Method and apparatus for preventing cross contamination of species during the processing of semiconductor wafers | Patent Number 04937206

US 04937206 NA
Application Number7377692
Publication Number-
Pendency11 months, 21 days
Filled DateJul 10, 1989
Priority DateJul 10, 1989
Publication Date-
Expiration DateJun 26, 1994
Inventor/Applicants Peter R. Jaffe
Kevin Fairbairn
ExaminesEVERHART, BYRON S
Art Unit1104
Technology Center1100
Assignments
Applied Materials Inc.
Current
Applied Materials IsraelApplied Materials Inc.
Original
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