Date Field | Doc. No. | Party | Description |
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Aug 24, 2017 | 69 | | Petitioners' Notice of Appeal Download |
Jun 23, 2017 | 68 | | Final Written Decision Download |
May 12, 2017 | 67 | | Record of Oral Hearing Download |
Mar 15, 2017 | 66 | | Revised Trial Order Download |
Mar 7, 2017 | 65 | | Order - Trial Hearing Download |
Feb 24, 2017 | 64 | | Petitioner's Request for Oral Argument Download |
Feb 24, 2017 | 63 | | Patent Owner's Request for Oral Hearing Download |
Feb 13, 2017 | 62 | | Patent Owner's Objection to Evidence Download |
Feb 6, 2017 | 1086 | | Ex. 1086 Download |
Feb 6, 2017 | 1090 | | Ex. 1090 Download |
Feb 6, 2017 | 1083 | | Ex. 1083 Download |
Feb 6, 2017 | 61 | | Petitioner's Reply to Patent Owner's Response Download |
Feb 6, 2017 | 1089 | | Ex. 1089 Download |
Feb 6, 2017 | 1081 | | Ex. 1081 Download |
Feb 6, 2017 | 1084 | | Ex. 1084 Download |
Feb 6, 2017 | 1087 | | Ex. 1087 Download |
Feb 6, 2017 | 1088 | | Ex. 1088 Download |
Feb 6, 2017 | 1080 | | Ex. 1080 Download |
Feb 6, 2017 | 1082 | | Ex. 1082 Download |
Feb 6, 2017 | 1085 | | Ex. 1085 Download |
Dec 19, 2016 | 59 | | Notice of Deposition of Dr. Alexander D. Glew Download |
Dec 19, 2016 | 60 | | Notice of Second Joint Stipulation to Adjust Schedule Download |
Dec 9, 2016 | 2166 | | Declaration of Alexander D. Glew, PH.D. Download |
Oct 25, 2016 | 58 | | Petitioner's Updated Mandatory Notices Download |
Oct 21, 2016 | 57 | | Petitioner's Objections to Patent Owner's Evidence Download |
Oct 14, 2016 | 2146 | | S. Wolf, Silicon Processing for the VLSI Era - Vol. 2 Download |
Oct 14, 2016 | 2158 | | P. Van Zant - Microchip Fabrication Download |
Oct 14, 2016 | 2159 | | W. R. Runyan - Semiconductor Integrated Circuit Processing (Part 1) Download |
Oct 14, 2016 | 2159 | | W.R. Runyan - Semiconductor Integrated Circuit Processing (Part 2) Download |
Oct 14, 2016 | 2160 | | Silicon Nitride and Silicon Dioxide Thin Insulating Films Download |
Oct 14, 2016 | 2162 | | Multichip Module - Franzon (Part 3) Download |
Oct 14, 2016 | 2162 | | Multichip Module - Franzon (Part 5) Download |
Oct 14, 2016 | 2162 | | Multichip Module - Franzon (Part 4) Download |
Oct 14, 2016 | 2162 | | Multichip Module - Franzon (Part 2) Download |
Oct 14, 2016 | 2162 | | Multichip Module - Franzon (Part 1) Download |
Oct 14, 2016 | 2163 | | Silicon Dioxide - Wikipedia Download |
Oct 14, 2016 | 2164 | | Transcript of Deposition of Paul D. Franzon Download |
Oct 14, 2016 | 2165 | | Oxford American Dictionary of Currant English Download |
Oct 14, 2016 | 2166 | | Declaration of Alexander Glew, Ph.D. Download |
Oct 14, 2016 | 2167 | | Prosecution History of U.S. App. 12/497,652 Download |
Oct 14, 2016 | 2168 | | Prosecution History of U.S. App. 12/497,652 Download |
Oct 14, 2016 | 2169 | | Handbook Semiconductor Manufacturing Technology Download |
Oct 14, 2016 | 55 | | Patent Owner's Response Download |
Oct 14, 2016 | 56 | | Patent Owner's Updated Exhibit List Download |
Oct 4, 2016 | 54 | | Order - Petitioner's Pro Hac Vice Motion for Mr. Andrew B. Grossman Download |
Oct 4, 2016 | 53 | | Order - Petitioner's Motion for Pro Hac Vice Admission of Mr. Harold Davis Download |
Sep 30, 2016 | 50 | | Petitioner's Motion for Admission Pro Hac Vice of Andrew B. Grossman Download |
Sep 30, 2016 | 1078 | | Ex. 1078 Download |
