Method of high yield manufacture of VLSI type integrated circuit devices by determining critical surface characteristics of mounting films | Patent Number 05473433
US 05473433 NAFilled DateAug 3, 1994
Priority DateDec 7, 1993
Publication Date-
Expiration DateDec 5, 1999
Inventor/Applicants Anton J. Miller
ExaminesKIM, ROBERT H
Art Unit2505
Technology Center2500
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