Date Field | Doc. No. | Party | Description |
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Mar 17, 2016 | 1022 | petitioner | Ex. 1022 Download |
Mar 17, 2016 | 1053 | petitioner | Ex. 1053 Download |
Mar 17, 2016 | 1002 | petitioner | Ex. 1002 Download |
Mar 17, 2016 | 1052 | petitioner | Ex. 1052 Download |
Mar 17, 2016 | 1039 | petitioner | Ex. 1039 Download |
Mar 17, 2016 | 1029 | petitioner | Ex. 1029 Download |
Mar 17, 2016 | 1050 | petitioner | Ex. 1050 Download |
Mar 17, 2016 | 1043 | petitioner | Ex. 1043 Download |
Mar 17, 2016 | 1020 | petitioner | Ex. 1020 Download |
Mar 17, 2016 | 1031 | petitioner | Ex. 1031 Download |
Mar 17, 2016 | 1058 | petitioner | Ex. 1058 Download |
Mar 17, 2016 | 1040 | petitioner | Ex. 1040 Download |
Mar 17, 2016 | 1001 | petitioner | Ex. 1001 Download |
Mar 17, 2016 | 1041 | petitioner | Ex. 1041 Download |
Mar 17, 2016 | 1018 | petitioner | Ex. 1018 Download |
Mar 17, 2016 | 1005 | petitioner | Ex. 1005 Download |
Mar 17, 2016 | 1049 | petitioner | Ex. 1049 Download |
Mar 17, 2016 | 1 | petitioner | Power of Attorney Download |
Mar 17, 2016 | 1030 | petitioner | Ex. 1030 Download |
Mar 17, 2016 | 1016 | petitioner | Ex. 1016 Download |
Mar 17, 2016 | 1008 | petitioner | Ex. 1008 Download |
Mar 17, 2016 | 3 | petitioner | Power of Attorney Download |
Mar 17, 2016 | 1023 | petitioner | Ex. 1023 Download |
Mar 17, 2016 | 1033 | petitioner | Ex. 1033 Download |
Mar 17, 2016 | 1025 | petitioner | Ex. 1025 Download |
Mar 17, 2016 | 1006 | petitioner | Ex. 1006 Download |
Mar 17, 2016 | 1011 | petitioner | Ex. 1011 Download |
Mar 17, 2016 | 1055 | petitioner | Ex. 1055 Download |
Mar 17, 2016 | 1057 | petitioner | Ex. 1057 Download |
Mar 17, 2016 | 1051 | petitioner | Ex. 1051 Download |
Mar 17, 2016 | 1032 | petitioner | Ex. 1032 Download |
Mar 17, 2016 | 1003 | petitioner | Ex. 1003 Download |
Mar 17, 2016 | 1007 | petitioner | Ex. 1007 Download |
Mar 17, 2016 | 1042 | petitioner | Ex. 1042 Download |
Mar 17, 2016 | 4 | petitioner | Petition Download |
Mar 17, 2016 | 1026 | petitioner | Ex. 1026 Download |
Mar 17, 2016 | 1028 | petitioner | Ex. 1028 Download |
Mar 17, 2016 | 2 | petitioner | Power of Attorney Download |
Mar 17, 2016 | 1044 | petitioner | Ex. 1044 Download |
Mar 17, 2016 | 1024 | petitioner | Ex. 1024 Download |
Mar 17, 2016 | 1046 | petitioner | Ex. 1046 Download |
Mar 17, 2016 | 1054 | petitioner | Ex. 1054 Download |
Mar 17, 2016 | 1035 | petitioner | Ex. 1035 Download |
Mar 17, 2016 | 1036 | petitioner | Ex. 1036 Download |
Mar 17, 2016 | 1056 | petitioner | Ex. 1056 Download |
Mar 17, 2016 | 1004 | petitioner | Ex. 1004 Download |
Mar 17, 2016 | 1045 | petitioner | Ex. 1045 Download |
Mar 17, 2016 | 1048 | petitioner | Ex. 1048 Download |
Mar 17, 2016 | 1021 | petitioner | Ex. 1021 Download |
Mar 17, 2016 | 1059 | petitioner | Ex. 1059 Download |
Mar 17, 2016 | 1047 | petitioner | Ex. 1047 Download |
Mar 17, 2016 | 1019 | petitioner | Ex. 1019 Download |
Mar 17, 2016 | 1034 | petitioner | Ex. 1034 Download |
Mar 25, 2016 | 6 | potential_po | Related Matters Download |
Mar 25, 2016 | 5 | potential_po | Power of Attorney Download |
Mar 30, 2016 | 7 | board | Notice of Filing Date Accorded to Petition-Defective Petition Download |
Mar 31, 2016 | 8 | petitioner | Petitioner's Response to Notice of Filing Date Download |
Mar 31, 2016 | 9 | petitioner | Petitioner's Corrected Exhibit List Download |
May 5, 2016 | 10 | patent_owner | Power of Attorney Download |
May 6, 2016 | 11 | patent_owner | Elm 3DS Innovations LLC's Motion for Pro Hac Vice Admission of Samuel L. Walling and Declaration of Samuel L. Walling in Support of Motion Download |
May 20, 2016 | 12 | board | Notice of Accepting Corrected Petition Download |
