Electron beam deposition of gallium oxide thin films using a single high purity crystal source | Patent Number 05451548

US 05451548 NA
Application Number8217296
Publication Number-
Pendency1 year, 6 months
Filled DateMar 23, 1994
Priority DateMar 23, 1994
Publication Date-
Expiration DateMar 23, 2014
Inventor/Applicants Erdmann F. Schubert
Matthias Passlack
Neil E. J. Hunt
George J. Zydzik
ExaminesEVERHART, BYRON S
Art Unit1109
Technology Center1100
Assignments
At&t Company
Current
At&t ServicesAt&t Company
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