Method for improving the manufacturability of the spin-on glass etchback process | Patent Number 05618757

US 05618757 NA
Application Number8593898
Publication Number-
Pendency1 year, 2 months, 9 days
Filled DateJan 30, 1996
Priority DateJan 30, 1996
Publication Date-
Expiration DateJan 30, 2016
Inventor/Applicants Milind G. Weling
Subhas Bothra
ExaminesGURLEY, LYNNE ANN
Art Unit1104
Technology Center1100
Assignments
Nxp Bv
Current
Vlsi Technology Llc
Original
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