Semiconductor wafer transfer in processing systems | Patent Number 05100502

US 05100502 NA
Application Number7495885
Publication Number-
Pendency2 years, 13 days
Filled DateMar 19, 1990
Priority DateMar 19, 1990
Publication Date-
Expiration DateMar 19, 2010
Inventor/Applicants Steven C. Murdoch
Robert J. Steger
Mahasukh Vora
ExaminesPOWELL, WILLIAM A
Art Unit1304
Technology Center1300
Assignments
Applied Materials Inc.
Current
Applied Materials IsraelApplied Materials Inc.
Original
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