Date Field | Doc. No. | Party | Description |
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Jun 29, 2022 | 1001 | petitioner | U.S. Patent No. 6,836,691 Download |
Jun 29, 2022 | 1002 | petitioner | Prosecution History of U.S. Patent No. 6,836,691 Download |
Jun 30, 2022 | 1 | petitioner | Petition for Inter Partes Review of U.S. Patent No. 6,836,691 Download |
Jun 30, 2022 | 1003 | petitioner | Declaration of P.K. Mozumder, Ph.D. Download |
Jun 30, 2022 | 1004 | petitioner | Order Granting Defendants Opposed Motion to Modify Scheduling Order in 6:20-cv-1210, 1212, 1214, 1215, and 1216 (WDTX) Download |
Jun 30, 2022 | 1005 | petitioner | Decision Denying Institution of IPR2021-01348 Download |
Jun 30, 2022 | 1006 | petitioner | Bushman, S., et al., Integration of the APC Framework with AMD's Fab25 Factory System, Proc. SPIE 3882, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing V (1999) (Bushman) Download |
Jun 30, 2022 | 1007 | petitioner | Yelverton, M., et al., Factory-Wide Run-to-Run Process Control, Solid State Technology, Vol. 42, No. 12, p. 45 (1999) (Yelverton) Download |
Jun 30, 2022 | 1008 | petitioner | Moyne J., & White, J., Existing and Envisioned Control Environment for Semiconductor Manufacturing, Run-to-Run Control in Semiconductor Manufacturing, CRC Press (2001) (Moyne) Download |
Jun 30, 2022 | 1009 | petitioner | Barna, G., APC in the Semiconductor Industry, History and Near Term Prognosis, IEEE/SEMI Advanced Semiconductor Manufacturing Conference (1996) (Barna) Download |
Jun 30, 2022 | 1010 | petitioner | Alptekin S. E., A suggested model program for CIM education. Industrial and Manufacturing Engineering, May 21:8 (1990) (Alptekin) Download |
Jun 30, 2022 | 1011 | petitioner | Cherrington, B. E., An Integrated Approach to Graduate Education in Manufacturing SystemsThe UT Dallas Model, Journal of Engineering Education, Jan;82(1):43-7 (1993) (Cherrington) Download |
Jun 30, 2022 | 1012 | petitioner | Kenneth W. Tobin Jr., Thomas P. Karnowski, Fred Lakhani, "Integrated applications of inspection data in the semiconductor manufacturing environment," Proc. SPIE 4275, Metrology-based Control for Micro-Manufacturing, (5 June 2001) (Tobin) Download |
Jun 30, 2022 | 2 | petitioner | Power of Attorney Download |
Jul 25, 2022 | 3 | patent_own | Patent Owner's Mandatory Notice Download |
Jul 25, 2022 | 4 | patent_own | Patent Owner's Power of Attorney Download |
Aug 10, 2022 | 5 | board | Notice: Notice filing date accorded Download |
Sep 2, 2022 | 6 | petitioner | Petitioners Unopposed Motion to Dismiss Download |
Sep 2, 2022 | 7 | petitioner | Joint Request that Agreement be Treated as Business Confidential Information and Kept Separate Download |
Sep 7, 2022 | 8 | patent_own | Download |
Sep 7, 2022 | 9 | patent_own | PATENT OWNER'S UPDATED EXHIBIT LIST Download |
Sep 8, 2022 | 10 | board | Termination Decision: Pre-DI settlement Download |
Sep 8, 2022 | 11 | petitioner | Download |
Sep 13, 2022 | 12 | board | Notice: refund approved Download |