Sep 30, 2016 | 1077 | | Ex. 1077 Download |
Sep 30, 2016 | 45 | | Power of Attorney for Petitioner SK Hynix Inc. Download |
Sep 30, 2016 | 51 | | Petitioner's Motion for Admission Pro Hac Vice of Harold H. Davis, Jr. Download |
Sep 30, 2016 | 46 | | Power of Attorney for Petitioner Micron Technology, Inc. Download |
Sep 30, 2016 | 47 | | Power of Attorney for Petitioner Samsung Electronics Co., Ltd. Download |
Sep 30, 2016 | 52 | | Petitioner's Updated Exhibit List Download |
Sep 30, 2016 | 1077 | | Ex. 1077 Download |
Sep 30, 2016 | 1077 | | Ex. 1077 Download |
Sep 26, 2016 | 44 | | Patent Owner's Updated Mandatory Notices Download |
Sep 20, 2016 | 42 | | Decision - Patent Owner's Motion for Withdrawal and Substitution of Counsel Download |
Sep 20, 2016 | 43 | | Decision - Patent Owner's Mot. Pro Hac Vice Admis. Mr. Michael C. Newman Download |
Sep 20, 2016 | 41 | | Decision - Patent Owner's Motion for Withdrawal and Substitution of Counsel Download |
Sep 16, 2016 | 38 | | Amended Notice of Deposition of Dr. Paul D. Franzon Download |
Sep 16, 2016 | 40 | | Patent Owners Motion for Withdrawal and Substitution of Counsel Download |
Sep 16, 2016 | 39 | | Patent Owner's Updated Exhibit List Download |
Sep 15, 2016 | 37 | | Notice of Joint Stipulation to Adjust Schedule Download |
Sep 13, 2016 | 2153 | | Exhibit 2153 - Declaration of Michael C. Newman in Support of PHV Download |
Sep 13, 2016 | 36 | | Unopposed Motion for Pro Hac Vice Admission of Michael C. Newman Download |
Sep 7, 2016 | 35 | | Patent Owners Supplemental Mandatory Notices Download |
Sep 7, 2016 | 34 | | Patent Owners Power of Attorney Download |
Sep 6, 2016 | 32 | | Notice of Deposition Download |
Aug 25, 2016 | 30 | | Petitioner's Updated Mandatory Notices Download |
Aug 25, 2016 | 1068 | | Exhibit 1068 Download |
Aug 25, 2016 | 31 | | Petitioner's Updated Exhibit LIst Download |
Aug 22, 2016 | 29 | | Petitioner's Updated Exhibit LIst Download |
Aug 22, 2016 | 1067 | | Exhibit 1067 Download |
Aug 11, 2016 | 28 | | Decision - 37 C.F.R. 42.20 Download |
Aug 8, 2016 | 27 | | Revised Scheduling Order Download |
Aug 8, 2016 | 26 | | Summary of Conference Call Download |
Jul 27, 2016 | 25 | | Petitioner's Response to Patent Owner's Motion Regarding Claim Construction Download |
Jul 19, 2016 | 24 | | Notice Correcting Certificates of Service Download |
Jul 18, 2016 | 22 | | Patent Owner Elm Motion Regarding Claim Construction Download |
Jul 18, 2016 | 2144 | | Exhibit 2152 Download |
Jul 18, 2016 | 23 | | Notice of Patent Expiration Download |
Jul 15, 2016 | 20 | | Petitioner's Objections to Patent Owner's Evidence Download |
Jul 15, 2016 | 21 | | Patent Owners Objections To Petitioners Evidence Download |
Jul 8, 2016 | 19 | petitioner | Petitioner's Updated Mandatory Notices Download |
Jul 1, 2016 | 17 | board | Order - Patent Owners Motion for Pro Hac Vice Admission of Samuel L. Walling Download |
Jul 1, 2016 | 3001 | board | Exhibit 3001 Download |
Jul 1, 2016 | 15 | board | EXPUNGED Download |
Jul 1, 2016 | 18 | board | Order- Conduct of the Proceeding Download |
Jul 1, 2016 | 14 | board | Decision - Institution of Inter Partes Review - 37 CFR 42.108 Download |
Jul 1, 2016 | 16 | board | Scheduling Order Download |
May 6, 2016 | 13 | patent_owner | Elm 3DS Innovations LLC's Motion for Pro Hac Vice Admission of Samuel L. Walling and Declaration of Samuel L. Walling in Support of Motion Download |
