Apparatus for supercritical cleaning | Patent Number 05355901
US 05355901 NAFilled DateOct 27, 1992
Priority DateOct 27, 1992
Publication Date-
Expiration DateOct 18, 1998
Inventor/Applicants Larry R. Rosio
Stephen H. Shore
John A. Metalonis
Richard J. Mielnik
Charles W. Smith
Richard K. Reber
Stephen H. Shore
John A. Metalonis
Richard J. Mielnik
Charles W. Smith
Richard K. Reber
ExaminesSTINSON, FRANKIE L
Art Unit2402
Technology Center2400
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