Material removal with focused particle beams | Patent Number 05482802
US 05482802 NAFilled DateNov 24, 1993
Priority DateNov 24, 1993
Publication Date-
Expiration DateNov 24, 2013
Inventor/Applicants Lloyd R. Harriott
Ratnaji R. Kola
George K. Celler
Ratnaji R. Kola
George K. Celler
ExaminesROSASCO, STEPHEN D
Art Unit1507
Technology Center1500
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