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Case number IPR2017-01457

SPTS Technologies Limited v. Plasma-Therm LLC > Summary

Court Case Number IPR2017-01457

Filing Date May 22, 2017

Court Patent Trial and Appeal Board

Status Terminated-Denied

Administrative JudgesElizabeth M. Roesel, William V. Saindon, Amanda F. Wieker

Judge Writing the Final DecisionElizabeth M. Roesel

Claims Challenged in the Petition: 1, 3, 4

Patent Owner

Related Patents

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09202720 Method and apparatus for plasma dicing a semi-conductor wafer Dec 1, 2015
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