionary of Current English (1999) Download |
Dec 9, 2016 | 2166 | | Declaration of Alexander D. Glew, PH.D. Download |
Dec 9, 2016 | 2167 | | Download |
Oct 25, 2016 | 54 | | Petitioner's Updated Mandatory Notices Download |
Oct 21, 2016 | 53 | | Petitioner's Objections to Patent Owner's Evidence Download |
Oct 15, 2016 | 2165 | | Exhibit 2165 Download |
Oct 15, 2016 | 2166 | | Exhibit 2166 Download |
Oct 15, 2016 | 2167 | | Exhibit 2167 Download |
Oct 15, 2016 | 2162 | | Exhibit 2162 (Part 3) Download |
Oct 15, 2016 | 2162 | | Exhibit 2162 (Part 5) Download |
Oct 15, 2016 | 2162 | | Exhibit 2162 (Part 4) Download |
Oct 15, 2016 | 2163 | | Exhibit 2163 Download |
Oct 15, 2016 | 2164 | | Exhibit 2164 Download |
Oct 15, 2016 | 2168 | | Exhibit 2168 Download |
Oct 15, 2016 | 2169 | | Exhibit 2169 Download |
Oct 15, 2016 | 52 | | Patent Owner's Updated Exhibit List Download |
Oct 14, 2016 | 2146 | | Exhibit 2146 Download |
Oct 14, 2016 | 2158 | | Exhibit 2158 Download |
Oct 14, 2016 | 2159 | | Exhibit 2159 (Part 1) Download |
Oct 14, 2016 | 2159 | | Exhibit 2159 (Part 2) Download |
Oct 14, 2016 | 2160 | | Exhibit 2160 Download |
Oct 14, 2016 | 2162 | | Exhibit 2162 (Part 1) Download |
Oct 14, 2016 | 2162 | | Exhibit 2162 (Part 2) Download |
Oct 14, 2016 | 50 | | Patent Owner's Response Download |
Oct 14, 2016 | 51 | | Patent Owner's Response Download |
Oct 4, 2016 | 49 | | Order - Petitioner's Pro Hac Vice Motion for Mr. Andrew B. Grossman Download |
Oct 4, 2016 | 48 | | Order - Petitioner's Motion for Pro Hac Vice Admission of Mr. Harold Davis Download |
Sep 30, 2016 | 46 | | Petitioner's Motion for Admission Pro Hac Vice of Harold H. Davis, Jr. Download |
Sep 30, 2016 | 44 | | Power of Attorney for Petitioner Samsung Electronics Co., Ltd. Download |
Sep 30, 2016 | 42 | | Power of Attorney for Petitioner SK Hynix Inc. Download |
Sep 30, 2016 | 45 | | Petitioner's Motion for Admission Pro Hac Vice of Andrew B. Grossman Download |
Sep 30, 2016 | 47 | | Petitioner¿¿¿s Updated Exhibit List Download |
Sep 30, 2016 | 43 | | Power of Attorney for Petitioner Micron Technology, Inc. Download |
Sep 30, 2016 | 1078 | | Ex. 1078 Download |
Sep 30, 2016 | 1077 | | Ex. 1077 Download |
Sep 26, 2016 | 41 | | Patent Owner's Updated Mandatory Notices Download |
Sep 20, 2016 | 40 | | Decision - Patent Owner's Mot. Pro Hac Vice Admis. Mr. Michael C. Newman Download |
Sep 20, 2016 | 39 | | Decision - Patent Owner's Motion for Withdrawal and Substitution of Counsel Download |
Sep 16, 2016 | 36 | | Amended Notice of Deposition of Dr. Paul D. Franzon Download |
Sep 16, 2016 | 37 | | Patent Owner's Updated Exhibit List Download |
Sep 16, 2016 | 38 | | Patent Owners Motion for Withdrawal and Substitution of Counsel Download |
Sep 15, 2016 | 35 | | Notice of Joint Stipulation to Adjust Schedule Download |
Sep 13, 2016 | 34 | | Unopposed Motion for Pro Hac Vice Admission of Michael C. Newman Download |
Sep 13, 2016 | 2157 | | Exhibit 2157 - Declaration of Michael C. Newman in Support of PHV Download |
Sep 7, 2016 | 32 | | Patent Owners Power of Attorney Download |
Sep 7, 2016 | 33 | | Patent Owners Supplemental Mandatory Notices Download |
Sep 6, 2016 | 31 | | Notice of Deposition Download |
Aug 25, 2016 | 30 | | Petitioner's Updated Exhibit List Download |
Aug 25, 2016 | 29 | | Petitioner's Updated Mandatory Notices Download |
Aug 25, 2016 | 1068 | | Exhibit 1068 Download |
Aug 22, 2016 | 28 | | Petitioner's Updated Exhibit LIst Download |
Aug 22, 2016 | 1067 | | Exhibit 1067 Download |
Aug 11, 2016 | 27 | | Decision - 37 C.F.R. 42.20 Download |
Aug 8, 2016 | 25 | | Summary of Conference Call Download |
Aug 8, 2016 | 26 | | Revised Scheduling Order Download |
Jul 27, 2016 | 24 | | Petitioner's Response to Patent Owner's Motion Regarding Claim Construction Download |
Jul 19, 2016 | 23 | | Notice Correcting Certificate of Service Download |
Jul 18, 2016 | 2144 | | Exhibit 2150 Download |
Jul 18, 2016 | 21 | | Patent Owner Elm Motion Regarding Claim Construction Download |
