Date Field | Doc. No. | Party | Description |
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May 28, 2019 | 34 | | Patent Owner's Notice of Appeal Download |
Mar 25, 2019 | 33 | | Final Written Decision Download |
Jan 28, 2019 | 32 | | Hearing Transcript Download |
Jan 3, 2019 | 31 | | Petitioners' Updated Mandatory Notices Download |
Jan 2, 2019 | 1036 | | Petitioners' Demonstrative Exhibits Download |
Jan 2, 2019 | 2017 | | Patent Owner's Oral Hearing Demonstratives Download |
Dec 21, 2018 | 30 | | Lone Star Silicon Innovations LLC's Reply In Support of its Motion to Exclude Evidence Download |
Dec 14, 2018 | 28 | | Petitioners' Sur-Sur-Reply to Patent Owner's Sur-Reply Download |
Dec 14, 2018 | 29 | | Petitioners' Response to Patent Owner's Motion to Exclude Download |
Dec 11, 2018 | 27 | | ORDER Oral Hearing Download |
Dec 3, 2018 | 2016 | | Authorization for Sur-Reply Download |
Dec 3, 2018 | 25 | | PATENT OWNER'S SURREPLY Download |
Dec 3, 2018 | 24 | | LONE STAR SILICON INNOVATIONS LLC'S MOTION TO EXCLUDE EVIDENCE Download |
Dec 3, 2018 | 26 | | JOINT REQUEST FOR ORAL HEARING Download |
Oct 11, 2018 | 1030 | | Exhibit 1030 Download |
Oct 11, 2018 | 1029 | | Exhibit 1029 Download |
Oct 11, 2018 | 1031 | | Exhibit 1031 Download |
Oct 11, 2018 | 1034 | | Exhibit 1034 Download |
Oct 11, 2018 | 1035 | | Exhibit 1035 Download |
Oct 11, 2018 | 1033 | | Exhibit 1033 Download |
Oct 11, 2018 | 23 | | Petitioners' Reply to Patent Owner's Response Download |
Oct 11, 2018 | 1032 | | Exhibit 1032 Download |
Oct 11, 2018 | 1028 | | Exhibit 1028 Download |
Sep 24, 2018 | 22 | | Panel Change Order Download |
Aug 21, 2018 | 21 | | Lone Star Silicon Innovations, LLC's Updated Mandatory Notices Pursuant to C.F.R. 42.8(a)(2) Download |
Jul 18, 2018 | 20 | | Petitioners' Objections to Evidence Download |
Jul 11, 2018 | 2014 | | Lecarval, et al. reference Download |
Jul 11, 2018 | 2011 | | Declaration of Dr. W.R. Bottoms, dated July 11, 2018 Download |
Jul 11, 2018 | 2015 | | Transcript of Deposition of Dean Neikirk, Ph.D., dated June 22, 2018 Download |
Jul 11, 2018 | 19 | | Patent Owner's Response Download |
Jul 11, 2018 | 2013 | | Mise, et al. reference Download |
Jul 11, 2018 | 2012 | | Tanaka, et al. reference Download |
Jun 5, 2018 | 18 | | Petitioner¿¿¿s Powers of Attorney Download |
Jun 5, 2018 | 17 | | Petitioner's Mandatory Notices Pursuant to 37 C.F.R. sec. 42.8 Download |
May 29, 2018 | 16 | | Petitioner's Unopposed Second Motion for Pro Hac Vice Admission of Paul Poirot
37 C.F.R. sec. 42.10 Download |
May 25, 2018 | 15 | | Petitioner's Power of Attorney Download |
May 25, 2018 | 14 | | Petitioner's Mandatory Notices Pursuant to 37 C.F.R. sec 42.8 Download |
May 22, 2018 | 1027 | | Declaration of Paul Poirot in Support of Petitioner's Second Motion for Pro Hac Vice Admission Download |
May 22, 2018 | 13 | | Unopposed Second Motion for Pro Hac Vice Admission of Paul Poirot Download |
May 18, 2018 | 12 | | Petitioners Unopposed Motion for Pro Hac Vice Admission of Paul Poirot
37 C.F.R. sec 42.10 Download |
May 18, 2018 | 11 | | Petitioners Unopposed Motion for Pro Hac Vice Admission of
Jason F. Hoffman
37 C.F.R. sec 42.10 Download |
