Method of spiral resist deposition | Patent Number 05395803

US 05395803 NA
Application Number8118538
Publication Number-
Pendency1 year, 6 months
Filled DateSep 8, 1993
Priority DateSep 8, 1993
Publication Date-
Expiration DateSep 8, 2013
Inventor/Applicants Thomas E. Adams
ExaminesGURLEY, LYNNE ANN
Art Unit1104
Technology Center1100
Assignments
At&t Company
Current
At&t ServicesAt&t Company
Original
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