Apparatus for supercritical cleaning | Patent Number 05526834
US 05526834 NAFilled DateAug 17, 1994
Priority DateOct 27, 1992
Publication Date-
Expiration DateOct 27, 2012
Inventor/Applicants Larry R. Rosio
Stephen H. Shore
Richard J. Mielnik
Charles W. Smith
John A. Metalonis
Richard K. Reber
Stephen H. Shore
Richard J. Mielnik
Charles W. Smith
John A. Metalonis
Richard K. Reber
ExaminesSTINSON, FRANKIE L
Art Unit3405
Technology Center3400
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