Method for preparation of silicon nitride gallium diffusion barrier for use in molecular beam epitaxial growth of gallium arsenide | Patent Number 05468689
US 05468689 NAFilled DateNov 16, 1993
Priority DateNov 16, 1993
Publication Date-
Expiration DateNov 16, 2013
Inventor/Applicants Keith W. Goossen
William Y. Jan
James A. Walker
John E. Cunningham
William Y. Jan
James A. Walker
John E. Cunningham
ExaminesWHIPPLE, MATTHEW LAVERNE
Art Unit1109
Technology Center1100
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