May 11, 2018 | 10 | | Unopposed Motion for Pro Hac Vice Admission of Jason F. Hoffman Download |
May 11, 2018 | 1026 | | Declaration of Jason F. Hoffman in Support of Petitioner's Motion for Pro Hac Vice Admission Download |
May 11, 2018 | 1025 | | Declaration of Paul Poirot in Support of Petitioner's Motion for Pro Hac Vice Admission Download |
May 11, 2018 | 9 | | Unopposed Motion for Pro Hac Vice Admission of Paul Poirot Download |
Apr 27, 2018 | 8 | | Conduct of the Proceeding Download |
Apr 10, 2018 | 6 | | Trial Instituted Document Download |
Apr 10, 2018 | 7 | | Scheduling Order Download |
Jan 17, 2018 | 2005 | | U.S. Patent No. 5,122,889 to Kaneko et al. ("Kaneko") Download |
Jan 17, 2018 | 2007 | | U.S. Patent Application US2013/0252387A1 to Tsai et al. ("Tsai") Download |
Jan 17, 2018 | 2004 | | U.S. Patent No. 4,091,169 to Bohg et al. ("Bohg") Download |
Jan 17, 2018 | 2009 | | S. WOLF & R.N. TAUBER, SILICON PROCESSING FOR THE VLSI
ERA, VOLUME 1: PROCESS TECHNOLOGY (2d ed. 2000) Download |
Jan 17, 2018 | 2006 | | U.S. Patent No. 7,501,355 to Bhatia et al. ("Bhatia") Download |
Jan 17, 2018 | 2008 | | Certified translation of JP App. No. H11-233630 to Hasegawa ("Hasegawa") Download |
Jan 17, 2018 | 2010 | | "Chemical Composition of LPCVD Silicon Nitride and Silicon Oxynitride Layers" by A.E.T. Kuiper et al. Download |
Jan 17, 2018 | 2001 | | Declaration of Dr. W.R. Bottoms Download |
Jan 17, 2018 | 2002 | | Curriculum Vitae of Dr. W.R. Bottoms Download |
Jan 17, 2018 | 5 | | Patent Owner's Preliminary Response Download |
Jan 17, 2018 | 2003 | | "Compilation on Syntheses, Characterization and Properties of Silicon and Boron Carbonitride Films¿¿¿ by P. Hoffman et al. ("Hoffman") Download |
Oct 17, 2017 | 4 | | Notice of Accord Filing Date Download |
Oct 12, 2017 | 3 | | Lone Star Silicon Innovations, LLC's Mandatory Notices Pursuant to C.F.R. 42.8(a)(2) Download |
Sep 22, 2017 | 1012 | | Exhibit 1012 Download |
Sep 22, 2017 | 1014 | | Exhibit 1014 Download |
Sep 22, 2017 | 1022 | | Exhibit 1022 Download |
Sep 22, 2017 | 1005 | | Exhibit 1005 Download |
Sep 22, 2017 | 1004 | | Exhibit 1004 Download |
Sep 22, 2017 | 1002 | | Exhibit 1002 Download |
Sep 22, 2017 | 1 | | Petition for Inter Partes Review Download |
Sep 22, 2017 | 1021 | | Exhibit 1021 Download |
Sep 22, 2017 | 1003 | | Exhibit 1003 Download |
Sep 22, 2017 | 1013 | | Exhibit 1013 Download |
Sep 22, 2017 | 1011 | | Exhibit 1011 Download |
Sep 22, 2017 | 1019 | | Exhibit 1019 Download |
Sep 22, 2017 | 1007 | | Exhibit 1007 Download |
Sep 22, 2017 | 1017 | | Exhibit 1017 Download |
Sep 22, 2017 | 1010 | | Exhibit 1010 Download |
Sep 22, 2017 | 1024 | | Exhibit 1024 Download |
Sep 22, 2017 | 1015 | | Exhibit 1015 Download |
Sep 22, 2017 | 1001 | | Exhibit 1001 Download |
Sep 22, 2017 | 1016 | | Exhibit 1016 Download |
Sep 22, 2017 | 1020 | | Exhibit 1020 Download |
Sep 22, 2017 | 1018 | | Exhibit 1018 Download |
Sep 22, 2017 | 2 | | Power of Attorney Download |
Sep 22, 2017 | 1006 | | Exhibit 1006 Download |
Sep 22, 2017 | 1008 | | Exhibit 1008 Download |
Sep 22, 2017 | 1023 | | Exhibit 1023 Download |
Sep 22, 2017 | 1009 | | Exhibit 1009 Download |