Jul 18, 2016 | 22 | | Notice of Patent Expiration Download |
Jul 15, 2016 | 19 | | Petitioner's Objections to Patent Owner's Evidence Download |
Jul 15, 2016 | 20 | | Patent Owners Objections To Petitioners Evidence Download |
Jul 8, 2016 | 18 | petitioner | Petitioner's Updated Mandatory Notices Download |
Jul 1, 2016 | 17 | board | Order- Conduct of the Proceeding Download |
Jul 1, 2016 | 16 | board | Order - Patent Owners Motion for Pro Hac Vice Admission of Samuel L. Walling Download |
Jul 1, 2016 | 15 | board | Scheduling Order Download |
Jun 30, 2016 | 3001 | board | Exhibit Download |
Jun 30, 2016 | 14 | board | Decision - Institution of Inter Partes Review - 37 C.F.R. 42.108 Download |
May 6, 2016 | 13 | patent_owner | Elm 3DS Innovations LLC's Motion for Pro Hac Vice Admission of Samuel L. Walling and Declaration of Samuel L. Walling in Support of Motion Download |
May 5, 2016 | 12 | patent_owner | Power of Attorney Download |
Apr 5, 2016 | 2116 | patent_owner | Ex. 2116 Download |
Apr 5, 2016 | 2121 | patent_owner | Ex. 2121 Download |
Apr 5, 2016 | 2117 | patent_owner | Ex. 2117 Download |
Apr 5, 2016 | 2104 | patent_owner | Ex. 2104 Download |
Apr 5, 2016 | 2109 | patent_owner | Ex. 2109 Download |
Apr 5, 2016 | 2143 | patent_owner | Ex. 2143 Download |
Apr 5, 2016 | 2135 | patent_owner | Ex. 2135 Download |
Apr 5, 2016 | 2134 | patent_owner | Ex. 2134 Download |
Apr 5, 2016 | 2131 | patent_owner | Ex. 2131 Download |
Apr 5, 2016 | 2125 | patent_owner | Ex. 2125 Download |
Apr 5, 2016 | 2123 | patent_owner | Ex. 2123 Download |
Apr 5, 2016 | 2137 | patent_owner | Ex. 2137 Download |
Apr 5, 2016 | 2103 | patent_owner | Ex. 2103 Download |
Apr 5, 2016 | 2108 | patent_owner | Ex. 2108 Download |
Apr 5, 2016 | 2115 | patent_owner | Ex. 2115 Download |
Apr 5, 2016 | 2107 | patent_owner | Ex. 2107 Download |
Apr 5, 2016 | 2127 | patent_owner | Ex. 2127 Download |
Apr 5, 2016 | 2106 | patent_owner | Ex. 2106 Download |
Apr 5, 2016 | 2119 | patent_owner | Ex. 2119 Download |
Apr 5, 2016 | 2120 | patent_owner | Ex. 2120 Download |
Apr 5, 2016 | 2136 | patent_owner | Ex. 2136 Download |
Apr 5, 2016 | 2100 | patent_owner | Ex. 2100 Download |
Apr 5, 2016 | 2133 | patent_owner | Ex. 2133 Download |
Apr 5, 2016 | 2105 | patent_owner | Ex. 2105 Download |
Apr 5, 2016 | 2102 | patent_owner | Ex. 2102 Download |
Apr 5, 2016 | 11 | patent_owner | Preliminary Patent Owner Response Download |
Apr 5, 2016 | 2118 | patent_owner | Ex. 2118 Download |
Apr 5, 2016 | 2132 | patent_owner | Ex. 2132 Download |
Apr 5, 2016 | 2101 | patent_owner | Ex. 2101 Download |
Apr 5, 2016 | 2122 | patent_owner | Ex. 2122 Download |
Jan 19, 2016 | 9 | potential_po | Power of Attorney Download |
Jan 19, 2016 | 10 | potential_po | Related Matters Download |
Jan 12, 2016 | 8 | board | Notice of Accepting Corrected Petition Download |
Jan 11, 2016 | 6 | petitioner | Petitioner's Response to Notice of Filing Date Download |
Jan 11, 2016 | 7 | petitioner | Petitioner's Corrected Exhibit List Download |
Jan 6, 2016 | 5 | board | Notice of Filing Date Accorded to Petition Download |
Dec 28, 2015 | 4 | petitioner | Petition for Inter Partes Review of U.S. Patent No. 8,410,617 Download |
Dec 28, 2015 | 3 | petitioner | Power of Attorney Download |
Dec 28, 2015 | 1041 | petitioner | 1041 Download |
Dec 28, 2015 | 1052 | petitioner | 1052 Download |
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Dec 28, 2015 | 1002 | petitioner | 1002 Download |
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Dec 28, 2015 | 1036 | petitioner | 1036 Download |
Dec 28, 2015 | 1053 | petitioner | 1053 Download |
Dec 28, 2015 | 2 | petitioner | Power of Attorney Download |
Dec 28, 2015 | 1007 | petitioner | 1007 Download |
Dec 28, 2015 | 1055 | petitioner | 1055 Download |
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Dec 28, 2015 | 1 | petitioner | Power of Attorney Download |
Dec 28, 2015 | 1029 | petitioner | 1029 Download |