Case number IPR2017-01674
SPTS Technologies Limited v. Plasma-Therm LLC > Summary
Court Case Number IPR2017-01674
Filing Date Jun 24, 2017
Institution Decision Date Jan 11, 2018
Decision Date Jan 3, 2019
Court Patent Trial and Appeal Board
Status FWD Entered
Administrative JudgesAmanda F. Wieker, William V. Saindon, Elizabeth M. Roesel
Judge Writing the Final DecisionAmanda F. Wieker
Claims Challenged in the Petition: 1, 2, 4, 5
Claims Instituted: 1, 2, 4, 5
Petitioner
Patent Owner
Petitioner Attorneys
3SPTS Technologies
Attorney Name: Adam C. Volentine
Volentine, Whitt and Francos, PLLC
Attorney Name: Steven R. Whitt
Volentine, Whitt and Francos, PLLC
Patent Owner Attorneys
4Plasma-Therm
Attorney Name: Harvey S. Kauget
Burr & Forman
Plasma-Therm
Attorney Name: Ryan Mark Corbett
Burr & Forman
Plasma-Therm
Attorney Name: Jonathan Spencer
Burr & Forman
Plasma-Therm
Attorney Name: Stanley Shanfield
Burr & Forman
Related Patents
| Doc No | Title | Issue date |
|---|---|---|
| 08802545 | Method and apparatus for plasma dicing a semi-conductor wafer | Aug 12, 2014 |
