Date Field | Doc. No. | Party | Description |
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Sep 13, 2022 | 17 | board | Notice: refund approved Download |
Sep 8, 2022 | 3001 | board | Ex. 3001 - Leave to File Unopposed Motions to Dismiss Download |
Sep 8, 2022 | 16 | petitioner | Download |
Sep 8, 2022 | 15 | board | Termination Decision: Pre-DI settlement Download |
Sep 7, 2022 | 14 | patent_own | PATENT OWNER'S UPDATED EXHIBIT LIST Download |
Sep 7, 2022 | 13 | patent_own | Download |
Sep 2, 2022 | 12 | petitioner | Joint Request that Agreement be Treated as Business Confidential Information and Kept Separate Download |
Sep 2, 2022 | 11 | petitioner | Petitioners Unopposed Motion to Dismiss Download |
Jul 27, 2022 | 10 | patent_own | Download |
Jul 11, 2022 | 9 | petitioner | Petitioner's Reply to POPR Download |
Jun 10, 2022 | 8 | patent_own | Patent Owner's Preliminary Response Download |
Jun 10, 2022 | 2003 | patent_own | 2022-02-09 Decision Granting Institution of Inter Partes Review Download |
Jun 10, 2022 | 2002 | patent_own | 2021-08-03 Petition for Inter Partes Review Download |
Jun 10, 2022 | 2001 | patent_own | 2020-12-31 Complaint for Patent Infringement Download |
Jun 9, 2022 | 7 | patent_own | Patent Owner's Power of Attorney Download |
Jun 9, 2022 | 6 | patent_own | Patent Owner's Mandatory Notice Download |
Mar 16, 2022 | 5 | petitioner | Corrected Certificate of Service Download |
Mar 16, 2022 | 4 | board | Notice: Notice filing date accorded Download |
Mar 9, 2022 | 1018 | petitioner | Smith, Artificial Neural Network EWMA Controller for Semiconductor Processes Download |
Mar 9, 2022 | 1019 | petitioner | Pearn, Generalization of Clements' Method for Non-Normal Pearsonian Processes with Asymmetric Tolerances Download |
Mar 9, 2022 | 1020 | petitioner | Guo, A Real-Time Equipment Monitoring and Fault Detection System Download |
Mar 9, 2022 | 1021 | petitioner | Musacchio, On the Utility of Run to Run Control in Semiconductor Manufacturing Download |
Mar 9, 2022 | 1022 | petitioner | Qin, Control & Monitoring of Semiconductor Manufacturing Processes Download |
Mar 9, 2022 | 1023 | petitioner | Dept of Commerce, Semiconductor Measurement Technology Download |
Mar 9, 2022 | 1024 | petitioner | Chen, On-line Fault Diagnosis of Distribution Substations Using Hybrid Cause-Effect Network and Fuzzy Rule-based Method Download |
Mar 9, 2022 | 1 | petitioner | Power of Attorney Download |
Mar 9, 2022 | 1026 | petitioner | Demuth, Neural Network Toolbox Download |
Mar 9, 2022 | 1027 | petitioner | Plagianakos, Neural Network Training with Constrained Integer Weights Download |
Mar 9, 2022 | 1028 | petitioner | Kuncheva, Combining Pattern Classifiers Download |
Mar 9, 2022 | 1029 | petitioner | McKeown, District Court Trial Dates Tend to Slip After PTAB Discretionary Denials Download |
Mar 9, 2022 | 1030 | petitioner | Comparison between the Current Petition and Petition in IPR2021-01339 Download |
Mar 9, 2022 | 2 | petitioner | PETITION FOR INTER PARTES REVIEW OF U.S. PATENT NO. 8,676,538 Download |
Mar 9, 2022 | 3 | petitioner | MOTION FOR JOINDER Download |
Mar 9, 2022 | 1017 | petitioner | Li, Recursive PCA for Adaptive Process Monitoring Download |
Mar 9, 2022 | 1016 | petitioner | Ku, Distrubance Detection & Isolation by Dynamic PCA Download |
Mar 9, 2022 | 1015 | petitioner | MacGregor, Statistical Process Control of Multivariate Processes Download |
Mar 9, 2022 | 1014 | petitioner | ISO 13372-2004 Download |
Mar 9, 2022 | 1013 | petitioner | Famili, Data Pre-Processing and Intelligent Data Analysis Download |
Mar 9, 2022 | 1012 | petitioner | McGehee, The MMST Computer-Integrated Manufacturing System Framework Download |
Mar 9, 2022 | 1011 | petitioner | Gardner, Equipment Fault Detection Using Spatial Signatures Download |
Mar 9, 2022 | 1010 | petitioner | Leachman, Benchmarking Semiconductor Manufacturing Download |
Mar 9, 2022 | 1009 | petitioner | Bode, US 6,368,883 Download |
Mar 9, 2022 | 1008 | petitioner | Lin, US 2006-0111804 A1 Download |
Mar 9, 2022 | 1007 | petitioner | Brcka PCT (WO 2005-054968 A1) Download |
Mar 9, 2022 | 1006 | petitioner | Brcka Provisional No. 60-524,846 Download |
Mar 9, 2022 | 1005 | petitioner | Brcka, US 2006-0259198 A1 Download |
Mar 9, 2022 | 1004 | petitioner | Shanfield CV Download |
Mar 9, 2022 | 1003 | petitioner | Shanfield Declaration Download |
Mar 9, 2022 | 1002 | petitioner | '538 File History Download |
Mar 9, 2022 | 1001 | petitioner | US 8,676,538 Download |
Mar 9, 2022 | 1025 | petitioner | Rietman, Modeling and Control of a Semiconductor Manufacturing Process with an Automata Network Download |