Case number IPR2017-01072
Tokyo Electron Limited v. Flamm, Daniel > Summary
Court Case Number IPR2017-01072
Filing Date Mar 10, 2017
Court Patent Trial and Appeal Board
Status Institution Denied
Administrative JudgesKimberly McGraw, Christopher L. Crumbley, Jo-Anne M. Kokoski
Judge Writing the Final DecisionKimberly McGraw
Claims Challenged in the Petition: 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 64, 65
Petitioner
Patent Owner
Petitioner Attorneys
6Tokyo Electron Limited
Attorney Name: Soumya P. Panda
Rothwell, Figg, Ernst & Manbeck
Tokyo Electron America
Attorney Name: Mark C. Nelson
Dentons
Tokyo Electron America
Attorney Name: Patrick Doll
Dentons
Tokyo Electron America
Attorney Name: Kevin R. Greenleaf
Dentons
Tokyo Electron Limited
Attorney Name: Mark J. Kushner
Rothwell, Figg, Ernst & Manbeck
Patent Owner Attorneys
2Attorney Name: Rolf Otto Stadheim
Stadheim & Grear
Related Patents
| Doc No | Title | Issue date |
|---|---|---|
| RE040264 | Multi-temperature processing | Apr 29, 2008 |
