Date Field | Doc. No. | Party | Description |
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Nov 15, 2018 | 3001 | | Ex. 3001 Download |
Jul 13, 2018 | 2013 | | Deposition Transcript of Dr. Rubloff July 5, 2018 Download |
Mar 29, 2018 | 2012 | | Yabumoto, Surface Damage on Si Substrates Caused by Reactive Sputter Etching Download |
Mar 29, 2018 | 2011 | | Fonash, An Overview of Dry Etching Damage and Contamination Effects Download |
Mar 29, 2018 | 2010 | | Ito, Mechanical Stress Effect of Etch-Stop Nitride and its Impact on Deep Submicron Transistor Design Download |
Mar 29, 2018 | 2009 | | Comprehensive Dictionary of Electrical Engineering, 2nd Ed. Download |
Mar 29, 2018 | 2008 | | Silicon Nitride Si3N4 Material Properties Download |
Mar 29, 2018 | 2007 | | Silicon Dioxide (SiO2) and Silicon Nitride (Si3N4) Properties Download |
Mar 29, 2018 | 2006 | | Silicon Processing for the VLSI Era (Wolf) Download |
Mar 29, 2018 | 2005 | | U.S. 6,441,418 (Shields) Download |
Mar 29, 2018 | 2004 | | Deposition Transcript of Gary Rubloff, Ph.D. March 9, 2018 Download |
Mar 29, 2018 | 2003 | | Ron Maltiel CV Download |
Mar 29, 2018 | 2002 | | Declaration of Ron Maltiel in Support of Patent Owner's Response to Petition Download |
Feb 2, 2018 | 2001 | | Declaration of Michael C. Ting In Support of Patent Owner's Motion for Pro Hac Vice Admission Download |
Jul 2, 2018 | 1030 | | Exhibit 1030 Download |
Jul 2, 2018 | 1029 | | Exhibit 1029 Download |
Jul 2, 2018 | 1028 | | Exhibit 1028 Download |
Jul 2, 2018 | 1027 | | Exhibit 1027 Download |
Jul 2, 2018 | 1026 | | Exhibit 1026 Download |
Jul 2, 2018 | 1025 | | Exhibit 1025 Download |
May 12, 2017 | 1024 | | Exhibit 1024 Download |
May 12, 2017 | 1023 | | Exhibit 1023 Download |
May 12, 2017 | 1022 | | Exhibit 1022 Download |
May 12, 2017 | 1021 | | Exhibit 1021 Download |
May 12, 2017 | 1020 | | Exhibit 1020 Download |
May 12, 2017 | 1015 | | Exhibit 1015 Download |
May 12, 2017 | 1014 | | Exhibit 1014 Download |
May 12, 2017 | 1013 | | Exhibit 1013 Download |
May 12, 2017 | 1012 | | Exhibit 1012 Download |
May 12, 2017 | 1011 | | Exhibit 1011 Download |
May 12, 2017 | 1010 | | Exhibit 1010 Download |
May 12, 2017 | 1009 | | Exhibit 1009 Download |
May 12, 2017 | 1008 | | Exhibit 1008 Download |
May 12, 2017 | 1007 | | Exhibit 1007 Download |
May 12, 2017 | 1006 | | Exhibit 1006 Download |
May 12, 2017 | 1005 | | Exhibit 1005 Download |
May 12, 2017 | 1004 | | Exhibit 1004 Download |
May 12, 2017 | 1003 | | Exhibit 1003 Download |
May 12, 2017 | 1002 | | Exhibit 1002 Download |
May 12, 2017 | 1001 | | Exhibit 1001 Download |
Jan 17, 2019 | 34 | | Patent Owner's Notice of Appeal Download |
Nov 15, 2018 | 33 | | Final Written Decision Download |
Oct 1, 2018 | 32 | | Hearing Transcript Download |
Aug 14, 2018 | 31 | | Patent Owner's Demonstrative Exhibits Download |
Aug 14, 2018 | 30 | | Petitioner's Demonstrative Exhibits Download |
Jul 26, 2018 | 29 | | Order - 35 U.S.C. 326(a)(10); 37 C.F.R. 42.70 Download |
Jul 26, 2018 | 28 | | Petitioner's Response to Patent Owner's Motion for Observations Download |
Jul 16, 2018 | 27 | | Patent Owner's Updated Exhibit List Download |
Jul 13, 2018 | 26 | | Patent Owner's Motion for Observation Regarding Cross-Examination of Dr. Rubloff Download |
Jul 12, 2018 | 25 | | Petitioner's Request for Oral Argument Download |
Jul 12, 2018 | 24 | | Patent Owner's Request for Oral Argument Download |
Jul 10, 2018 | 23 | | Joint Stipulation to Revise Scheduling Order Download |
Jul 5, 2018 | 22 | | Patent Owner's Objections to Evidence Download |
Jul 2, 2018 | 21 | | Petitioner Current List of Exhibits Download |
Jul 2, 2018 | 20 | | Petitioner's Reply to Patent Owner's Response Download |
Jun 29, 2018 | 19 | | Patent Owner's Notice of Deposition of Dr. Gary Rubloff Download |
Jun 29, 2018 | 18 | | Joint Stipulation to Revise Scheduling Order Download |
Jun 11, 2018 | 17 | | Patent Owner's Updated Mandatory Notices Download |
Jun 11, 2018 | 16 | | Patent Owner's Updated Power of Attorney Download |
Jun 4, 2018 | 15 | | ORDER Granting Patent Owner's Unopposed Motion for Admission Pro Hac Vice of
Michael C. Ting Download |
May 9, 2018 | 14 | | Petitioner's Notice of Deposition of Ron Maltiel Download |
Mar 29, 2018 | 13 | | Patent Owner's Response to Petition Download |
Mar 16, 2018 | 12 | | Joint Stipulation to Revise Scheduling Order Download |
Feb 20, 2018 | 11 | | Patent Owner's Notice of Deposition of Dr. Gary Rubloff Download |
Feb 20, 2018 | 10 | | Joint Stipulation to Revise Scheduling Order Download |
Feb 2, 2018 | 9 | | Patent Owner's Motion for Pro Hac Vice Admission of Michael C. Ting Download |
Nov 20, 2017 | 8 | | Scheduling Order Download |
Nov 20, 2017 | 7 | | Trial Instituted Document Download |
Jun 2, 2017 | 6 | | Notice of Accord Filing Date Download |
Jun 1, 2017 | 5 | | Notice of Accord Filing Date Download |
Jun 1, 2017 | 4 | | Patent Owner's Mandatory Notices Download |
Jun 1, 2017 | 3 | | Patent Owner's Power of Attorney Download |
May 12, 2017 | 2 | | Power of Attorney for Petitioner Samsung Electronics Co., Ltd. Download |
May 12, 2017 | 1 | | Petition for Inter Partes Review of U.S. Patent No. 7,375,027 Download |