May 5, 2016 | 11 | patent_owner | Power of Attorney Download |
May 5, 2016 | 12 | patent_owner | Power of Attorney Download |
Apr 6, 2016 | 2100 | patent_owner | Ex. 2100 Download |
Apr 6, 2016 | 2134 | patent_owner | Ex. 2134 Download |
Apr 6, 2016 | 2136 | patent_owner | Ex. 2136 Download |
Apr 6, 2016 | 2137 | patent_owner | Ex. 2137 Download |
Apr 6, 2016 | 2127 | patent_owner | Ex. 2127 Download |
Apr 6, 2016 | 2121 | patent_owner | Ex. 2121 Download |
Apr 6, 2016 | 2115 | patent_owner | Ex. 2115 Download |
Apr 6, 2016 | 2118 | patent_owner | Ex. 2118 Download |
Apr 6, 2016 | 2109 | patent_owner | Ex. 2109 Download |
Apr 6, 2016 | 2117 | patent_owner | Ex. 2117 Download |
Apr 6, 2016 | 2133 | patent_owner | Ex. 2133 Download |
Apr 6, 2016 | 2119 | patent_owner | Ex. 2119 Download |
Apr 6, 2016 | 2143 | patent_owner | Ex. 2143 Download |
Apr 6, 2016 | 2131 | patent_owner | Ex. 2131 Download |
Apr 6, 2016 | 2132 | patent_owner | Ex. 2132 Download |
Apr 6, 2016 | 2105 | patent_owner | Ex. 2105 Download |
Apr 6, 2016 | 2125 | patent_owner | Ex. 2125 Download |
Apr 6, 2016 | 2102 | patent_owner | Ex. 2102 Download |
Apr 6, 2016 | 2140 | patent_owner | Ex. 2140 Download |
Apr 6, 2016 | 2123 | patent_owner | Ex. 2123 Download |
Apr 6, 2016 | 2135 | patent_owner | Ex. 2135 Download |
Apr 6, 2016 | 2108 | patent_owner | Ex. 2108 Download |
Apr 6, 2016 | 2120 | patent_owner | Ex. 2120 Download |
Apr 6, 2016 | 2116 | patent_owner | Ex. 2116 Download |
Apr 6, 2016 | 2104 | patent_owner | Ex. 2104 Download |
Apr 6, 2016 | 2107 | patent_owner | Ex. 2107 Download |
Apr 6, 2016 | 2101 | patent_owner | Ex. 2101 Download |
Apr 6, 2016 | 2106 | patent_owner | Ex. 2106 Download |
Apr 6, 2016 | 2103 | patent_owner | Ex. 2103 Download |
Apr 6, 2016 | 2122 | patent_owner | Ex. 2122 Download |
Apr 6, 2016 | 10 | patent_owner | Patent Owner's Preliminary Response Download |
Jan 19, 2016 | 8 | potential_po | Power of Attorney Download |
Jan 19, 2016 | 9 | potential_po | Related Matters Download |
Jan 13, 2016 | 6 | petitioner | Petitioner's Notice of Amended Exhibit List Download |
Jan 13, 2016 | 7 | petitioner | Petitioner's Amended Exhibit List Download |
Jan 6, 2016 | 5 | board | Notice of Filing Date Accorded to Petition and Time for Filing Patent Owner Preliminary Response Download |
Dec 28, 2015 | 2 | petitioner | Power of Attorney Download |
Dec 28, 2015 | 4 | petitioner | Power of Attorney Download |
Dec 28, 2015 | 1054 | petitioner | Three-Dimensional IC Trends Download |
Dec 28, 2015 | 1056 | petitioner | Future WSI Technology - Stacked Monolithic WSI (Williams) Download |
Dec 28, 2015 | 1058 | petitioner | Memory-Chip Stacks Send Density Skyward Download |
Dec 28, 2015 | 1057 | petitioner | 3-D Multichip Packaging (Crowley) Download |
Dec 28, 2015 | 1053 | petitioner | Japan's Push Into Creative Semiconductor Research (Tatsuno) Download |
Dec 28, 2015 | 1045 | petitioner | Stress in Thermal SiO2 During Growth (EerNisse) Download |
Dec 28, 2015 | 1059 | petitioner | Interconnect Capacitances (Kuhn) Download |
Dec 28, 2015 | 1050 | petitioner | USP 5160998 (Itoh) Download |
Dec 28, 2015 | 1048 | petitioner | Dielectric Film Influence on Stress-Migration (Isobe) Download |
Dec 28, 2015 | 1062 | petitioner | WorldCat Entry (Yu) Download |
Dec 28, 2015 | 1051 | petitioner | Polymer Dielectrics for Multichip Module Packaging Download |