Jun 30, 2016 | 2147 | patent_owner | Ex. 2147 Download |
Jun 30, 2016 | 2136 | patent_owner | Ex. 2136 Download |
Jun 30, 2016 | 2135 | patent_owner | Ex. 2135 Download |
Jun 30, 2016 | 2146 | patent_owner | Ex. 2146 Download |
Jun 30, 2016 | 2133 | patent_owner | Ex. 2133 Download |
Jun 30, 2016 | 13 | patent_owner | Patent Owner Preliminary Response Download |
Jun 30, 2016 | 2137 | patent_owner | Ex. 2137 Download |
Jul 1, 2016 | 14 | board | Order - Patent Owners Motion for Pro Hac Vice Admission of Samuel L. Walling Download |
Jul 8, 2016 | 15 | petitioner | Petitioner's Updated Mandatory Notices Download |
Sep 28, 2016 | 17 | | Scheduling Order Download |
Sep 28, 2016 | 16 | | Trial Instituted Document Download |
Sep 30, 2016 | 22 | | Petitioner's Motion for Admission Pro Hac Vice of Harold H. Davis, Jr. Download |
Sep 30, 2016 | 1078 | | Ex. 1078 Download |
Sep 30, 2016 | 19 | | Power of Attorney for Petitioner Micron Technology, Inc. Download |
Sep 30, 2016 | 20 | | Power of Attorney for Petitioner Samsung Electronics Co., Ltd. Download |
Sep 30, 2016 | 21 | | Petitioner's Motion for Admission Pro Hac Vice of Andrew B. Grossman Download |
Sep 30, 2016 | 23 | | Petitioner's Updated Exhibit List Download |
Sep 30, 2016 | 1077 | | Ex. 1077 Download |
Sep 30, 2016 | 18 | | Power of Attorney for Petitioner SK Hynix Inc. Download |
Oct 4, 2016 | 25 | | Order - Petitioner's Pro Hac Vice Motion for Mr. Andrew B. Grossman Download |
Oct 4, 2016 | 24 | | Order - Petitioner's Motion for Pro Hac Vice Admission of Mr. Harold Davis Download |
Oct 6, 2016 | 26 | | Patent Owners Power of Attorney Download |
Oct 11, 2016 | 28 | | Patent Owners Supplemental Mandatory Notices Download |
Oct 11, 2016 | 27 | | Patent Owners Motion for Withdrawal and Substitution of Counsel Download |
Oct 13, 2016 | 30 | | Petitioner's Objections to Patent Owner's Evidence Download |
Oct 13, 2016 | 29 | | Patent Owner's Objections to Evidence Download |
Oct 17, 2016 | 31 | | Decision - Patent Owner's Motion for Withdrawal and Substitution of Cousnel Download |
Oct 25, 2016 | 1079 | | Ex. 1079 Download |
Oct 25, 2016 | 34 | | Petitioner's Updated Exhibit List Download |
Oct 25, 2016 | 33 | | Petitioner's Updated Mandatory Notices Download |
Oct 25, 2016 | 32 | | Patent Owner's Updated Mandatory Notices Download |
Nov 2, 2016 | 2170 | | Declaration of Michael Newman in Support of Pro Hac Vice Admission Download |
Nov 2, 2016 | 36 | | Patent Owner's Updated Exhibit List Download |
Nov 2, 2016 | 35 | | Patent Owner's Unopposed Motion for Pro Hac Vice Admission of M. Newman Download |
Nov 9, 2016 | 38 | | Patent Owner's Updated Mandatory Notices Download |
Nov 9, 2016 | 37 | | PO Motion for Pro Hac Vice Admission of Michael C. Newman 37 C.F.R. 42.10 Download |
Dec 19, 2016 | 39 | | Notice of Deposition of Dr. Alexander D. Glew Download |
Jan 4, 2017 | 2159 | | (Part 1) - W. R. RUNYAN & K. E. BEAN, SEMICONDUCTOR INTEGRATED CIRCUIT PROCESSING TECHNOLOGY (1990) Download |
Jan 4, 2017 | 2162 | | (Part 3) - MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) Download |
Jan 4, 2017 | 2162 | | (Part 2) - MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) Download |
Jan 4, 2017 | 2162 | | (Part 5) - MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) Download |
Jan 4, 2017 | 2162 | | (Part 1) - MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) Download |
Jan 4, 2017 | 2162 | | (Part 4) - MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) Download |
Jan 4, 2017 | 40 | | Patent Owner's Response Download |
Jan 4, 2017 | 2163 | | Silicon dioxide - Wikipedia Download |
Jan 4, 2017 | 2166 | | Declaration of Alexander D. Glew, PH.D. Download |
Jan 4, 2017 | 2158 | | PETER VAN ZANT, MICROCHIP FABRICATION (4th ed., 2000) Download |
