SPTS Technologies Limited v. Plasma-Therm LLC > Summary
Court Case Number IPR2017-01457
Filing Date May 22, 2017
Court Patent Trial and Appeal Board
Status Terminated-Denied
Administrative JudgesElizabeth M. Roesel, William V. Saindon, Amanda F. Wieker
Judge Writing the Final DecisionElizabeth M. Roesel
Claims Challenged in the Petition: 1, 3, 4
Petitioner
Patent Owner
Petitioner Attorneys
4Patent Owner Attorneys
3The Martinez Group PLLC
Attorney Name: Ryan Mark Corbett
Burr & Forman
The Martinez Group PLLC
Attorney Name: Harvey S. Kauget
Burr & Forman
Plasma-Therm
Attorney Name: Stanley Shanfield
Burr & Forman
Related Patents
Doc No | Title | Issue date |
---|---|---|
09202720 | Method and apparatus for plasma dicing a semi-conductor wafer | Dec 1, 2015 |