SPTS Technologies Limited v. Plasma-Therm LLC > Summary
Court Case Number IPR2017-01792
Filing Date Jul 17, 2017
Institution Decision Date Feb 6, 2018
Decision Date Jan 28, 2019
Court Patent Trial and Appeal Board
Status FWD Entered
Administrative JudgesElizabeth M. Roesel, William V. Saindon, Amanda F. Wieker
Judge Writing the Final DecisionElizabeth M. Roesel
Claims Challenged in the Petition: 1, 3, 4, 5, 6, 7, 9, 10, 11, 12, 13, 14, 16, 17, 22, 23, 24, 25, 26
Claims Instituted: 1, 3, 4, 5, 6, 7, 9, 10, 11, 12, 13
Petitioner
Patent Owner
Petitioner Attorneys
3Patent Owner Attorneys
3Plasma-Therm
Attorney Name: Harvey S. Kauget
Burr & Forman
Plasma-Therm
Attorney Name: Ryan Mark Corbett
Burr & Forman
Plasma-Therm
Attorney Name: Stanley Shanfield
Burr & Forman
Related Patents
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09105705 | Method and apparatus for plasma dicing a semi-conductor wafer | Aug 11, 2015 |