Date Field | Doc. No. | Party | Description |
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Jun 13, 2016 | 32 | board | Final Written Decision Download |
Apr 13, 2016 | 31 | board | Record of Oral Hearing Download |
Jan 28, 2016 | 30 | board | Order Rescheduling Oral Hearing Download |
Jan 21, 2016 | 2010 | patent_own | Patent Owner's Demonstrative Exhibits Download |
Jan 21, 2016 | 28 | patent_own | Patent Owner's Demonstrative Exhibits Download |
Jan 21, 2016 | 29 | petitioner | Petitioner's Updated Exhibit List Download |
Jan 21, 2016 | 1024 | petitioner | Petitioner's Demonstratives for Oral Hearing Download |
Jan 12, 2016 | 27 | petitioner | Petitioner Response to Patent Owners Motion for Observation on Cross-Examination Download |
Jan 11, 2016 | 26 | board | Order - Oral Hearing Download |
Jan 4, 2016 | 23 | petitioner | Request for Oral Argument Download |
Jan 4, 2016 | 2009 | patent_own | Deposition Transcript of Dr. Rubloff Vol. 2 December 17, 2015 Download |
Jan 4, 2016 | 24 | patent_own | Request for Oral Argument Download |
Jan 4, 2016 | 2008 | patent_own | Deposition Transcript of Dr. Rubloff Vol. 1 December 16, 2015 Download |
Jan 4, 2016 | 25 | patent_own | Motion for Observation Regarding Cross-Examination of Dr. Gary W. Rubloff Download |
Dec 3, 2015 | 22 | patent_own | Notice of Deposition of Gary W. Rubloff, Ph.D. Download |
Nov 16, 2015 | 21 | petitioner | Petitioners Reply to Patent Owners Response Download |
Nov 16, 2015 | 1019 | petitioner | Rubloff Declaration Download |
Nov 16, 2015 | 1023 | petitioner | US5043299 Chang Download |
Nov 16, 2015 | 1022 | petitioner | Hasper Download |
Nov 16, 2015 | 1021 | petitioner | Maltiel, Ron Deposition - Vol 2 Download |
Nov 16, 2015 | 1020 | petitioner | Maltiel, Ron Deposition - Vol 1 Download |
Nov 3, 2015 | 20 | petitioner | Notice of Deposition Download |
Nov 3, 2015 | 19 | petitioner | Notice of Additional Back-Up Counsel Download |
Sep 8, 2015 | 18 | petitioner | Petitioner's Notice of Objection to Evidence Download |
Aug 31, 2015 | 2003 | patent_own | R. Maltiel Curriculum Vitae Download |
Aug 31, 2015 | 2005 | patent_own | Deposition Transcript of Dr. Rubloff Vol. 2 August 19, 2015 Download |
Aug 31, 2015 | 2004 | patent_own | Deposition Transcript of Dr. Rubloff Vol. 1 August 18, 2015 Download |
Aug 31, 2015 | 2006 | patent_own | Article, Study on the Oxidation and Reduction of Tungsten Surface Download |
Aug 31, 2015 | 2007 | patent_own | Website, Process Tungsten CVD Download |
Aug 31, 2015 | 2002 | patent_own | Declaration of R. Maltiel in support of Patent Owner's Response to Petition Download |
Aug 31, 2015 | 17 | patent_own | Patent Owner Response to Petition for Inter Partes Review Download |
Aug 14, 2015 | 16 | petitioner | Updated Mandatory Notice Download |
Aug 12, 2015 | 15 | board | DECISION Granting Patent Owner's Motions for Pro Hac Vice Admission of Mr. Chen Download |
Aug 11, 2015 | 2001 | patent_own | Declaration of Jerry Chen in Support of Patent Owner's Motion for Pro Hac Vice Admission Download |
Aug 11, 2015 | 14 | patent_own | Patent Owner's Motion for Pro Hac Vice Admission of Jerry Chen Download |
Aug 4, 2015 | 13 | patent_own | Notice of Deposition of Gary W. Rubloff, Ph.D. Download |
Jun 17, 2015 | 11 | board | Decision - Institution of Inter Partes Review - 37 CFR 42.108 Download |
Jun 17, 2015 | 12 | board | Scheduling Order Download |
Jan 30, 2015 | 3001 | board | Exhibit 3001 Download |
Jan 30, 2015 | 10 | board | Decision - Granting Motion to Correct Filing Date Recorded in PRPS 37 C.F.R. 42.6 Download |
Jan 21, 2015 | 9 | petitioner | Petitioners updated mandatory notice Download |
Jan 20, 2015 | 7 | patent_own | Mandatory Notices and Designation of Counsel Download |
Jan 20, 2015 | 8 | patent_own | Opposition to Petitioner's Motion to Correct Filing Date Download |
Jan 16, 2015 | 5 | potential_ | Power of Attorney Download |
Jan 16, 2015 | 6 | potential_ | Related Matters Download |
Jan 14, 2015 | 4 | board | Notice of Filing Date Accorded to Petition Download |
Dec 19, 2014 | 3 | petitioner | Motion to Correct PRPS Filing Date Download |
Dec 19, 2014 | 2 | petitioner | Power of Attorney Download |
Dec 17, 2014 | 1002 | petitioner | Excerpts from the Prosecution History of the 893 Patent Download |
Dec 17, 2014 | 1010 | petitioner | AN INTEGRATED TUNGSTEN PLUG FABRICATION PROCESS, Conference Proceedings ULSI-VII Download |
Dec 17, 2014 | 1014 | petitioner | Applied Materials Article on the P5000 CVD system Download |
Dec 17, 2014 | 1005 | petitioner | U.S. Patent Number 5,843,840 Download |
Dec 17, 2014 | 1003 | petitioner | Declaration of Dr. Gary W. Rubloff Download |
Dec 17, 2014 | 1016 | petitioner | INTERCONNECTS FOR ULSI STATE OF THE ART AND FUTURE TRENDS, Solid State Device Research Conference Download |
Dec 17, 2014 | 1007 | petitioner | Excerpts from WEBSTER'S THIRD NEW INTERNATIONAL DICTIONARY Download |
Dec 17, 2014 | 1006 | petitioner | Excerpts from Introduction to Microelectronic Fabrication by R.C. Jaeger Download |
Dec 17, 2014 | 1013 | petitioner | U.S. Patent Number 5,292,554 Download |
Dec 17, 2014 | 1012 | petitioner | U.S. Patent Number 6,352,403 Download |
Dec 17, 2014 | 1015 | petitioner | Excerpts from Silicon Processing for the VLSI Era, Volume 1 Processing Technology, by S. Wolf Download |
Dec 17, 2014 | 1018 | petitioner | U.S. District Court District of Delaware Wilmington CIVIL DOCKET FOR CASE 1 13-cv-02033-RGA Download |
Dec 17, 2014 | 1008 | petitioner | U.S. Patent Number 5,953,631 Download |
Dec 17, 2014 | 1009 | petitioner | U.S. Patent Number 5,407,698 Download |
Dec 17, 2014 | 1017 | petitioner | Selective LPCVD of Tungsten, J. Electrochem Download |
Dec 17, 2014 | 1011 | petitioner | U.S. Patent Number 5,968,847 Download |
Dec 17, 2014 | 1 | petitioner | Petiton for Inter Partes Download |
Dec 17, 2014 | 1004 | petitioner | Curriculum Vitae of Dr. Gary W. Rubloff Download |
Dec 17, 2014 | 1001 | petitioner | U.S. Patent Number 6,030,893 Download |