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Case number IPR2017-01792

SPTS Technologies Limited v. Plasma-Therm LLC > Summary

Court Case Number IPR2017-01792

Filing Date Jul 17, 2017

Institution Decision Date Feb 6, 2018

Decision Date Jan 28, 2019

Court Patent Trial and Appeal Board

Status FWD Entered

Administrative JudgesElizabeth M. Roesel, William V. Saindon, Amanda F. Wieker

Judge Writing the Final DecisionElizabeth M. Roesel

Claims Challenged in the Petition: 1, 3, 4, 5, 6, 7, 9, 10, 11, 12, 13, 14, 16, 17, 22, 23, 24, 25, 26

Claims Instituted: 1, 3, 4, 5, 6, 7, 9, 10, 11, 12, 13

Patent Owner

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09105705 Method and apparatus for plasma dicing a semi-conductor wafer Aug 11, 2015
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