Date Field | Doc. No. | Party | Description |
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May 12, 2017 | 1 | | Petition for Inter Partes Review of U.S. Patent No. 6,562,714 Download |
May 12, 2017 | 2 | | Power of Attorney for Petitioner Samsung Electronics Co., Ltd. Download |
Jun 1, 2017 | 3 | | Patent Owner's Power of Attorney Download |
Jun 1, 2017 | 4 | | Patent Owner's Mandatory Notices Download |
Jun 2, 2017 | 5 | | Notice of Accord Filing Date Download |
Sep 1, 2017 | 6 | | Patent Owner's Preliminary Response to Petition Download |
Nov 29, 2017 | 7 | | Trial Instituted Document Download |
Nov 29, 2017 | 8 | | Scheduling Order Download |
Feb 2, 2018 | 9 | | Patent Owner's Motion for Pro Hac Vice Admission of Jerry Chen Download |
Feb 2, 2018 | 10 | | Patent Owner's Updated Exhibit List Download |
Feb 16, 2018 | 11 | | Patent Owner's Notice of Deposition of Dr. Stanley Shanfield Download |
Feb 20, 2018 | 12 | | Joint Stipulation to Revise Scheduling Order Download |
Mar 21, 2018 | 13 | | Patent Owner's Response to Petition Download |
May 9, 2018 | 14 | | Petitioner's Notice of Deposition of Ron Maltiel Download |
Jun 5, 2018 | 15 | | Granting Patent Owner's Motions for Pro Hac Vice Admission of Jerry Chen Download |
Jun 11, 2018 | 16 | | Patent Owner's Updated Power of Attorney Download |
Jun 11, 2018 | 17 | | Patent Owner's Updated Mandatory Notices Download |
Jun 13, 2018 | 18 | | Joint Stipulation to Revise Scheduling Order Download |
Jun 14, 2018 | 19 | | Patent Owner's Notice of Deposition of Dr. Gary Rubloff Download |
Jun 27, 2018 | 20 | | Petitioner's Reply to Patent Owner's Response Download |
Jun 27, 2018 | 21 | | Petitioner's Current List of Exhibits Download |
Jul 2, 2018 | 22 | | Patent Owner's Notice of Deposition of Dr. Stanley Shanfiled Download |
Jul 9, 2018 | 23 | | Patent Owner's Request for Oral Argument Download |
Jul 9, 2018 | 24 | | Petitioner's Request for Oral Argument Download |
Jul 12, 2018 | 25 | | Trial Hearing Notice
35 U.S.C. sec. 326(a)(10); 37 C.F.R. sec. 42.70 Download |
Jul 16, 2018 | 26 | | Patent Owner's Motion for Observation Regarding Cross-Examination of Dr. Shanfield Download |
Jul 16, 2018 | 27 | | Patent Owner's Updated Exhibit List Download |
Jul 23, 2018 | 28 | | Petitioner's Response to Patent Owner's Motion for Observations Download |
Aug 14, 2018 | 29 | | Petitioner's Demonstrative Exhibits Download |
Aug 14, 2018 | 30 | | Patent Owner's Demonstrative Exhibits Download |
Oct 1, 2018 | 31 | | Hearing Transcript Download |
Nov 27, 2018 | 32 | | FINAL WRITTEN DECISION
35 U.S.C. sec. 318 and 37 C.F.R. sec. 42.73 Download |
Jan 17, 2019 | 33 | | Patent Owner's Notice of Appeal Download |
May 12, 2017 | 1001 | | Exhibit 1001 Download |
May 12, 2017 | 1002 | | Exhibit 1002 Download |
May 12, 2017 | 1003 | | Exhibit 1003 Download |
May 12, 2017 | 1004 | | Exhibit 1004 Download |
May 12, 2017 | 1005 | | Exhibit 1005 Download |
May 12, 2017 | 1006 | | Exhibit 1006 Download |
May 12, 2017 | 1007 | | Exhibit 1007 Download |
May 12, 2017 | 1008 | | Exhibit 1008 Download |
May 12, 2017 | 1009 | | Exhibit 1009 Download |
May 12, 2017 | 1011 | | Exhibit 1011 Download |
May 12, 2017 | 1012 | | Exhibit 1012 Download |
May 12, 2017 | 1013 | | Exhibit 1013 Download |
May 12, 2017 | 1014 | | Exhibit 1014 Download |
May 12, 2017 | 1015 | | Exhibit 1015 Download |
May 12, 2017 | 1016 | | Exhibit 1016 Download |
May 12, 2017 | 1017 | | Exhibit 1017 Download |
May 12, 2017 | 1018 | | Exhibit 1018 Download |
May 12, 2017 | 1019 | | Exhibit 1019 Download |
Jun 27, 2018 | 1020 | | Exhibit 1020 Download |
Jun 27, 2018 | 1021 | | Exhibit 1021 Download |
Jun 27, 2018 | 1022 | | Exhibit 1022 Download |
Jun 27, 2018 | 1023 | | Exhibit 1023 Download |
Sep 1, 2017 | 2001 | | Random House College Dictionary Download |
Feb 2, 2018 | 2002 | | Declaration of Jerry Chen in Support of Patent Owner's Motion for Pro Hac Vice Admission Download |
Mar 21, 2018 | 2003 | | Declaration of Ron Maltiel in Support of Patent Owner's Response to Petition Download |
Mar 21, 2018 | 2004 | | Ron Maltiel Curriculum Vitae Download |
Mar 21, 2018 | 2005 | | Jansen, A survey on the reactive ion etching of silicon in microtechnology Download |
Mar 21, 2018 | 2006 | | Plummer, Silicon VLSI Technology, Fundamentals, Practice and Modeling Download |
Mar 21, 2018 | 2007 | | Doemling, Observation of inverse reactive ion etching lag for silicon dioxide etching in inductively coupled plasmas Download |
Mar 21, 2018 | 2008 | | Gottscho, Microscopic uniformity in plasma etching Download |
Mar 21, 2018 | 2009 | | Dr. Shanfield Deposition Transcript February 28, 2018 Download |
Jul 16, 2018 | 2010 | | Deposition Transcript of Dr. Shanfield July 6, 2018 Download |