Jan 4, 2017 | 2165 | | Flexible and Substantial excerpts from the Oxford American Dictionary of Current English (1999) Download |
Jan 4, 2017 | 2159 | | (Part 2) - W. R. RUNYAN & K. E. BEAN, SEMICONDUCTOR INTEGRATED CIRCUIT PROCESSING TECHNOLOGY (1990) Download |
Jan 4, 2017 | 2162 | | (Part 4) - MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) Download |
Jan 4, 2017 | 2169 | | HANDBOOK SEMICONDUCTOR MANUFACTURING TECHNOLOGY (Robert Doering & Yoshio Nishi eds., 2nd ed. 2008) Download |
Jan 4, 2017 | 2160 | | SILICON NITRIDE AND SILICON DIOXIDE THIN INSULATING FILMS (M.J. Dean, et al. eds., 1997) Download |
Jan 4, 2017 | 2162 | | (Part 4) - MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) Download |
Jan 4, 2017 | 41 | | Patent Owner's Updated Exhibit List Download |
Jan 4, 2017 | 2162 | | (Part 4) - MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) Download |
Jan 4, 2017 | 2168 | | Prosecution History of U.S. Application 12/497,652 ¿¿¿ Office Action mailed on May 20, 2014 Download |
Jan 4, 2017 | 2164 | | Transcript of Deposition of Paul D. Franzon, Ph.D. ¿¿¿ October 6, 2016 Download |
Jan 4, 2017 | 2162 | | (Part 4) - MULTICHIP MODULE TECHNOLOGIES AND ALTERNATIVES: THE BASICS (Daryl Ann Doane & Paul D. Franzon eds., 1993) Download |
Jan 4, 2017 | 2167 | | Prosecution History of U.S. Application 12/497,652 ¿¿¿ Response to Office Action dated July 17, 2012 Download |
Jan 4, 2017 | 2159 | | (Part 2) - W. R. RUNYAN & K. E. BEAN, SEMICONDUCTOR INTEGRATED CIRCUIT PROCESSING TECHNOLOGY (1990) Download |
Jan 11, 2017 | 42 | | Petitioner's Objections to Patent Owner's Evidence Download |
Mar 2, 2017 | 1080 | | Exhibit 1080 - U.S. Patent No. 6,204,174 to Glew, et al., issued March
20, 2001 Download |
Mar 2, 2017 | 1083 | | Exhibit 1083 - Chanana, et al., Effect of Annealing and Plasma Precleaning on the Electrical Properties of N2/SiH4 PECVD Oxide as Gate Material in Mosfets and CCDs, Solid State Electronics, 36(7):1021-1026 (1993) Download |
Mar 2, 2017 | 43 | | Petitioner's Reply to Patent Owner's Response Download |
Mar 2, 2017 | 1085 | | Exhibit 1085 - Milton Ohring, The Materials Science of Thin Films, pp. 355-402 (Academic Press 1992) Download |
Mar 2, 2017 | 1082 | | Exhibit 1082 - Deposition Transcript of Alexander D. Glew, Ph.D. (January 20, 2017) Download |
Mar 2, 2017 | 1081 | | Exhibit 1081 - Alexander David Glew, Plasma Deposition of Diamond-Like Carbon and Fluorinated Amorphouse Carbon and the Resultant Properties and Structure (Dec. 2002), UMI No. 3085291 Download |
Mar 2, 2017 | 1089 | | Exhibit 1089 - U.S. Patent No. 7,485,571 to Leedy, issued February 3,
2009 Download |
Mar 2, 2017 | 1084 | | Exhibit 1084 - Wang et al., Characteristics of CMOS Devices Fabricated Using High Quality Thin PECVD Gate Oxide, IEDM ¿¿¿89:463-466 (Dec. 1989) Download |
Mar 2, 2017 | 1088 | | Exhibit 1088 - Schubert, P.J., and Neudeck, G.W., Confined Lateral Selective Epitaxial Growth of Silicon for Device Fabrication, IEEE Electronic Devices Letters 11(5):181-183 (May 1990) Download |
Mar 2, 2017 | 1090 | | Exhibit 1090 - Guldi, R.L., Source/Drain Dislocations and Electrical Leakage in Titanium-Salicided CMOS Integrated Circuits¿¿¿ J. Electrochem. Soc. 141(7):1957-1963 (July 1994) Download |
Mar 2, 2017 | 1086 | | Exhibit 1086 - U.S. Patent No. 8,907,499 to Leedy, issued December 9, 2014 Download |
Mar 2, 2017 | 1087 | | Exhibit 1087 - U.S. Patent No. 4,717,448 to Cox, issued January 5, 1988 Download |
Mar 7, 2017 | 44 | | Order - Trial Hearing Download |
Mar 15, 2017 | 45 | | Revised Trial Order Download |
May 12, 2017 | 46 | | Record of Oral Hearing Download |
Aug 22, 2017 | 47 | | Final Written Decision Download |
Oct 18, 2017 | 48 | | Petitioner's Notice of Appeal Download |