Date Field | Doc. No. | Party | Description |
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Jun 24, 2017 | 1 | | Petition For IPR Download |
Jun 24, 2017 | 2 | | Power of Attorney Download |
Jul 10, 2017 | 3 | | Patent Owner's Mandatory Notices Download |
Jul 10, 2017 | 4 | | Patent Owner's Power of Attorney Download |
Jul 18, 2017 | 5 | | Notice of Accord Filing Date Download |
Oct 18, 2017 | 6 | | Patent Owner's Preliminary Response Download |
Jan 11, 2018 | 7 | | Decision Institution of Inter Partes Review Download |
Jan 11, 2018 | 8 | | Scheduling Order Download |
Jan 26, 2018 | 9 | | Patent Owner's Objections To Evidence Download |
Feb 9, 2018 | 10 | | Submission Of Supplemental Evidence Download |
Feb 12, 2018 | 11 | | Patent Owner's Notice of Deposition of Dr. John E. Spencer Download |
Mar 7, 2018 | 12 | | Joint Motion to Expunge Petitioner's Supplemental Evidence Download |
Mar 12, 2018 | 13 | | Granting Joint Motion to Expunge Download |
Apr 2, 2018 | 14 | | Conduct of the Proceeding
37 C.F.R. sec 42.5 Download |
Apr 12, 2018 | 15 | | Patent Owner's Response Download |
Apr 12, 2018 | 16 | | Contingent Motion to Amend Download |
Apr 25, 2018 | 17 | | Petitioner's Notice of Deposition of Dr. Shanfield Download |
Jul 12, 2018 | 18 | | Petitioner Reply to Patent Owner Response Download |
Jul 12, 2018 | 19 | | Petitioner Opposition to Motion To Amend Download |
Aug 13, 2018 | 20 | | Patent Owner's Reply to Petitioner's Opposition to Contingent Motion to Amend Download |
Sep 4, 2018 | 21 | | Petitioner's Request For Oral Argument Download |
Sep 4, 2018 | 22 | | Patent Owner's Sur-Reply Download |
Sep 4, 2018 | 23 | | Patent Owner's Request for Oral Argument Download |
Sep 5, 2018 | 24 | | ORDER Oral Argument Download |
Oct 3, 2018 | 25 | | Petitioners Demonstrative Exhibits Download |
Oct 25, 2018 | 26 | | Hearing Transcript Download |
Jan 3, 2019 | 27 | | Termination Decision Document Download |
Feb 4, 2019 | 28 | | Petitioner Request For Rehearing Download |
Mar 11, 2019 | 29 | | Decision - Denying Petitioner's Request for Rehearing of Final Written Decision Download |
Jun 24, 2017 | 1001 | | USP 8,802,545 (the '545 patent) Download |
Jun 24, 2017 | 1002 | | The '545 patent family Download |
Jun 24, 2017 | 1003 | | Demand Letter Download |
Jun 24, 2017 | 1004 | | US Provisional 61/452,450 Download |
Jun 24, 2017 | 1005 | | USP 6,406,979 (Fisher) Download |
Jun 24, 2017 | 1006 | | USP 6,071,822 (Donohue) Download |
Jun 24, 2017 | 1007 | | USP 6,051,503 (Bhardwaj) Download |
Jun 24, 2017 | 1008 | | USP 6,642,127 (Kumar) Download |
Jun 24, 2017 | 1009 | | Declaration of Dr. John Spencer Download |
Jun 24, 2017 | 1010 | | USP 7,166,536 (Laermer) Download |
Jun 24, 2017 | 1011 | | USP 2004/0102025 (Arita) Download |
Jun 24, 2017 | 1013 | | USP 2010/0120230 (Grinva 230) Download |
Jun 24, 2017 | 1014 | | USP 2005/0029221 (Chang) Download |
Jun 24, 2017 | 1015 | | USP 7,150,796 (Smith) Download |
Jun 24, 2017 | 1016 | | USP 8,980,764 (challenged in IPR2017-01314) Download |
Jun 24, 2017 | 1017 | | USP 9,202,720 (challenged in IPR2017-01457) Download |
Jun 24, 2017 | 1019 | | USP 7,507,638 (Mancini) Download |
Jun 24, 2017 | 1020 | | USP 6465158 (Sekiya) Download |
Jun 24, 2017 | 1021 | | USP 7,781,310 (Grinva 310) Download |
Jun 24, 2017 | 1030 | | File History of the '545 patent Download |
Feb 9, 2018 | 1031 | | Supplemental Spencer Declaration Download |
Jul 12, 2018 | 1032 | | Shanfield Deposition Transcript Download |
Jul 12, 2018 | 1033 | | Shanfield Deposition ErattaSheet Download |
Jul 12, 2018 | 1034 | | U.S. Patent Pub. 20070175856 (Johnson) Download |
Jul 12, 2018 | 1035 | | US Patent Pub. 20040235307 (Johnson) Download |
Oct 3, 2018 | 1036 | | Petitioners Demonstrative Exhibites Download |
Oct 5, 2018 | 1037 | | Email Authorization to file Sub Demonstratives Download |
Oct 5, 2018 | 1038 | | Petitioners Substitute Demonstrative Exhibits Download |
Oct 5, 2018 | 1039 | | Certificate of Service Download |
Oct 18, 2017 | 2001 | | Declaration of Stanley Shanfield, Ph.D. Download |
Oct 18, 2017 | 2002 | | Curriculum Vitae of Stanley Shanfield, Ph.D. Download |
Oct 18, 2017 | 2003 | | Lei Article Download |
Oct 18, 2017 | 2004 | | SOI Materials Chapter by Colinge Download |
Oct 18, 2017 | 2005 | | SOI Tech. & Devices XI Download |
Oct 18, 2017 | 2006 | | US 2009/0250738 (Dyer) Download |
Oct 18, 2017 | 2007 | | Guide to SEMI Specs Download |
Oct 18, 2017 | 2008 | | Sensors and Actuators A Download |
Apr 12, 2018 | 2009 | | Transcript of Deposition of Dr. John E. Spencer Download |
Apr 12, 2018 | 2010 | | Supplemental Declaration of Stanley Shanfield, Ph.D. Download |
Apr 12, 2018 | 2011 | | Eisenhammer et al., "Achieving High Aspect Ratio TSVs" Download |
Apr 12, 2018 | 2012 | | "The Bosch Process for Etching Micro-Mechanical Systems (MEMS)" Download |
Apr 12, 2018 | 2013 | | Huang, et al., "The Optimal DRIE Parameter for Bulk Micro-Machining Process" Download |
Apr 12, 2018 | 2014 | | U.S. Patent No. 6,456,158 (Sekiya) Download |
Apr 12, 2018 | 2015 | | Donnelly, et al., "Plasma etching: Yesterday, today, and tomorrow" Download |
Apr 12, 2018 | 2016 | | Sharifi, et al., "Plasma RIE Etching Fundamentals and Applications" Download |
Apr 12, 2018 | 2017 | | U.S. Provisional Patent Application No. 61/452,450 Download |
Sep 4, 2018 | 2018 | | Email Authorization to File Sur-Reply Download |
Oct 3, 2018 | 2019 | | Patent Owner's Demonstrative Exhibit Download |