Dec 28, 2015 | 1052 | petitioner | Warpage and Mechanical Strength STudies (Grief) Download |
Dec 28, 2015 | 1049 | petitioner | Advantages of Dual-Frequency PECVD (VandeVen) Download |
Dec 28, 2015 | 1055 | petitioner | Evaluation of Cubic Devices (Hayashi) Download |
Dec 28, 2015 | 1046 | petitioner | Delamination and Fracture of Thin Films (Klokholm) Download |
Dec 28, 2015 | 1047 | petitioner | USP 4948482 (Kobayashi) Download |
Dec 28, 2015 | 3 | petitioner | Power of Attorney Download |
Dec 28, 2015 | 1030 | petitioner | 119 Patent FH - 9-4-12 Resp Download |
Dec 28, 2015 | 1002 | petitioner | Declaration of Dr. Paul D. Franzon Download |
Dec 28, 2015 | 1022 | petitioner | 653 App FH - 10-24-13 Resp Download |
Dec 28, 2015 | 1 | petitioner | Petition for Inter Partes Review of U.S. Patent No. 8,653,672 Download |
Dec 28, 2015 | 1033 | petitioner | 652 App FH - 8-27-14 OA Download |
Dec 28, 2015 | 1029 | petitioner | 466 Patent FH - 6-25-09 Resp Download |
Dec 28, 2015 | 1043 | petitioner | Stress-induced Dislocations (Fahey) Download |
Dec 28, 2015 | 1037 | petitioner | Declaration of Gerard P. Grenier Download |
Dec 28, 2015 | 1003 | petitioner | Curriculum Vitae of Dr. Paul D. Franzon Download |
Dec 28, 2015 | 1042 | petitioner | USP 3044909 (Shockley) Download |
Dec 28, 2015 | 1038 | petitioner | A New Three-Dimensional Multiport Memory (Hirano) Download |
Dec 28, 2015 | 1005 | petitioner | USP5162251 (Poole) Download |
Dec 28, 2015 | 1007 | petitioner | JP Patent Pub 3-151337 (Kowa) Download |
Dec 28, 2015 | 1035 | petitioner | 653 App FH - 8-27-14 Adv. Action Download |
Dec 28, 2015 | 1040 | petitioner | Processing for the VLSI Era (Wolf) Download |
Dec 28, 2015 | 1020 | petitioner | 499 Patent FH - As-Filed App Download |
Dec 28, 2015 | 1036 | petitioner | 653 App FH - 11-20-14 Express Abandonment Download |
Dec 28, 2015 | 1031 | petitioner | 119 Patent FH - 6-3-13 Appeal Brief Download |
Dec 28, 2015 | 1001 | petitioner | U.S. Patent No. 8,653,672 Download |
Dec 28, 2015 | 1013 | petitioner | Three-Dimensional Integration Technology (Matsumoto) Download |
Dec 28, 2015 | 1034 | petitioner | 652 App FH - 11-20-14 Express Abandonment Download |
Dec 28, 2015 | 1009 | petitioner | Real-Time Microvision Systems (Yu) Download |
Dec 28, 2015 | 1039 | petitioner | Concept One CVD Specification (Novellus) Download |
Dec 28, 2015 | 1004 | petitioner | USP 5202754 (Bertin) Download |
Dec 28, 2015 | 1021 | petitioner | 652 App FH - 9-26-13 Resp Download |
Dec 28, 2015 | 1026 | petitioner | 542 Patent FH - 7-30-12 Resp Download |
Dec 28, 2015 | 1028 | petitioner | 466 Patent FH - 2-16-09 Resp Download |
Dec 28, 2015 | 1032 | petitioner | 617 Patent FH - 12-14-10 Resp Download |
Dec 28, 2015 | 1017 | petitioner | Prosecution History for U.S. Patent No. 8,653,672 Download |
Dec 28, 2015 | 1019 | petitioner | 499 Patent FH - 6-20-13 Response Download |
Dec 28, 2015 | 1006 | petitioner | USP 5354695 (Leedy) Download |
Dec 28, 2015 | 1044 | petitioner | Physics of Thin Films (Hass) Download |
Dec 28, 2015 | 1018 | petitioner | 499 Patent FH - 5-29-13 OA Download |
Dec 28, 2015 | 1025 | petitioner | 167 Patent FH - 9-8-98 Resp Download |
Dec 28, 2015 | 1024 | petitioner | 167 Patent FH - 4-28-98 Resp Download |
Dec 28, 2015 | 1041 | petitioner | USP 3508980 (Jackson) Download |