Case number IPR2017-01674
SPTS Technologies Limited v. Plasma-Therm LLC > Documents
| Date Field | Doc. No. | Party | Description |
|---|---|---|---|
| Mar 11, 2019 | 29 | Decision - Denying Petitioner's Request for Rehearing of Final Written Decision Download | |
| Feb 4, 2019 | 28 | Petitioner Request For Rehearing Download | |
| Jan 3, 2019 | 27 | Termination Decision Document Download | |
| Oct 25, 2018 | 26 | Hearing Transcript Download | |
| Oct 5, 2018 | 1038 | Petitioners Substitute Demonstrative Exhibits Download | |
| Oct 5, 2018 | 1037 | Email Authorization to file Sub Demonstratives Download | |
| Oct 5, 2018 | 1039 | Certificate of Service Download | |
| Oct 3, 2018 | 1036 | Petitioners Demonstrative Exhibites Download | |
| Oct 3, 2018 | 25 | Petitioners Demonstrative Exhibits Download | |
| Oct 3, 2018 | 2019 | Patent Owner's Demonstrative Exhibit Download | |
| Sep 5, 2018 | 24 | ORDER Oral Argument Download | |
| Sep 4, 2018 | 22 | Patent Owner's Sur-Reply Download | |
| Sep 4, 2018 | 2018 | Email Authorization to File Sur-Reply Download | |
| Sep 4, 2018 | 23 | Patent Owner's Request for Oral Argument Download | |
| Sep 4, 2018 | 21 | Petitioner's Request For Oral Argument Download | |
| Aug 13, 2018 | 20 | Patent Owner's Reply to Petitioner's Opposition to Contingent Motion to Amend Download | |
| Jul 12, 2018 | 1034 | U.S. Patent Pub. 20070175856 (Johnson) Download | |
| Jul 12, 2018 | 1035 | US Patent Pub. 20040235307 (Johnson) Download | |
| Jul 12, 2018 | 1033 | Shanfield Deposition ErattaSheet Download | |
| Jul 12, 2018 | 1032 | Shanfield Deposition Transcript Download | |
| Jul 12, 2018 | 18 | Petitioner Reply to Patent Owner Response Download | |
| Jul 12, 2018 | 19 | Petitioner Opposition to Motion To Amend Download | |
| Apr 25, 2018 | 17 | Petitioner's Notice of Deposition of Dr. Shanfield Download | |
| Apr 12, 2018 | 2016 | Sharifi, et al., "Plasma RIE Etching Fundamentals and Applications" Download | |
| Apr 12, 2018 | 2009 | Transcript of Deposition of Dr. John E. Spencer Download | |
| Apr 12, 2018 | 16 | Contingent Motion to Amend Download | |
| Apr 12, 2018 | 2014 | U.S. Patent No. 6,456,158 (Sekiya) Download | |
| Apr 12, 2018 | 2013 | Huang, et al., "The Optimal DRIE Parameter for Bulk Micro-Machining Process" Download | |
| Apr 12, 2018 | 2010 | Supplemental Declaration of Stanley Shanfield, Ph.D. Download | |
| Apr 12, 2018 | 15 | Patent Owner's Response Download | |
| Apr 12, 2018 | 2012 | "The Bosch Process for Etching Micro-Mechanical Systems (MEMS)" Download | |
| Apr 12, 2018 | 2017 | U.S. Provisional Patent Application No. 61/452,450 Download | |
| Apr 12, 2018 | 2011 | Eisenhammer et al., "Achieving High Aspect Ratio TSVs" Download | |
| Apr 12, 2018 | 2015 | Donnelly, et al., "Plasma etching: Yesterday, today, and tomorrow" Download | |
| Apr 2, 2018 | 14 | Conduct of the Proceeding 37 C.F.R. sec 42.5 Download | |
| Mar 12, 2018 | 13 | Granting Joint Motion to Expunge Download | |
| Mar 7, 2018 | 12 | Joint Motion to Expunge Petitioner's Supplemental Evidence Download | |
| Feb 12, 2018 | 11 | Patent Owner's Notice of Deposition of Dr. John E. Spencer Download | |
| Feb 9, 2018 | 10 | Submission Of Supplemental Evidence Download | |
| Feb 9, 2018 | 1031 | Supplemental Spencer Declaration Download | |
| Jan 26, 2018 | 9 | Patent Owner's Objections To Evidence Download | |
| Jan 11, 2018 | 7 | Decision Institution of Inter Partes Review Download | |
| Jan 11, 2018 | 8 | Scheduling Order Download | |
| Oct 18, 2017 | 2007 | Guide to SEMI Specs Download | |
| Oct 18, 2017 | 2006 | US 2009/0250738 (Dyer) Download | |
| Oct 18, 2017 | 2004 | SOI Materials Chapter by Colinge Download | |
| Oct 18, 2017 | 2003 | Lei Article Download | |
| Oct 18, 2017 | 2005 | SOI Tech. & Devices XI Download | |
| Oct 18, 2017 | 6 | Patent Owner's Preliminary Response Download | |
| Oct 18, 2017 | 2008 | Sensors and Actuators A Download | |
| Oct 18, 2017 | 2001 | Declaration of Stanley Shanfield, Ph.D. Download | |
| Oct 18, 2017 | 2002 | Curriculum Vitae of Stanley Shanfield, Ph.D. Download | |
| Jul 18, 2017 | 5 | Notice of Accord Filing Date Download | |
| Jul 10, 2017 | 3 | Patent Owner's Mandatory Notices Download | |
| Jul 10, 2017 | 4 | Patent Owner's Power of Attorney Download | |
| Jun 24, 2017 | 1001 | USP 8,802,545 (the '545 patent) Download | |
| Jun 24, 2017 | 1021 | USP 7,781,310 (Grinva 310) Download | |
| Jun 24, 2017 | 1013 | USP 2010/0120230 (Grinva 230) Download | |
| Jun 24, 2017 | 1 | Petition For IPR Download | |
| Jun 24, 2017 | 1007 | USP 6,051,503 (Bhardwaj) Download | |
| Jun 24, 2017 | 1014 | USP 2005/0029221 (Chang) Download | |
| Jun 24, 2017 | 1005 | USP 6,406,979 (Fisher) Download | |
| Jun 24, 2017 | 1006 | USP 6,071,822 (Donohue) Download | |
| Jun 24, 2017 | 1030 | File History of the '545 patent Download | |
| Jun 24, 2017 | 1008 | USP 6,642,127 (Kumar) Download | |
| Jun 24, 2017 | 1004 | US Provisional 61/452,450 Download | |
| Jun 24, 2017 | 1017 | USP 9,202,720 (challenged in IPR2017-01457) Download | |
| Jun 24, 2017 | 1010 | USP 7,166,536 (Laermer) Download | |
| Jun 24, 2017 | 1002 | The '545 patent family Download | |
| Jun 24, 2017 | 1009 | Declaration of Dr. John Spencer Download | |
| Jun 24, 2017 | 1015 | USP 7,150,796 (Smith) Download | |
| Jun 24, 2017 | 2 | Power of Attorney Download | |
| Jun 24, 2017 | 1016 | USP 8,980,764 (challenged in IPR2017-01314) Download | |
| Jun 24, 2017 | 1019 | USP 7,507,638 (Mancini) Download | |
| Jun 24, 2017 | 1020 | USP 6465158 (Sekiya) Download | |
| Jun 24, 2017 | 1011 | USP 2004/0102025 (Arita) Download | |
| Jun 24, 2017 | 1003 | Demand Letter Download |
