Date Field | Doc. No. | Party | Description |
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Jun 26, 2018 | 3001 | | Exhibit 3001 Download |
Mar 9, 2018 | 2007 | | Nojiri, Dry Etching Technology for Semiconductors, Chp. 2 Download |
Mar 9, 2018 | 2006 | | Xiao, Introduction to Semiconductor Manufacturing Technology, Chp. 9 Download |
Mar 9, 2018 | 2005 | | Deposition Transcript of Dr. Rubloff February 9, 2018 Download |
Mar 9, 2018 | 2004 | | Declaration of Dhaval Brahmbhatt in Support of Patent Owner's Response to Petition Download |
Feb 2, 2018 | 2003 | | Declaration of Jerry Chen in Support of Patent Owner's Motion for Pro Hac Vice Admission Download |
Sep 1, 2017 | 2002 | | Dhaval Brahmbhatt CV Download |
Sep 1, 2017 | 2001 | | Declaration of Dhaval Brahmbhatt in Support of Patent Owner's Preliminary Response to Petition Download |
Jun 12, 2018 | 1030 | | Exhibit 1030 Download |
Jun 12, 2018 | 1029 | | Exhibit 1029 Download |
Jun 29, 2018 | 1028 | | Exhibit 1028 (corrected) Download |
Jun 12, 2018 | 1028 | | Exhibit 1028 Download |
Jun 12, 2018 | 1028 | | Exhibit 1028 Download |
May 12, 2017 | 1027 | | Exhibit 1027 Download |
May 12, 2017 | 1026 | | Exhibit 1026 Download |
May 12, 2017 | 1025 | | Exhibit 1025 Download |
May 12, 2017 | 1024 | | Exhibit 1024 Download |
May 12, 2017 | 1023 | | Exhibit 1023 Download |
May 12, 2017 | 1022 | | Exhibit 1022 Download |
May 12, 2017 | 1021 | | Exhibit 1021 Download |
May 12, 2017 | 1020 | | Exhibit 1020 Download |
May 12, 2017 | 1018 | | Exhibit 1018 Download |
May 12, 2017 | 1017 | | Exhibit 1017 Download |
May 12, 2017 | 1015 | | Exhibit 1015 Download |
May 12, 2017 | 1014 | | Exhibit 1014 Download |
May 12, 2017 | 1013 | | Exhibit 1013 Download |
May 12, 2017 | 1012 | | Exhibit 1012 Download |
May 12, 2017 | 1008 | | Exhibit 1008 Download |
May 12, 2017 | 1007 | | Exhibit 1007 Download |
May 12, 2017 | 1006 | | Exhibit 1006 Download |
May 12, 2017 | 1005 | | Exhibit 1005 Download |
May 12, 2017 | 1004 | | Exhibit 1004 Download |
May 12, 2017 | 1003 | | Exhibit 1003 Download |
May 12, 2017 | 1002 | | Exhibit 1002 Download |
May 12, 2017 | 1001 | | Exhibit 1001 Download |
Jan 29, 2019 | 35 | | Petitioner's Notice of Cross- Appeal Download |
Jan 17, 2019 | 34 | | Patent Owner's Notice of Appeal Download |
Nov 27, 2018 | 33 | | Termination Decision Document Download |
Oct 1, 2018 | 32 | | Hearing Transcript Download |
Aug 14, 2018 | 31 | | Patent Owner's Demonstrative Exhibits Download |
Aug 14, 2018 | 30 | | Petitioner's Demonstrative Exhibits Download |
Jul 27, 2018 | 29 | | Petitioner's Opposition to Patent Owner's Motion to Strike Download |
Jul 20, 2018 | 28 | | Order Conduct of the Proceeding Download |
Jul 16, 2018 | 27 | | ORDER Trial Hearing Notice 35 U.S.C. § 326(a)(10); 37 C.F.R. § 42.70 Download |
Jul 9, 2018 | 26 | | Petitioner's Request for Oral Argument Download |
Jul 9, 2018 | 25 | | Patent Owner's Request for Oral Argument Download |
Jul 9, 2018 | 24 | | Patent Owner's Motion to Exclude Evidence Download |
Jun 29, 2018 | 23 | | Submission of Corrected Exhibit 1028 Download |
Jun 26, 2018 | 22 | | ORDER Conduct of Proceeding Download |
Jun 19, 2018 | 21 | | Patent Owner's Objections to Evidence Download |
Jun 12, 2018 | 20 | | Petitioner's Current List of Exhibits Download |
Jun 12, 2018 | 19 | | Petitioner's Reply to Patent Owner's Response Download |
Jun 11, 2018 | 18 | | Patent Owner's Updated Mandatory Notices Download |
Jun 11, 2018 | 17 | | Patent Owner's Updated Power of Attorney Download |
Jun 5, 2018 | 16 | | Granting Patent Owner's Motions for Pro Hac Vice Admission of Jerry Chen Download |
May 16, 2018 | 15 | | Joint Stipulation to Revise Scheduling Order Download |
May 9, 2018 | 14 | | Petitioner's Notice of Deposition of Dhaval Brahmbhatt Download |
Mar 9, 2018 | 13 | | Patent Owner's Response to Petition Download |
Feb 20, 2018 | 12 | | Joint Stipulation to Revise Scheduling Order Download |
Feb 2, 2018 | 11 | | Patent Owner's Updated Exhibit List Download |
Feb 2, 2018 | 10 | | Patent Owner's Motion for Pro Hac Vice Admission of Jerry Chen Download |
Feb 1, 2018 | 9 | | Patent Owner's Notice of Deposition of Dr. Gary Rubloff Download |
Nov 29, 2017 | 8 | | SCHEDULING ORDER
37 C.F.R. ¿¿ 42.5(a) Download |
Nov 29, 2017 | 7 | | Institution of Inter Partes Review
37 C.F.R. § 42.108(b) Download |
Sep 1, 2017 | 6 | | Patent Owner's Preliminary Response to Petition Download |
Jun 2, 2017 | 5 | | Notice of Accord Filing Date Download |
Jun 1, 2017 | 4 | | Patent Owner's Mandatory Notices Download |
Jun 1, 2017 | 3 | | Patent Owner's Power of Attorney Download |
May 12, 2017 | 2 | | Power of Attorney for Petitioner Samsung Electronics Co., Ltd. Download |
May 12, 2017 | 1 | | Petition for Inter Partes Review of U.S. Patent No. 6,559,044 Download |