Process of manufacturing a microelectric device using a removable support substrate and etch-stop | Patent Number 05591678
US 05591678 NAFilled DateJun 7, 1995
Priority DateJan 19, 1993
Publication Date-
Expiration DateJan 19, 2013
Inventor/Applicants Gerard T. Malloy
Ronald M. Finnila
Joseph J. Bendik
Ronald M. Finnila
Joseph J. Bendik
ExaminesRIZKALLAH, KIMBERLY NGUYEN
Art Unit2894
Technology Center2800
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