Date Field | Doc. No. | Party | Description |
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Dec 15, 2020 | 10 | board | Notice of Refund Download |
Dec 4, 2020 | 9 | petitioner | Petitioner's Requests for Refund of Post-Institution Fees Download |
Nov 24, 2020 | 8 | board | TERMINATION
Settlement Prior to Institution of Trial Download |
Nov 18, 2020 | 7 | petitioner | Joint Requests to Keep Agreement Business Confidential and Separate Download |
Nov 18, 2020 | 6 | petitioner | Joint Motion To Terminate Download |
Aug 25, 2020 | 5 | board | Notice of Accord Filing Date Download |
Aug 10, 2020 | 4 | patent_own | Patent Owner's Power of Attorney Download |
Aug 10, 2020 | 3 | patent_own | Patent Owner's Mandatory Notices Download |
Jul 20, 2020 | 1008 | petitioner | Budge, PARSEC Process Analysis With Recipe Support for Etcher Control Download |
Jul 20, 2020 | 1009 | petitioner | Bennet Advanced Process Control Framework Initiative (APCFI) Proposal Summary and Plan Download |
Jul 20, 2020 | 1010 | petitioner | U.S. Patent No. 6,363,294 to Coronel et al Download |
Jul 20, 2020 | 1011 | petitioner | U.S. Patent No. 4,847,792 to Barna et al Download |
Jul 20, 2020 | 1012 | petitioner | Barna APC in the Semiconductor Industry, History and Near Term Prognosis Download |
Jul 20, 2020 | 1013 | petitioner | Declaration of C. Alan Weber Download |
Jul 20, 2020 | 1014 | petitioner | Declaration of Jacob R. Munford Download |
Jul 20, 2020 | 1 | petitioner | Petitioner's Power of Attorney Download |
Jul 20, 2020 | 1016 | petitioner | Declaration of Stephanie Butler Download |
Jul 20, 2020 | 1017 | petitioner | Slides from Real-time Data Acquisition and Fault Detection System presentation at SEMATECH AEC/APC Workshop VIII (October 28, 1996) Download |
Jul 20, 2020 | 1018 | petitioner | Edgar, Automatic control in microelectronics manufacturing Practices, challenges, and possibilities Download |
Jul 20, 2020 | 1019 | petitioner | McGehee The MMST Computer-Integrated Manufacturing System Framework Download |
Jul 20, 2020 | 1020 | petitioner | Mozumder Statistical Feedback Control of a Plasma Etch Process Download |
Jul 20, 2020 | 1021 | petitioner | Vantage Micro LLC's Opposition to Texas Instruments Incorporated's Motion for Judgment on the Pleadings That It Does Not Infringe U.S. Patent No. 6,546,508 Download |
Jul 20, 2020 | 2 | petitioner | Petition for Inter Partes Review Download |
Jul 20, 2020 | 1007 | petitioner | U.S. Patent No. 6,556,881 Miller Download |
Jul 20, 2020 | 1006 | petitioner | U.S. Patent No. 5,526,293 Mozumder Download |
Jul 20, 2020 | 1005 | petitioner | Musat Evaluation of Brookside Fault Detection and Classification (FC) Software on Applied Materials 5000 and 5300 Etch Tools Download |
Jul 20, 2020 | 1004 | petitioner | Mullins Advanced Process Control Framework Initiative (APCFI) 1.0 Specifications Download |
Jul 20, 2020 | 1003 | petitioner | Declaration of Thomas F Edgar Download |
Jul 20, 2020 | 1002 | petitioner | Prosecution History of the 508 Patent Download |
Jul 20, 2020 | 1001 | petitioner | U.S. Patent No. 6,546,508 to Sonderman et al Download |
Jul 20, 2020 | 1015 | petitioner | Appendix A3 of Vantage Micros Preliminary Infringement Contentions from Vantage Micro LLC v. Texas Instruments Inc Download |