SPTS Technologies Limited v. Plasma-Therm LLC > Summary
Court Case Number IPR2017-02164
Filing Date Sep 23, 2017
Court Patent Trial and Appeal Board
Status Terminated-Denied
Administrative JudgesKamran Jivani, William V. Saindon, Amanda F. Wieker
Judge Writing the Final DecisionKamran Jivani
Claims Challenged in the Petition: 1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21
Petitioner
Patent Owner
Petitioner Attorneys
3Patent Owner Attorneys
3Plasma-Therm
Attorney Name: Harvey S. Kauget
Burr & Forman
Plasma-Therm
Attorney Name: Ryan Mark Corbett
Burr & Forman
Plasma-Therm
Attorney Name: Stanley Shanfield
Burr & Forman
Related Patents
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09070760 | Method and apparatus for plasma dicing a semi-conductor wafer | Jun 30, 2015 |