ZnO/Si SAW Device having separate comb transducer | Patent Number 04437031
US 04437031 NAFilled DateSep 30, 1982
Priority DateSep 30, 1982
Publication Date-
Expiration DateMar 13, 1988
Inventor/Applicants Michael R. Melloch
Robert L. Gunshor
Robert F. Pierret
Robert L. Gunshor
Robert F. Pierret
ExaminesREBSCH, DONALD
Art Unit2102
Technology Center2100
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